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Tribology Transactions Volume 47, 2004 - Issue 2
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Original Articles

Micro/Nanotribological and Mechanical Studies of TiN Thin-Film for MEMS Applications

Xiankun Cao State Key Laboratory of Tribology Tsinghua University, Beijing, China, 100084
,
Tianmin Shao State Key Laboratory of Tribology Tsinghua University, Beijing, China, 100084
,
Shizhu Wen State Key Laboratory of Tribology Tsinghua University, Beijing, China, 100084
&
Yuan Yao Department of Materials Physics University of Science and Technology Beijing, Beijing, China, 100083
Pages 227-232 | Published online: 12 Aug 2010

REFERENCES

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  • Sundararajan , S. and Bhushan , B. 1999 . “Micro/nanotribology of Ultra-thin Hard Amorphous Carbon Coatings Using Atomic Force/Friction Force Microscopy,” . Wear , 255–299 : pp 678 – 689 .
  • Li , X. and Bhushan , B. 1999 . “Evaluation of Fracture Toughness of Ultra-Thin Hard Amorphous Carbon Coatings Deposited by Different Deposition Technique,” . Thin Solid Films , 355–356 : pp 330 – 336 .
  • Jiang , Z. 1995 . “An Investigation of the Experimental Conditions and Characteristics of a Nano-Wear Test,” . Wear , 181–183 : pp 777 – 783 .
  • Krauss , A. R. , Auciello , O. Gruen , D. M. 2001 . “Ultrananocrystalline Diamond Thin Films for MEMS and Moving Mechanical Assembly Devices,” . Diam. Relat. Mater. , 10 : pp 1952 – 1961 .
  • Gardos , M. N. and Bhushan , B. 1998 . Tribology Issues and Opportunities in MEMS , p 341 Amsterdam : Kluwer Scientific Publishers . (In press)
  • Gardos , M. N. “Thinning Films and Tribological Interfaces,” . In Proceedings of the 26th Leeds-Lyon Symposium on Tribology, Leeds, England, 14–17 September 1999 , Elsevier .
  • Zhou , Ming Tianmin , Shao . 2002 . “Thin-Film Preparation with Pulse-Laser-Arc,” . Lubr. Eng. , 2 : pp 41 – 43 .
  • Tan , S. 2000 . “Investigations of Nano- and Macro-Wear of Magnetic Tape Head Materials,” . Tribol. Int. , 33 : pp 673 – 681 .
  • Bhushan , B. and Koinkar , V. N. 1996 . “Microtribological Studies of Doped Single-Crystal Silicon and Polysilicon Films for MEMS Devices,” . Sens. Actuators , A57 : pp 91 – 102 .
  • Zhao , X. and Bhushan , B. 1998 . “Material Removal Mechanisms of Single-Crystal Silicon on Nanoscale and at Ultralow Load,” . Wear , 223 : pp 66 – 78 .
  • Bhushan , B. and Goldade , A. V. 2000 . “Measurements and Analysis of Surface Potential Change During Wear of Single-Crystal Silicon (100) at Ultralow Loads Using Kelvin Probe Microscopy,” . Appl. Surf. Sci. , 157 : pp 373 – 381 .
  • Pharr , G. M. 1998 . “Measurement of Mechanical Properties by Ultra-Low Load Indentation,” . Mater. Sci. Eng. , 253 : pp 151 – 159 .
  • Souty , E. 2000 . “The Tribology of Advanced Digital Recording (ADR) Systems,” . Tribol. Int. , 33 : pp 629 – 637 .

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