Multi-perforated Energy-Efficient Piezoelectric Energy Harvester Using Improved Stress Distribution

References

• A. Anand, and S. Kundu, “Design of a spiral-shaped piezoelectric energy harvester for powering pacemakers,” Nanomater. Energy, Vol. 8, no. 2, pp. 139–150, Sep. 2019.
   Web of Science ®Google Scholar
• A. Anand and S. Kundu, “Design of MEMS based piezoelectric energy harvester for pacemaker,” in Devices for Integrated Circuit (DevIC). IEEE, 2019, pp. 465–9.
   Google Scholar
• D. Chaudhuri, S. Kundu, and N. Chattoraj, “Harvesting energy with zinc oxide bio-compatible piezoelectric material for powering cochlear implants,” in Innovations in Power and Advanced Computing Technologies, i-PACT, 2017, pp. 1–5.
   Google Scholar
• S. Roundy and P. K. Wright, “A piezoelectric vibration based generator for wireless electronics,” Smart Mater. Struct., Vol. 13, no. 5, pp. 1131–42, Aug. 2004.
   Web of Science ®Google Scholar
• S. Roundy, P. K. Wright, and J. Rabaey, “A study of low level vibrations as a power source for wireless sensor nodes,” Comput. Commun., Vol. 26, no. 11, pp. 1131–44, July 2003.
   Web of Science ®Google Scholar
• P. D. Mitcheson, P. Miao, B. H. Stark, E. M. Yeatman, A. S. Holmes, and T. C. Green, “MEMS electrostatic micropower generator for low frequency operation,” Sens. Actuators, A, Vol. 115, no. 2–3, pp. 523–9, Sep. 2004.
   Web of Science ®Google Scholar
• P. Glynne-Jones, M. J. Tudor, S. P. Beeby, and N. M. White, “An electromagnetic, vibration-powered generator for intelligent sensor systems,” Sens. Actuators A, Vol. 110, no. 1–3, pp. 344–9, Feb. 2004.
   Google Scholar
• S. Naval, P. K. Sinha, N. K. Das, A. Anand, and S. Kundu, “Wideband piezoelectric energy harvester design using parallel connection of multiple beams,” Int. J. Nanoparticles, Vol. 12, no. 3, pp. 206–223, 2020.
   Google Scholar
• S. Nabavi, and L. Zhang, “Portable wind energy harvesters for low- power applications: a survey,” Sensors, Vol. 16, no. 7, pp. 1101, 2016. https://www.mdpi.com/1424-8220/16/7/1101.
   PubMed Web of Science ®Google Scholar
• S. Nabavi, and L. Zhang, “Design and optimization of Piezoelectric MEMS vibration energy harvesters based on genetic algorithm,” IEEE Sens. J., Vol. 17, no. 22, pp. 7372–82, Nov. 2017. doi:10.1109/JSEN.2017.2756921.
   Web of Science ®Google Scholar
• G. Gafforelli, R. Ardito, A. Corigliano, C. Valzasina, and F. Procopio. “Numerical simulations of piezoelectric MEMS energy harvesters,” 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Ghent, pp. 1–9, 2014, doi:10.1109/EuroSimE.2014.6813825.
   Google Scholar
• T. Galchev, E. E. Aktakka, and K. Najafi, “A piezoelectric parametric frequency increased generator for harvesting Low-Frequency vibrations,” J. Microelectromech. Syst., Vol. 21, no. 6, pp. 1311–20, Dec. 2012. doi:10.1109/JMEMS.2012.2205901.
   Web of Science ®Google Scholar
• A. Anand, S. Naval, P. K. Sinha, N. K. Das, and S. Kundu, “Effects of coupling in piezoelectric multi-beam structure,” Microsyst. Technol., Vol. 26, no. 4, pp. 1235–52, 2020.
   Web of Science ®Google Scholar
• M. Z. Ansari and C. Cho, “A study on increasing sensitivity of rectangular microcantilevers used in biosensors” sensors,” Sensors, Vol. 8, no. 11, pp. 7530–44, 2008.
   PubMed Web of Science ®Google Scholar
• A. Husain. “MEMS-based photonic switching in communications networks,” OFC 2001. Optical Fiber Communication Conference and Exhibit. Technical Digest Postconference Edition (IEEE Cat. 01CH37171), Anaheim, CA, pp. WX1–WX1, 2001, doi: 10.1109/OFC.2001.928420.
   Google Scholar
• H. Liu, C. J. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for Low-Frequency vibrations With wideband operation range and steadily increased output power,” J. Microelectromechanical Syst., Vol. 20, no. 5, pp. 1131–42, Oct. 2011. doi:10.1109/JMEMS.2011.2162488.
   Web of Science ®Google Scholar
• S. Priya, and D. J. Inman, Energy Harvesting Technologies. Springer, Vol. 21, 2009. doi:10.1007/978-0-387-76464-1.
   Google Scholar
• J. Cao, M. Ling, D. J. Inman, and J Lin, “Generalized constitutive equations for piezo-actuated compliant mechanism,” Smart Mater. Struct., Vol. 25, no. 9, pp. 095005, Aug. 2016.
   Web of Science ®Google Scholar
• S. S. Rao, Vibration of Continuous Systems. Wiley, Vol. 464, 2007. doi:10.1002/9780470117866.
   Google Scholar
• P. M. Kumar, A. Ashok, P. Pal, and A. K. Pandey, “Frequency tuning of weakly and strongly coupled micromechanical beams,” ISSS Journal of Micro and Smart Systems, Vol. 9, no. 2, pp. 17–130, 2020.
   Google Scholar
• A. Akarapu, R. P. Nighot, L. Devsoth, M. Yadav, P. Pal, and A. K. Pandey, “Experimental and theoretical analysis of drag forces in micromechanical-beam arrays,” Phys. Rev. Appl., Vol. 13, no. 3, p. 034003, Mar. 2020.
   Web of Science ®Google Scholar
• S. S. Singh, D. K. Nair, A. Rajagopal, P. Pal, and A. K. Pandey, “Dynamic analysis of microbeams based on modified strain gradient theory using differential quadrature method,” European Journal of Computational Mechanics, Vol. 27, no. 3, pp. 187–203, 2018.
   Web of Science ®Google Scholar
• P. Li, Y. Liu, Y. Wang, C. Luo, G. Li, J. Hu, W. Liu, and W. Zhang, “Low-frequency and wideband vibration energy harvester with flexible frame and interdigital structure,” AIP. Adv., Vol. 5, no. 4, p. 047151, 2015. doi:10.1063/1.4919711.
   Web of Science ®Google Scholar
• A. R. Reddy, M. Umapathy, D. Ezhilarasi, and G. Uma, “Cantilever beam with trapezoidal cavity for improved energy harvesting,” Int. J. Prec. Eng. Manuf., Vol. 16, no. 8, pp. 1875–81, 2015.
   Web of Science ®Google Scholar
• S. Naval, P. K. Sinha, N. K. Das, A. Anand, and S. B. Kundu, “Bandwidth increment of piezoelectric energy harvester using multi-beam structure,” in Devices for Integrated Circuit (DevIC). IEEE, 2019, pp. 370–373.
   Google Scholar
• Y. Jia, D. Sijun, and A. A. Seshia, “Cantilevers-on-membrane design for broadband MEMS piezoelectric vibration energy harvesting,” J. Phys: Conf. Ser., Vol. 660, no. 1, p. 012030, 2015. IOP Publishing.
   Google Scholar
• I. Kanno, T. Ichida, K. Adachi, H. Kotera, K. Shibata, and T. Mishima, “Power-generation performance of lead-free (K, Na) NbO3 piezoelectric thin-film energy harvesters,” Sens. Actuators, A, Vol. 179, pp. 132–136, 2012.
   Google Scholar
• P. Muralt, M. Marzencki, B. Belgacem, F. Calame, and S. Basrour, “Vibration energy harvesting with PZT micro device,” Procedia. Chem., Vol. 1, no. 1, pp. 1191–1194, 2009.
   Google Scholar
• L. Beker, Ö. Zorlu, N. Göksu, and H. Külah, “Stimulating auditory nerve with MEMS harvesters for fully implantable and self-powered cochlear implants,” Transducers Eurosensors, Vol. XXVII, pp. 1663–66, IEEE, 2013.
   Google Scholar
• H. Liu, C. Lee, T. Kobayashi, C. J. Tay, and C. Quan, “A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz,” Microsyst. Technol., Vol. 18, no. 4, pp. 497–506, 2012.
   Web of Science ®Google Scholar
• H. Liu, C. Quan, C. J. Tay, T. Kobayashi, and C. Lee, “A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations,” Phys. Procedia, Vol. 19, pp. 129–133, 2011.
   Google Scholar
• A. Ashok, A. Gangele, P. Pal, and A. K. Pandey, “An analysis of stepped trapezoidal-shaped microcantilever beams for MEMS-based devices,” J. Micromech. Microeng., Vol. 28, no. 7, p. 075009, 2018.
   Web of Science ®Google Scholar
• A. Ashok, P. Manoj Kumar, S. S. Singh, P. Raju, P. Pal, and A. K. Pandey, “Achieving wideband micromechanical system using coupled non-uniform beams array,” Sens. Actuators A, Vol. 273, pp. 12–18, 2018.
   Google Scholar