Advanced search
Publication Cover
IETE Journal of Research Volume 27, 1981 - Issue 4
Submit an article Journal homepage
1
Views
1
CrossRef citations to date
0
Altmetric
Original Articles

Thin Films for M.I.C. Applications

P.L. BhartiSolid State Physics Laboratory, Lucknow Road. Delhi110 007.
,
S.K. SarinSolid State Physics Laboratory, Lucknow Road. Delhi110 007.
&
K.V. PadmanabhanSolid State Physics Laboratory, Lucknow Road. Delhi110 007.
Pages 138-141 | Published online: 11 Jul 2015

REFERENCES

  • Sobel (H). Applications of Integrated Circuit Technology to Microwave Frequencies. Proc. IEEE. 59,8; 1977; 1200–1211.
  • Caulton (M). Film Technology in Microwave Integrated Circuits. Proc. IEEE. 59, 10; 1977; 1481–1489.
  • Waugh (R), La Combe (D) & Garcia (J). Microwave Integrated Circuits Using Thick and Thin Film Technologies. Solid-State Technology. 16, April 1977; 59–65.
  • Keister (F Z). An Evaluation of Materials and Processes for Integrated Microwave Circuits. IEEE Trans. MTT-16, 7; 1966; 469–475.
  • Caulton (M) & Sobel (H). Microwave Integrated Circuit Technology—A Survey. IEEE J. Solid-State Circuits. SC-5, Dec. 1977; 292–303.
  • Canning. Hand Book on Electroplating. 1966. W. Canning & Co. Ltd. p 440.
  • Rairden (J H), Neugebeuer (C A) & Sigsfec (R A). Interdiffusion in Thin Conductor Films Chromium/gold, nickel/gold, and chromium silicide/gold. General Electric Rep. 70-C-235, July 1970.
  • Caulton (M), Knight (S P) & Daly (D A). Hybrid Integrated Lumped-Element Microwave Amplifiers. IEEE Trans. MTT- 16, 7; 1966; 397–404.
  • Aitcheson (C S), Davies (R), Higgins (I D), Longley (S R), Newton (B H), Wells (J F) & Williams (J C). Lumped Circuit Elements at Microwave Frequencies. IEEE Trans. MTT-19, 12; 1977; 928–937.
  • Binotto (L) & Piacentini (G F). Analysis of Interdigited Thin Film Capacitors. Thin-Solid Films. 12. 1977; 325–333.
  • Young (L) & Sobel (H). Advances in Microwaves. 8, 1974 Academic Press. p 34.
  • Sobel (H). A Review of the Technological and Electromagnetic Limitations of Hybrid Circuits for Microwave Applications. IEEE Trans. PHP-8, June 1977; 59–66.
  • Brewer (G R). Electron and Ion Beams in Microelectronic Fabrication Processes. Solid-State Tech. 15, July 1977; 36–39.
  • Miller (R T). Electron Beam Fabrication. Solid-State Tech. 16, July 1977; 25–29.
  • Brauer (W), Kienel (G) & Wechsung (R). Reproducible Methods for the Fabrication of Microwave Strip Lines of High Precision and Reliability. Solid-State Tech. 19, Dec. 1977; 67–73.
  • Heinecke (R A H). Plasma Etching of Films at High Rates. Solid-State Tech. 21, April 1977; 104–106.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.