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High Pressure Research
An International Journal
Volume 19, 2000 - Issue 1-6
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Original Articles

Gaalas-based micromachined accelerometer

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Pages 347-351 | Received 09 Sep 1999, Published online: 19 Aug 2006

References

  • Leclercq , J. L. , Ribas , R. P. , Karam , J. M. and Victorovitch , P. 1998 . III-V micromachined devices for microsystem . Microelectronics Journal , 29 : 613
  • Robert , J. L. , Mosser , V. and Contreras , S. 1991 . Physics of AlGaAs compounds for sensing application . International Conference on Solid-state Sensor and Actuators , : pp. 294 – 299 .
  • Ribas , R. P. , Leclercq , J. L. , Karam , J. M. , Courtois , B. and Victorovitch , P. 1997 . Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design . LDSd'97, The 2nd International Conference on Low Dimensional Structure and Devices . May 19–21 1997 , Lisbon, Portugal.

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