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Welding International Volume 2, 1988 - Issue 8

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Original Articles

Plasma CVD techniques for ceramic coating

R Makabe Osaka Industrial Technical Laboratory,

Pages 733-738 | Published online: 05 Jan 2010

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https://doi.org/10.1080/09507118809447561

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Archer , N J . 1982 . ‘Thin solid films’ , 80 : 221
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Konuma , M . ‘Fundamental knowledge of plasma and film formation’ (Nikkan Kogyo Shimbun Sha)
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Thin Film No. 131 Committee of Nippon Gakujutsu Shinkokai: ‘Thin Film Handbook’ (Omu Sha)
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Yasui, Hirose and Ichihara: Metal 1984 49
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Makabe . 1986 . Vacuum , 29 : 396
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Kimura . 1987 . Vacuum , 30 : 454
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Steinmann , P A and Hintermann , H E . 1985 . J Vac Sci Technol (A) , 3 : 2394
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Kado . 1987 . Anticorrosion Techniques , 36 : 551
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