A modal model for diffraction gratings

References

• Collin , R. E. 1956 . J. Phys. , 34 : 398
   Google Scholar
• Burckhardt , C. B. 1966 . J. Opt. Soc. Am. , 56 : 1502
   Web of Science ®Google Scholar
• Wirgin , A. and Deleuil , R. 1969 . J. Opt. Soc. Am. , 59 : 1348
   Web of Science ®Google Scholar
• Maystre , D. and Petit , R. 1972 . Opt. Commun. , 5 : 90 – 93 .
   Google Scholar
• Peng , S. T. , Tamir , T. and Bertoni , H. L. 1975 . IEEE Trans. Microw. Theory Tech. , 23 : 123
   Web of Science ®Google Scholar
• Knop , K. 1978 . J. Opt. Soc. Am. , 68 : 1206
   Web of Science ®Google Scholar
• Botten , L. C. , Craig , M. S. , McPhedran , R. C. , Adams , J. L. and Andrewartha , J. R. 1981 . Opt. Acta , 28 : 413
   Google Scholar
• Botten , L. C. , Craig , M. S. , McPhedran , R. C. , Adams , J. L. and Andrewartha , J. R. 1981 . Opt. Acta , 28 : 1087
   Google Scholar
• Botten , L. C. , Craig , M. S. and McPhedran , R. C. 1981 . Opt. Acta , 28 : 1103
   Google Scholar
• Suratteau , J. Y. , Cadillhac , M. and Petit , R. 1983 . J. Opt. (Paris) , 14 : 273
   Web of Science ®Google Scholar
• Tayeb , G. and Petit , R. 1984 . Opt. Acta , 31 : 1361
   Google Scholar
• Li , L. 1993 . J. Mod. Opt. , 40 : 553
   Web of Science ®Google Scholar
• Li , L. 1993 . J. Opt. Soc. Am. A , 10 : 2581
   Google Scholar
• Tamir , T. and Zhang , S. 1996 . J. Lightwave Technol. , 14 : 914
   Web of Science ®Google Scholar
• Chernov , V. A. , Erofeev , V. O. , Chkhalo , N. I. , Kovalenko , N. V. and Mytnichenko , S. V. 1998 . Nucl. Inst. Methods Phys. Res. A , 405 : 310
   Google Scholar
• Chernov , V. A. , Erofeev , V. I. and Kovalenko , N. V. 1998 . Nucl. Inst. Methods Phys. Res. A , 405 : 337
   Google Scholar
• Krastev , K. , Andre , J.-M. and Barchewitz , R. 1997 . J. Mod. Opt. , 44 ( 6 ) : 1141
   Web of Science ®Google Scholar
• Jiang , M. , Tamir , T. and Zhang , S. 2001 . J. Opt. Soc. Am. A , 18 ( 4 ) : 807
   Google Scholar
• Nyyssonen , D. 1982 . J. Opt. Soc. Am. , 72 : 1425
   Web of Science ®Google Scholar
• Kirk , C. P. 1985 . Precision Measurement of Microscope Images, PhD thesis, Department of Electrical and Electronic Engineering , University of Leeds .
   Google Scholar
• Yuan , C. and Strojwas , A. J. 1990 . SPIE , 1264 : 203
   Google Scholar
• Bishop , K. P. , Gaspar , S. M. , Milner , L. M. , Naqvi , S. H. and McNeil , J. R. 1991 . SPIE , 1545 : 64
   Google Scholar
• McNeil , J. R. , Naqvi , S. S. H. , Gaspar , S. M. and Hickman , K. C. 1993 . Solid State Technology , 36 : 29
   Google Scholar
• Tadros , K. , Neureuther , A. R. and Guerrieri , R. SPIE , 1464 177
   Google Scholar
• Jakatdar , N. , Niu , X. , Spanos , C. J. , Romano , A. , Bendik , J. and Kovacs , R. 1998 . SPIE , 3332 : 586
   Google Scholar
• Davidson , M. 1990 . International Conference on Microlithography , Vol. ME90 , 523 Leuven, Belgium. Elsevier, Amsterdam : MicroCircuit Engineering 90 .
   Google Scholar
• Davidson , M. , Monahan , K. and Monteverde , R. 1991 . SPIE , 1464 : 155
   Google Scholar
• Davidson , M. and Monahan , K. 1992 . SPIE , 1673 : 117
   Google Scholar
• Davidson , M. , Kleemann , B. H. and Bischoff , J. 1997 . SPIE , 3051 : 606
   Google Scholar
• Botten , L. C. , Craig , M. S. and McPhedran , R. C. 1983 . Comput. Phys. Commun. , 29 : 245
   Web of Science ®Google Scholar
• Hida , Y. , Li , X. S. and Bailey , D. H. 2001 . 15th IEEE Symposium on Computer Arithmetic (Arith-15 2001 , IEEE .
   Google Scholar