References
- Butler , S. W. and Stefani , J. A. 1994 . Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry . IEEE Transactions on Semiconductor Manufacturing , 7 : 193 – 201 .
- Del Castillo , E. 1999 . Long run and transient analysis of a double EWMA feed back controller . IIE Transactions , 31 : 1157 – 1169 .
- Good , R. and Qin , S. J. 2006 . On the stability of MIMO EWMA run-to-run controllers with metrology delay . IEEE Transactions on Semiconductor Manufacturing , 19 : 78 – 86 .
- Guo , R. S. and Chen , J. J. 2002 . An EWMA-based process mean estimator with dynamic tuning capability . IIE Transactions , 34 : 573 – 582 .
- Horn , R. A. and Johnson , C. A. 1985 . Matrix Analysis , New York, NY : Cambridge University Press .
- Ingolfsson , A. and Sachs , E. 1993 . Stability and sensitivity of an EWMA controller . Journal of Quality Technology , 25 : 271 – 287 .
- Lagarias , J. C. , Reeds , J. A. , Wright , M. H. and Wright , P. E. 1998 . Convergence properties of the Nelder-Mead simplex method in low dimensions . SIAM Journal on Optimization , 9 : 112 – 147 .
- Lee , S. P. , Chou , R. J. and Tseng , S. T. 2008 . Stability and performance of a double MEWMA controller for drifted MIMO systems . IIE Transactions , 40 : 690 – 705 .
- Ljung , L. and Soderstrom , T. 1983 . Theory and Practice of Recursive Identification , Cambridge, MA : MIT Press .
- Patel , N. S. and Jenkins , S. T. 2000 . Adaptive optimization of run-to-run controllers: the EWMA example . IEEE Transactions on Semiconductor Manufacturing , 13 : 97 – 107 .
- Sachs , E. , Guo , R. , Ha , S. and Hu , A. 1991 . Process control system for VLSI fabrication . IEEE Transactions on Semiconductor Manufacturing , 4 : 134 – 144 .
- Su , C. T. and Hsu , C. C. 2004 . A time-varying weights tuning method of the double EWMA controller . Omega , 32 : 473 – 480 .
- Tseng , S. T. , Chou , R. J. and Lee , S. P. 2002 . Statistical design of double EWMA controller . Applied Stochastic Models in Business and Industry , 18 : 313 – 322 .
- Tseng , S. T. and Hsu , N. J. 2005 . Sample-size determination for achieving asymptotic stability of a double EWMA control scheme . IEEE Transactions on Semiconductor Manufacturing , 18 : 104 – 111 .
- Tseng , S. T. , Song , W. M. and Chang , Y. C. 2005 . An initial intercept iteratively adjusted (IIIA) controller: an enhanced double EWMA feedback control scheme . IEEE Transactions on Semiconductor Manufacturing , 18 : 448 – 457 .
- Tseng , S. T. , Tsung , F. and Liu , P. Y. 2007 . Variable EWMA run-to-run controller for drifted processes . IIE Transactions , 39 : 291 – 301 .
- Tseng , S. T. , Yeh , A. B. , Tsung , F. and Chan , Y. Y. 2003 . A study of variable EWMA controller . IEEE Transactions on Semiconductor Manufacturing , 16 : 633 – 643 .