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Letters to the Editor

Problems in Au/Cr Metallic System on Silicon Devices

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Pages 81-82 | Received 08 Dec 1980, Published online: 11 Jul 2015

REFERENCES

  • Black (J R). Electromigration Failure Modes in Aluminium Metallization Systems for Semiconductor Devices. Proc. IEEE. 57, 1969; 1587–1594.
  • Bleck (I A) & Sello (H). The Failure of Thin Aluminium Current Carrying Strips on Oxidized Silicon. Physics of Failure in Electronics. 1967 T.S. Shilliday and J. Vaccaro Edition, P 496–505.
  • Ghate (P B), Blair (J C) & Fuller (C R). Metallization in Micro Electronics. Thin-Solid Films. 45, 1977; 69–84.
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  • Terry (I.E)& Wilson (R V). Metallization on Systems for Silicon Integrated Circuits. Proc. IEEE. 57, 1969; 1580–1586.
  • Berry (R W), Hall (P M) & Harris (H T). Thin-Film Technology. 1968. Van Nostrand-Reinhold, New York. P 337–353.
  • Holloway (P H). Gold-Chromium Metallizations for Electronic Devices, Solid-State Technology. 1980; 109–115.
  • Harper (C A). Processes Used and Their Relation to Product Design. Handbook of Materials and Processes for Electronics. 1970. McGraw-Hill Inc., P 14–68.
  • Bart (J J). The Analysis of Chemical and Metallurgical Changes in Microcircuit Metallization Systems. IEEE Trans. ED-16, 1969, 351–356.
  • Ching (Y S) etat. Contact Resistance of Metal-Silicon Systems at Microwave Frequencies. RCA Review. 37, 1976; 107–118.
  • Vaya (P R) & Kakati (D). CSD Technical Report. 6/46,1976.
  • Yu (A Y C). Electron Tunnelling and Contact Resistance of Metal-Silicon Contact Barriers. Solid-State Electronics. 13, 1970; 239–247.

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