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IETE Journal of Research Volume 14, 1968 - Issue 11

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Original Articles

Silicon Vapour Epitaxy

Balepur S. MurthySolid State Physics Laboratory, Lucknow Road, Delhi 7.

(Assoc. Member) ,

R. KesavanSolid State Physics Laboratory, Lucknow Road, Delhi 7.

Km. V. RatnavatiSolid State Physics Laboratory, Lucknow Road, Delhi 7.

Pages 486-495 | Published online: 21 Aug 2015

Cite this article
https://doi.org/10.1080/03772063.1968.11485691

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REFERENCES

“Integrated circuits, design principles and fabrication”, Editor R. M. Warner (Jr) (McGraw-Hill Book Co. Inc.), 1956, 281–82.
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Irwin Berman, JECS, Oct. 1962, 1002.
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Robert J. Walsh, SCP & SST, Aug. 1964.
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Allen, C. G. & Bylander, E. G., Metallurgy of semiconductor materials (J. B. Shroeder, Ed.), Vol. 15, p. 113.
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Theurer, H. C., JECS, 7 (1961), 108.
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