A Comparative Risk Assessment of Casting Solvents for Positive Photoresist

References

• Nagano , K. , Nakayama , E. Koyano , M. 1979 . Testicular Atrophy of Mice Induced by Ethylene Glycol Monoalkyl Ethers . Japan J. Ind. Health , 21 : 29
   Google Scholar
• Hardin , B. D. and Lyon , J. P. 1984 . Summary and Overview: NIOSH Symposium on Toxic Effects of Glycol Ethers . Environ. Health Perspect , 57 : 273
   Web of Science ®Google Scholar
• American Conference of Governmental Industrial Hygienists . Threshold Limit Values and Biological Exposure Indices for 1988–1989 . Cincinnati
   Google Scholar
• 1984 . Fed. Reg. , 49 January 24 : 2921
   Google Scholar
• 1986 . Fed. Reg. , 51 May 20 : 18488
   Google Scholar
• 1986 . Fed. Reg. , 51 December 11 : 44699
   Google Scholar
• 1987 . Fed. Reg. , 52 April 2 : 10586
   Google Scholar
• National Research Council, Committee on the Institutional Means for Assessment of Risks to Public Health . 1983 . Risk Assessment in the Federal Government: Managing the Process , Washington, DC : National Academy Press .
   Google Scholar
• Casarett and Doull's Toxicology . 1986 . The Basic Science of Poisons , Edited by: Doull , J. , Klaassen , C. D. and Amdur , M. O. New York : Macmillan Publishing Co., Inc. .
   Google Scholar
• Dugard , P. H. , Walker , M. , Mawdsley , S. J. and Scott , R. C. 1984 . Absorption of Some Glycol Ethers Through Human Skin in vitro. . Environ. Health Perspect , 57 : 193
   PubMed Web of Science ®Google Scholar
• C.V. Chemie Combinatie Amsterdam C. C. A. 1979 . Evaluation of the Health Aspects of Ethyl Lactate The Netherlands Unpublished data Gorinchem
   Google Scholar
• GAF Chemicals Corporation . 1986 . Material Safety Data Sheet for gamma-Butyrolactone
   Google Scholar
• Eastman Chemical Products, Inc. 1987 . Material Safety Data Sheet for Ektapro EEP Solvent
   Google Scholar
• Hanley , T. R. , Calhoun , L. L. , Yano , B. I. and Rao , K. S. 1984 . Teratologic Evaluation of Inhaled Propylene Glycol Monomethyl Ether in Rats and Rabbits . Fund. Appl. Toxicol , 4 : 784
   PubMedGoogle Scholar
• Union Carbide Corporation . 1985 . Letter to the Office of Toxic Substances , May 16 U.S. Environmental Protection Agency .
   Google Scholar
• ARCO Chemical Company . 1987 . Product information letter , June 15
   Google Scholar
• Krasavage , W. J. and Katz , G. V. 1984 . Rochester, NY : Eastman Kodak Company, Health and Environmental Laboratories . Unpublished data
   Google Scholar
• Ansel , J. 1987 . Personal communication. GAF Corporation, 1361 Alps Rd., Wayne, NJ; 201/628–3000
   Google Scholar
• Miller , R. R. , Hermann , E. A. Langvardt , P. W. 1983 . Comparative Metabolism and Disposition of Ethylene Glycol Monomethyl Ether and Propylene Glycol Monomethyl Ether in Male Rats . Toxicol. Appl. Pharmacol , 67 : 229
   PubMed Web of Science ®Google Scholar
• Miller , R. R. , Hermann , E. A. Young , J. T. 1984 . Propylene Glycol Monomethyl Ether Acetate (PGMEA) Metabolism, Disposition, and Short-Term Vapor Inhalation Toxicity Studies . Toxicol. Appl. Pharmacol , 75 : 521
   PubMed Web of Science ®Google Scholar
• Miller , R. R. , Hermann , E. A. Young , J. T. 1984 . Ethylene Glycol Monomethyl Ether and Propylene Glycol Monomethyl Ether: Metabolism, Disposition and Subchronic Inhalation Toxicity Studies . Environ. Health Perspect , 57 : 233
   PubMed Web of Science ®Google Scholar
• Sleet , R. B. , Greene , J. A. and Welsch , F. 1988 . The Relationship of Embryotoxicity to Disposition of 2-Methoxyethanol in Mice . Toxicol. Appl. Pharmacol , 93 : 195
   PubMed Web of Science ®Google Scholar
• Deisinger , P. J. , Lyon , M. L. Boatman , R. J. 1984 . Rochester, NY : Eastman Kodak Company Health and Environmental Laboratories . Unpublished data
   Google Scholar
• Falke , H. E. , Bosland , M. C. and van den Berg , F. 1981 . Unpublished data from a study by the Central Institute for Nutrition and Food Research, TNO, Zeist, The Netherlands, for C.V. Chemie Combinatie Amsterdam C. C. A., Gorinchem, The Netherlands
   Google Scholar
• Leegwater , D. C. and van Straten , S. 1979 . Unpublished data from a study by the Central Institute for Nutrition and Food Research, TNO, Zeist, The Netherlands for C.V. Chemie Combinatie Amsterdam C. C. A., Gorinchem, The Netherlands
   Google Scholar
• American Conference of Governmental Industrial Hygienists . Documentation of the Threshold Limit Values 4th ed. Cincinnati
   Google Scholar
• Dow Chemical Company, Health and Environmental Sciences Information Center . 1983 . Toxicology Summary of DOW ANOL PM Acetate
   Google Scholar
• Latven , A. R. and Molitor , H. 1939 . Comparison of the Toxic, Hypnotic and Irritating Properties of Eight Organic Solvents . J. Pharmacol. Exp. Ther , 65 : 89
   Google Scholar
• Dow Chemical Company . 1984 . Glycol Ether Toxicity Summary
   Google Scholar
• Ader , A. W. 1988 . Personal communication. Olin Corporation, 91 Shelton Ave., P.O. Box 30–9643, New Haven, CT; 203/789–6000
   Google Scholar