An analytical model for continuous flow transporters of AMHSs with multi-loop conveyors and priority rules

References

• Agrawal, G., and S. Heragu. 2006. “A Survey of Automated Material Handling Systems in 300-mm Semiconductor Fabs.” IEEE Transactions on Semiconductor Manufacturing 19: 112–120. doi:10.1109/TSM.2005.863217.
   Web of Science ®Google Scholar
• Ardezonne, F. J. 2011. “Handling the 450 mm Wafer with Structural Ceramics.” Solid State Technology 54: 40–41.
   Web of Science ®Google Scholar
• Bass, E., and R. Wright. 2008. “Modeling Semiconductor Factories for Equipment and Cycle Time Reduction Opportunities.” Future Fab International 24: 50–55.
   Google Scholar
• Batarseh, O. G., D. Nazzal, and Y. Wang. 2010. “An Interval-Based Metamodeling Approach to Simulate Material Handling in Semiconductor Wafer Fabs.” IEEE Transactions on Semiconductor Manufacturing 23: 527–537. doi:10.1109/TSM.2010.2066993.
   Web of Science ®Google Scholar
• Bozer, Y. A., and Y. Hsieh. 2005. “Throughput Performance Analysis and Machine Layout for Discrete-Space Closed-Loop Conveyors.” IIE Transactions 37 (1): 77–89. doi:10.1080/07408170590516971.
   Web of Science ®Google Scholar
• Brown, C., and G. Linden. 2009. Chipset and Change: How Crisis Reshapes the Semiconductor Industry. Cambridge, MA: MIT Press.
   Google Scholar
• Choudhury, G., and L. Tadj. 2009. “An M/G/1 Queue with Two Phases of Service Subject to the Server Breakdown and Delayed Repair.” Applied Mathematical Modelling 33: 2699–2709. doi:10.1016/j.apm.2008.08.006.
   Web of Science ®Google Scholar
• ChungSoo, H., P. Keith, T. Mitsuya, and A. Aijiro. 2006. “High Throughput AMHS Design with Dual Unified OHT System.” IEEE International Symposium on Semiconductor Manufacturing Conference, Tokyo, September 25–27, 185–188.
   Google Scholar
• Davis, J. 2011. “450 mm Wafer Transition Needs Collaboration and Standards.” Solid State Technology 54: 14–17.
   Web of Science ®Google Scholar
• Govind, N., T. M. Roeder, and L. W. Schruben. 2011. “A Simulation-Based Closed Queueing Network Approximation of Semiconductor Automated Material Handling Systems.” IEEE Transactions on Semiconductor Manufacturing 24: 5–13. doi:10.1109/TSM.2010.2089659.
   Web of Science ®Google Scholar
• Hennessy, L. 2012. “Assessing the Impact of the 450 mm Wafer Size Transition on Manufacturing Facility Automated Material Handling Systems.” In Advanced Semiconductor Manufacturing Conference, 245–250. New York: IEEE.
   Google Scholar
• Hong, S., A. L. Johnson, H. J. Carlo, D. Nazzal, and J. A. Jimenez. 2011. “Optimising the Location of Crossovers in Conveyor-Based Automated Material Handling Systems in Semiconductor Wafer Fabs.” International Journal of Production Research 49: 6199–6226. doi:10.1080/00207543.2010.528059.
   Web of Science ®Google Scholar
• Jefferson, T. 2009. “ISMI 450 mm Transition Program Update.” Semiconductor Japan 12: 12–13.
   Google Scholar
• Kondo, H. 2006. “Requirements for AMHS in 450 mm Era.” In Proceedings Thirteenth International Symposium on Semiconductor Manufacturing, 189–192. New York: IEEE.
   Google Scholar
• Kuhl, M. E., and G. R. Laubisch. 2004. “A Simulation Study of Dispatching Rules and Rework Strategies in Semiconductor Manufacturing.” In IEEE International Symposium on Semiconductor Manufacturing Conference, 325–329. New York: IEEE.
   Google Scholar
• Kwangyoung, I., K. Kyungsup, M. Youngmin, P. Taeeun, and L. Sujeong. 2010. “The Deadlock Detection and Resolution Method for a Unified Transport System.” International Journal of Production Research 48: 4423–4435. doi:10.1080/00207540902991690.
   Web of Science ®Google Scholar
• Liao, D.-Y., M.-D. Jeng, and M. C. Zhou. 2007. “Application of Petri Nets and Lagrangian Relaxation to Scheduling Automatic Material-Handling Vehicles in 300-mm Semiconductor Manufacturing.” IEEE Transactions on Systems, Man and Cybernetics, Part C (Applications and Reviews) 37: 504–516. doi:10.1109/TSMCC.2007.897321.
   Web of Science ®Google Scholar
• Lin, J. T., F.-K. Wang, and P.-Y. Yen. 2001. “Simulation Analysis of Dispatching Rules for an Automated Interbay Material Handling System in Wafer Fab.” International Journal of Production Research 39: 1221–1238. doi:10.1080/00207540010005718.
   Web of Science ®Google Scholar
• Marshall, L., K. Rust, and K. Schmidt. 2007. “300 Mm Prime Gaps that Need to Be Addressed to Boost Productivity.” In Proceedings of the International Symposium on Semiconductor Manufacturing (ISSM 2007), 1–4. Santa Clara, CA: IEEE.
   Google Scholar
• Muller, R., C. Alexopoulos, and L. F. McGinnis. 2007. “Automatic Generation of Simulation Models for Semiconductor Manufacturing.” In Proceedings of the 2007 Winter Simulation Conference, 648–657. Washington, DC: IEEE.
   Google Scholar
• Myers, S. 2007. “The 450 Mm Debate.” Semiconductor International 30 (2): 61–63.
   Google Scholar
• Narayan, B. U. 2008. An Introduction to Queuing Theory: Modeling and Analysis in Applications, 215–224. Boston, MA: Springer Science & Media.
   Google Scholar
• Nazzal, D., and A. El-Nashar. 2007. “Survey of Research in Modeling Conveyor-Based Automated Material Handling Systems in Wafer Fabs.” In Processings of the 2007 Winter Simulation Conference, 1781–1788. Washington, DC: IEEE.
   Google Scholar
• Nazzal, D., J. A. Jimenez, H. J. Carlo, A. L. Johnson, and V. Lasrado. 2010. “An Analytical Model for Conveyor-Based Material Handling System with Crossovers in Semiconductor Wafer Fabs.” IEEE Transactions on Semiconductor Manufacturing 23: 468–476. doi:10.1109/TSM.2010.2051736.
   Web of Science ®Google Scholar
• Nazzal, D., A. Johnson, H. J. Carlo, and J. A. Jimenez, 2008. “An Analytical Model for Conveyor Based AMHS in Semiconductor Wafer Fabs.” Proceedings of the 2008 Winter Simulation Conference, Miami, FL, December 7–10, 2148–2155.
   Google Scholar
• Paprotny, I., J. Shiau, Y. Huh, and G. Mackulak. 2000. “Simulation Based Comparison of Semiconductor AMHS Alternatives: Continuous Flow vs. Overhead Monorail.” Proceedings of the 2000 Winter Simulation Conference 2: 1333–1338.
   Google Scholar
• Peters, B., and T. Yang. 1997. “Integrated Facility Layout and Material Handling System Design in Semiconductor Fabrication Facilities.” IEEE Transactions on Semiconductor Manufacturing 10: 360–369. doi:10.1109/66.618209.
   Web of Science ®Google Scholar
• Pettinato, J. S., and D. Pillai. 2005. “Technology Decisions to Minimize 450 mm Wafer Size Transition Risk.” IEEE Transactions on Semiconductor Manufacturing 18: 501–509. doi:10.1109/TSM.2005.858471.
   Web of Science ®Google Scholar
• Rothe, O., B. VanEck, R. Fandel, and R. Wright. 2008. “A Vision for A Next Generation 300mm Factory.” Solid State Technology 24: 26–29.
   Google Scholar
• Schmidt, L. C., and J. Jackman. 2000. “Modeling Re-Circulating Conveyors with Blocking.” European Journal of Operational Research 124: 422–436. doi:10.1016/S0377-2217(99)00181-2.
   Web of Science ®Google Scholar
• Yang, T., and B. A. Peters. 1997. “A Spine Layout Design Method for Semiconductor Fabrication Facilities Containing Automated Material Handling Systems.” International Journal of Operations & Production Management 17: 490–501. doi:10.1108/01443579710167212.
   Web of Science ®Google Scholar