A Novel SPDT Rotary RF MEMS Switch for Low Loss and Power Efficient Signal Routing

References

• E. Pirmoradi, H. Mirzajani, and H. B. Ghavifekr, “Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications,” Microsystem Technol., Vol. 21, no. 2, pp. 465–75, 2014.
   Web of Science ®Google Scholar
• H. Mirzajani, H. B. Ghavifekr, E. N. Aghdam, H. Demaghsi, and R. H. Vafaie, “Enhancement of mechanical resonant modes by miniaturization of frequency tunable MEMS-enabled microstrip patch antenna,” Microsystem Technol., Vol. 21, no. 4, pp. 773–83, 2014.
   Web of Science ®Google Scholar
• M. Baghelani, A. Ebrahimi, and H. Ghavifekr, “Design of RF MEMS based oscillatory neural network for ultra high speed associative memories,” Neural Proces. Lett., Vol. 40, no. 1, pp. 93–102, 2014.
   Web of Science ®Google Scholar
• H. Mirzajani, A. Pourmand, E. N. Aghdam, and H. B. Ghavifekr, “Frequency agile MEMS patch antenna for reconfigurable RF front-ends.” in 22nd Iranian Conference on Electrical Engineering (ICEE), 2014, pp. 393–8.
   Google Scholar
• V. Kolte, and P. M. Mahajan, “Design and analysis of non-uniform shaped RF MEMS switch,” J. Computational Electron., Vol. 13, no. 2, pp. 547–54, 2014.
   Web of Science ®Google Scholar
• S. Barzegar, H. Mirzajani, and H. B. Ghavifekr, “A new linearly tunable RF MEMS varactor with latching mechanism for low voltage and low power reconfigurable networks,” Wireless Personal Commun., Vol. 83, no. 3, pp. 2249–65, 2015.
   Web of Science ®Google Scholar
• D.-M. Fang, Y. Zhou, W. Ding, X.-N. Wang, and X.-L. Zhao, “Surface micromachined three-dimensional solenoid-type inductor,” presented at 2nd International Conference on Multi-Material Micro Manufacture, 2006, pp. 103–6.
   Google Scholar
• V. K. Varadan, K. J. Vinoy, and K. A. Jose, RF MEMS and their Applications, Chichester, UK: John Wiley & Sons, Ltd, 2003.
   Google Scholar
• G. M. Rebeiz, RF MEMS: Theory, Design, and Technology, Hoboken, NJ: John Wiley & Sons, Ltd, 2003.
   Google Scholar
• G. M. Rebeiz, and J. B. Muldavin, “RF MEMS switches and switch circuits,” IEEE Microwave Magazine, Vol. 2, no. 4, pp. 59–71, 2001.
   Web of Science ®Google Scholar
• S. K. Lahiri, H. Saha, and A. Kundu, “RF MEMS SWITCH: An overview at- a-glance,” presented at 4th International Conference on Computers and Devices for Communication, Kolkata, 2009, pp. 1–5.
   Google Scholar
• M. C. Scardelletti, G. E. Ponchak, and N. C. Varaljay, “MEMS, Ka-band single-pole double-throw (SPDT) switch for switched line phase shifters.”, presented at IEEE Antennas and Propagation Society International Symposium, San Antonio, TX, 2002, pp. 2–5.
   Google Scholar
• M. Daneshmand, S. Fouladi, R. R. Mansour, M. Lisi, and T. Stajcer, “Thermally-actuated latching RF MEMS switch.” in IEEE MTT-S International Microwave Symposium (IMS'2009), Boston, MA, 2009, pp. 1217–20.
   Google Scholar
• Y.-q. Zhu, L. Han, M. Qin, and Q.-a. Huang, “Novel DC-40 GHz MEMS series-shunt switch for high isolation and high power applications,” Sensors Actuators A: Phys., Vol. 214, pp. 101–10, 2014.
   Web of Science ®Google Scholar
• Z. Yan-qing, H. Lei, W. Li-Feng, T. Jie-Ying, and H. Qing-An, “A novel three-state RF MEMS switch for ultrabroadband(DC-40 GHz) applications,” Electron Device Lett., IEEE, Vol. 34, pp. 1062–64, 2013.
   Web of Science ®Google Scholar
• L. Lin, and Mu Chiao, “Electrothermal responses of lineshape microstructures,” Sensors Actuators A: Phys., Vol. 55, no. 1, pp. 35–41, 1996.
   Web of Science ®Google Scholar
• R. Hickey, M. Kujath, and T. Hubbard, “Heat transfer analysis and optimization of two-beam microelectromechanicalthermal actuators.” J. Vacuum Sci. Technol. A: Vacuum, Surfaces, Films, Vol. 20, no. 3, pp. 971–42002.
   Web of Science ®Google Scholar
• H. Qing-An, and L. Neville KaShek, “Analysis and design of polysilicon thermal flexure actuator,” J. Micromechanics Microengineering, Vol. 9, no. 1, pp. 64–70,1999.
   Web of Science ®Google Scholar
• D. G. Elms, Linear Elastic Analysis, London: Batsford, 1970.
   Google Scholar
• R. Smith, D. R. Sparks, D. Riley, and N. Najafi, “A MEMS-based coriolis mass flow sensor for industrial applications,” IEEE Transactions on Ind. Electron., Vol. 56, pp. 1066–71, 2009.
   Web of Science ®Google Scholar
• H. Mirzajani, M. Nasiri, and H. B. Ghavifekr, “A new design of MEMS-based wideband frequency reconfigurable microstrip patch antenna.” in Proceedings of the 8th International Symposium on Mechatronics and its Applications (ISMA), 2012, pp. 1–6.
   Google Scholar
• D. Bansal, A. Kumar, A. Sharma, and K. J. Rangra, “Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch,” Microsystem Technol., Vol. 21, no. 5, pp. 1–6, 2014.
   Web of Science ®Google Scholar
• S. Dey, and S. K. Koul, “Design and development of miniaturized high isolation MEMS SPDT switch for Ku-band T/R module application,” paper presented at the IEEE MTTS International Microwave and RF Conference, New Delhi, Dec. 14–16, 2013.
   Google Scholar
• A. Yahiaoui, E. Lemoine, A. Pothier, and P. Blondy, “An all-metal RFMEMS switch with large displacement and potential mechanical creep reduction,” Paper presented at the IEEE MTT-S International Microwave Symposium (IMS), Tampa, FL, Jun. 1–6 2014, 2014.
   Google Scholar
• M. Daneshmand, W. D. Yan, and R. R. Mansour, “Thermally actuated multiport RF MEMS switches and their performance in a vacuumed Environment,” IEEE Trans.Microwave Theory Tech., Vol. 55, no. 6, pp. 1229–36, 2007.
   Web of Science ®Google Scholar
• R. W. Moseley, E. M. Yeatman, A. S. Holmes, R. R. A. Syms, A. P. Finlay, and P. Boniface, “Laterally actuated, low voltage, 3-port RF MEMS switch.” in 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, 2006, pp. 878–81.
   Google Scholar