Design and Simulation of a Zinc Oxide Thin Film Bulk Acoustic Resonator Filter for 2.6 GHz Band Applications

References

• G. F. Perez-Sanchez, and A.-M. Acevedo, “Design of bulk acoustic wave resonators based on ZnO for filter applications,” in International Conference on Electrical Engineering, Computing Science and Automatic Control, Toluca, 2009, pp. 1–6.
   Google Scholar
• H. P. Loebl, C. Metzmacher, R. F. Milsom, P. Lok, F. Van Straten, and A. Tuinhout, “RF bulk acoustic wave resonators and filters,” J. Electroceram., Vol. 12, no. 1–2, pp. 109–18, Jan. 2004.
   Web of Science ®Google Scholar
• S. Jose, R. J. E. Hueting, and A. B. M. Jansman, “Modeling of bulk acoustic wave resonators for microwave filters,” in Proceedings of the 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, Veldhoven, Netherlands, Nov. 27–28, 2008, pp. 558–61.
   Google Scholar
• C. Vale, J. Rosenbaum, S. Horwitz, S. Krishnaswamy, and R. Moore., “FBAR filters at GHz frequencies,” in Proceedings of the 44th Annual Symposium on Frequency Control, Baltimore, MD, May 23, 1990, pp. 332–6.
   Google Scholar
• J. Y. Park, H. C. Lee, H. Kyeong Lee, J. Young Ko, and J. U. Bu, “Silicon bulk micromachined FBAR filters for W-CDMA applications,” in 33rd European Microwave Conference, Munich, Germany, 2003, pp. 907–10.
   Google Scholar
• M. E. Hassan, E. Kerherve, Y. Deval, A. A. Shirakawa, P. Jarry, and A. Cathlin, “A study on FBAR filters reconfiguration,” in 12th IEEE International Conference on Electronics, Circuits and Systems, Gammarath, Tunisia, 2005, pp. 1–4.
   Google Scholar
• M. El Hassan, E. Kerherve, Y. Deval, K. Baraka, J. B. David, and D. Belot, “Techniques for tuning BAW-SMR resonators for the 4th generation of mobile communications, modeling and measurement methods for acoustic waves and for acoustic microdevices,” Available: http://www.intechopen.com/books/modeling-and-measurement-methods-for-acoustic-waves-and-for-acoustic-microdevices/techniques-for-tuning-baw-smr-resonators-for-the-4th-generation-of-mobile-communications
   Google Scholar
• Z. Xinen, and A. Mortazawi, “Intrinsically switchable ferroelectric BAW resonators and filters,” in Proceedings of the 40th European Microwave Conference, Paris, France, 2010, pp. 803–6.
   Google Scholar
• S. Sis, V. Lee, and A. Mortazawi, “ Intrinsically switchable, BST-on-silicon composite FBARs,” in IEEE MTT-S International Microwave Symposium Digest (MTT), Baltimore, MD, 2011, pp. 1–4.
   Google Scholar
• V. Lee, A. S. Sis, S. Lee, and A. Mortazawi, “Intrinsically switchable ferroelectric bulk acoustic wave filters based on barium strontium titanate thin films,” in IEEE International Wireless Symposium (IWS), Beijing, China, 2013, pp. 1–4.
   Google Scholar
• A. A. Sis, S. Ahmed, V. Lee, J. D. Phillips, and A. Mortazawi, “Intrinsically switchable thin film ferroelectric resonators,” in IEEE MTT-S International Microwave Symposium Digest (MTT), Montreal, Canada, 2012, pp. 1–3.
   Google Scholar
• K.-y. Hashimoto, RF Bulk Acoustic Wave Filters for Communications. Artech House, Artech, Boston, 2009.
   Google Scholar
• S. Rathod, A. Vir Singh, S. Chandra, and S. K. Kaul, “Design, fabrication and characterization of ZnO based thin film bulk acoustic resonators,” Adv. Mater. Res., Vol. 254, pp. 144–7, May 2011.
   Google Scholar
• Y. Dae-Kim, K.-H. Sunwoo, S.-C. Sul, J.-H. Lee, D.-H. Kim, I.-S. Song, S.-H. Choa, and J.-G. Yook, “Highly miniaturized RF band pass filter based on thin-film bulk acoustic wave resonator for 5 GHz band application,” IEEE Trans. Microw. Theory Tech., Vol. 54, no. 3, pp. 1218–28, Mar. 2006.
   Web of Science ®Google Scholar
• “The 2.6 GHz spectrum band: An opportunity for global mobile,” Available: http://www.gsmworld.com/mobilebroadband
   Google Scholar
• L. Catherinot, S. Giraud, M. Chatras, S. Bila, D. Cros, T. Baron, S. Ballandras, L. Estagerie, and P. Monfraix, “A general procedure for the design of bulk acoustic wave filters,” Int. J. RF Microw. Comput. Aided Eng., Vol. 21, no. 5, pp. 458–65, Sep. 2011.
   Web of Science ®Google Scholar
• FBAR design tutorial, “‘MEMS design and analysis in analyzer’ Tutorials, Section-4 – ‘FBAR Analysis’, T4-1 to T4-38,” Coventorware, 2012.
   Google Scholar
• H. Jin, S. R. Dong, J. K. Luo, and W. L. Milne, “Generalised Butterworth Van Dyke equivalent circuit for thin-film bilk acoustic resonator,” Electron. Lett., Vol. 47, no. 7, pp. 424–6, Mar. 2011.
   Web of Science ®Google Scholar
• S. Qing-Xin, P. Kirby, E. Komuro, M. Imura, Q. Zghang, and R. Whatmore, “Thin film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films,” IEEE Trans. Microw. Theory Tech., Vol. 49, no. 4, pp. 769–78, Apr. 2001.
   Web of Science ®Google Scholar
• C. M. Fang, S. Pao, C. Lee, Y. Lu, P. Y. Chen, Y. C. Chin, and P. Z Chang, “Development of 2.4 GHz film bulk acoustic wave filter for wireless communication,” J. Micro/Nanolithogr. MEMS MOEMS, Vol. 8, no. 2, pp. 1–7, Apr. 2009.
   Web of Science ®Google Scholar
• H. Zhang, W. Pang, W. Chen, and C. Zhou, “Design of unbalanced and balanced radio frequency bulk acoustic wave filters for TD-SCDM,” in International Conference on Microwave and Millimeter Wave Technology, Chengudu, China, May 2010, pp. 878–81.
   Google Scholar
• K. W. Kim, J. G. Yook, M. G. Gu, W. Y. Song, Y. J. Yoon, and H. K. Park, “TFBAR filters for 2 GHz wireless applications,” in IEEE MTT-S International Microwave Symposium Digest, Vol. 2, Seattle, WA, Jun. 2002, pp. 1181–4.
   Google Scholar
• A. A. Shirakawa, P. Jarry, J. M. Pham, E. Korherve, F. Dumont, J.-S. David, and A. Cathelin, “Ladder-lattice bulk acoustic wave filters: Concept, design and implementation,” Int. J. RF Microw. Comput. Aided Eng., Vol. 18, no. 5, pp. 476–84, Sep. 2008.
   Web of Science ®Google Scholar
• A. A. Shirakawa, M. El. Hassan, J.-M. Pham, P. Jarry, E. Kerherve, J.-B. David, F. Dumount, and D. Belot, “Method for improving ladder bulk acoustic wave filters rejection,” Analog Integr. Circuits Signal Process., Vol. 55, pp. 69–75, Apr. 2008.
   Web of Science ®Google Scholar