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Letters to the Editor

Effect of Trichloroethylene on the Oxide Charge and Interface State Density of a Silicon MIS Tunnel Structure

, & , FIETE
Pages 63-65 | Received 21 May 1984, Published online: 02 Jun 2015

REFERENCES

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  • Mao-Chieh Chen & J.W. Hile. Oxide charge reduction by chemical gettering with trichloroethylene during thermal oxidation of silicon, ibid., vol 119, pp 223–225, 1972.
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  • A.N. Daw, A.K. Datta & M.C. Ash, On the determination of the neutral level and charge density in the interfacial layer of a MIS diode, Solid-state electron, vol 25, pp 431–432, May 1982.
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  • R.N. Mitra, S.B. Roy, K. Ghosh & A.N. Daw, Electrochemically deposited Schottky contacts of In, Cd and In-Cd alloy, ibid., vol 23, pp 793–795, July 1980.
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