The importance of rare events in thin film deposition: a molecular dynamics study of tetrahedral amorphous carbon

References

• Robertson , J. 2002 . Diamond-like amorphous carbon . Mat. Sci. Eng. R , 37 : 129
   Web of Science ®Google Scholar
• McKenzie , D.R. , Muller , D. and Pailthorpe , B.A. 1991 . Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon . Phys. Rev. Lett. , 67 : 773
   PubMed Web of Science ®Google Scholar
• Ferrari , A.C. 2004 . Diamond-like carbon for magnetic storage disks . Surf. Coat. Technol. , 180–181 : 190
   Web of Science ®Google Scholar
• Koskinen , J. , Hirvonen , J.-P. and Keränen , J. 1998 . Effect of deposition temperature and growth rate on the bond structure of hydrogen free carbon films . J. Appl. Phys. , 84 : 648
   Google Scholar
• Chhowalla , M. , Robertson , J. , Chen , C.W. , Silva , S.R.P. , Davis , C.A. , Amaratunga , G.A.J. and Milne , W.I. 1997 . Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films . J. Appl. Phys. , 81 : 139
   Web of Science ®Google Scholar
• Gago , R. , Vinnichenko , M. , Jäger , H.U. , Belov , A.Yu. , Jiménez , I. , Huang , N. , Sun , H. and Maitz , M.F. 2005 . Evolution of sp2 networks with substrate temperature in amorphous carbon films: experiment and theory . Phys. Rev. B , 72 : 014120
   Google Scholar
• Anders , S. , Díaz , J. , Agerlll , J.W. , Lo , R.Yu. and Bogy , D.B. 1997 . Thermal stability of amorphous hard carbon films produced by cathodic arc deposition . Appl. Phys. Lett. , 71 : 3367
   Web of Science ®Google Scholar
• Ferrari , A.C. , Kleinsorge , B. , Morrison , N.A. , Hart , A. , Stolojan , V. and Robertson , J. 1999 . Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon . J. Appl. Phys. , 85 : 7191
   Web of Science ®Google Scholar
• Hirvonen , J.-P. , Koskinen , J. , Kaukonen , M. , Nieminen , R. and Scheibe , H.-J. 1997 . Dynamic relaxation of the elastic properties of hard carbon films . J. Appl. Phys. , 81 : 7248
   Google Scholar
• Tersoff , J. 1988 . Empirical interatomic potential for carbon, with applications to amorphous carbon . Phys. Rev. Lett. , 61 : 2879
   PubMed Web of Science ®Google Scholar
• Jäger , H.U. and Belov , A.Yu. 2003 . ta-C deposition simulations: film properties and time-resolved dynamics of film formation . Phys. Rev. B , 68 : 024201
   Google Scholar
• Brenner , D.W. 1990 . Empirical potential for hydrocarbons for use in simulating the chemical vapor deposition in diamond films . Phys. Rev. B , 42 : 9458
   PubMed Web of Science ®Google Scholar
• Marks , N.A. 2001 . Generalizing the environment-dependent interaction potential for carbon . Phys. Rev. B , 63 : 035401
   Web of Science ®Google Scholar
• Marks , N.A. 2005 . Thin film deposition of tetrahedral amorphous carbon: a molecular dynamics study . Diam. Relat. Mater. , 14 : 1223
   Web of Science ®Google Scholar
• Marks , N.A. , Cover , M.F. and Kocer , C. Simulating substrate temperature effects in the growth of tetrahedral amporphous carbon: the importance of infrequent events . Appl. Phys. Lett. , in press
   Google Scholar
• Sørensen , M.R. and Voter , A.F. 2000 . Temperature-accelerated dynamics for simulation of infrequent events . J. Chem. Phys. , 112 : 9599
   Web of Science ®Google Scholar
• Marks , N.A. , McKenzie , D.R. , Pailthorpe , B.A. , Bernasconi , M. and Parrinello , M. 1996 . Ab initio simulations of tetrahedral amorphous carbon . Phys. Rev. B , 54 : 9703
   PubMed Web of Science ®Google Scholar
• Marks , N.A. , Bell , J.M. , Pearce , G.K. , McKenzie , D.R. and Bilek , M.M.M. 2003 . Atomistic simulation of energy and temperature effects in the deposition and implantation of amorphous carbon thin films . Diam. Relat. Mater. , 12 : 2003
   Google Scholar
• Marks , N.A. 1997 . Evidence for subpicosecond thermal spikes in the formation of tetrahedral amorphous carbon . Phys. Rev. B , 56 : 2441
   Web of Science ®Google Scholar
• Marks , N.A. , Cooper , N.C. , McKenzie , D.R. , McCulloch , D.G. , Bath , P. and Russo , S.P. 2002 . Comparison of density-functional, tight-binding, and empirical methods for the simulation of amorphous carbon . Phys. Rev. B , 65 : 075411
   Web of Science ®Google Scholar
• Sattel , S. , Robertson , J. and Ehrhardt , H. 1997 . Effects of deposition temperature on the properties of hydrogenated tetrahedral amorphous carbon . J. Appl. Phys. , 82 : 4566
   Web of Science ®Google Scholar
• Davis , C.A. , Amaratunga , G.A.J. and Knowles , K.M. 1998 . Growth mechanism and cross-sectional structure of tetrahedral amorphous carbon thin films . Phys. Rev. Lett. , 80 : 3280
   Web of Science ®Google Scholar
• Yin , Y. , Zou , J. and McKenzie , D.R. 1996 . Preferred orientation in carbon films induced by energetic condensation . Nucl. Instrum. Methods B , 119 : 587
   Google Scholar
• McCulloch , D.G. , Peng , J.L. , McKenzie , D.R. , Lau , S.P. , Sheeja , S. and Tay , B.K. 2004 . Mechanisms for the behavior of carbon films during annealing . Phys. Rev. B , 70 : 085406
   Web of Science ®Google Scholar