Agent-based interbay system control for a single-loop semiconductor manufacturing fab

References

• Burckert , HJ , Fischer , K and Vierke , G . 1997 . “ Deutsches Forschungszenturm fur Kunstliche Intelligenz GmbH ” . In TeleTruck: a holonic fleet management system Europe
   Google Scholar
• Cantamessa , M . 1997 . Agent-based modeling and management of manufacturing systems . Comp. in Indust. , 34 ( 2 ) : 173 – 186 .
   Web of Science ®Google Scholar
• Cardarelli , G and Pelagagge , PM . 1995 . Simulation tool for design and management optimisation of automated interbay material handling and storage systems for large wafer fab . IEEE Trans. Semicon. Manuf. , 8 : 44 – 49 .
   Web of Science ®Google Scholar
• Cardarelli , G , Pelagagge , PM and Granito , A . 1996 . Performance analysis of automated interbay material-handling and storage systems for large wafer fab . Robot. Comp.-Integ. Manuf. , 12 : 227 – 234 .
   Google Scholar
• Cheng , F , Shen , E , Deng , J and Nguyen , K . 1999 . Development of a system framework for the computer-integrated manufacturing execution systems: A distributed object-oriented approach. Int . J. Comp. Integ. Manuf. , 12 ( 5 ) : 384 – 402 .
   Web of Science ®Google Scholar
• Chung , S-L and Jeng , M . 2004 . An overview of semiconductor fab automation systems . IEEE Robot. & Autom. Mag. (Special Issue on Semiconductor Factory Automation) , Part 1 : 8 – 18 .
   Google Scholar
• CIIMPLEX . 1999 . Consortium for integrated manufacturing planning and execution—architecture, Version 4, Revision 4, IBM Corporation, Advanced Manufacturing Solutions Development Department, CIIMPLEX Project Office
   Google Scholar
• Duffie , NA and Prabhu , VV . 1994 . Real-time distributed scheduling of heterarchical manufacturing systems . J. Manuf. Syst. , 13 ( 2 ) : 94 – 107 .
   Web of Science ®Google Scholar
• Fischer , K , Muller , JP and Pischel , M . 1996 . Cooperative transportation scheduling: An application domain for DAI , DFKI-Research Report
   Google Scholar
• Gou , L , Hasegawa , T , Luh , PB , Tamuia , S and Oblak , JM . 1994 . “ Holonic planning and scheduling for a robotic assembly testbed ” . In Proceedings of the 4th International Conference on Computer Integrated Manufacturing and Automation Technology , 142 – 149 . New York, , USA : Troy .
   Google Scholar
• Jang , J , Suh , J and Ferreira , MP . 2001 . An AGV routing policy reflecting the current and future state of semiconductor and LCD production lines . Int. J. Prod. Res. , 39 ( 17 ) : 3901 – 3921 .
   Web of Science ®Google Scholar
• Kadar , B , Monostori , L and Szelke , E . 1998 . An object-oriented framework for developing distributed manufacturing architectures . J. Intel. Manuf. , 9 : 173 – 179 .
   Web of Science ®Google Scholar
• Kim , SH and Hwang , H . 1999 . An adaptive dispatching algorithm for automated guided vehicles based on an evolutionary process . Int. J. Prod. Econ. , 60–61 : 465 – 472 .
   Google Scholar
• Kuhlmann , T , Lamping , R and Massow , C . 1997 . Agent-based production management . Journal of Materials Processing Technology , 76 ( 1–3 ) : 252 – 256 .
   Web of Science ®Google Scholar
• Lazowska , ED , Zahorjan , J , Graham , GS and Sevcik , KC . 1984 . Quantitative System Performance: Computer System Analysis Using Queueing Network Models , New Jersey : Prentice-Hall .
   Google Scholar
• Lin , JT , Wang , FK and Yang , CJ . 2005 . The performance of the number of vehicles in a dynamic connecting transport AMHS . Int. J. Prod. Res. , 43 ( 11 ) : 2263 – 2276 .
   Web of Science ®Google Scholar
• Lin , JT , Wang , FK and Yen , PY . 2001 . Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab . Int. J. Prod. Res. , 39 ( 6 ) : 1221 – 1238 .
   Web of Science ®Google Scholar
• Maturana , F , Shen , W and Norrie , DH . 1999 . MetaMorph: an adaptive agent-based architecture for intelligent manufacturing . Int. J. Prod. Res. , 37 ( 10 ) : 2159 – 2173 .
   Web of Science ®Google Scholar
• McGehee , J , Hebley , J and Mahaffey , J . 1994 . The MMST computer-integrated manufacturing system framework . IEEE Trans. Semicon. Manuf. , 7 : 107 – 115 .
   Web of Science ®Google Scholar
• Nazzal , D and McGinnis , LF . 2005 . Analytical models of vehicle-based automated material handling systems in semiconductor fabs . IEEE Proceedings , : 285 – 288 .
   Google Scholar
• Shen , W and Norrie , DH . 2006 . A hybrid agent-oriented infrastructure for modeling manufacturing enterprises , Available online at: http://imsg.enme.ucalgary.ca/(accessed 31 October )
   Google Scholar
• Shen , W and Norrie , DH . 1999 . Agent-based systems for intelligent manufacturing: a state-of-the-art survey . Knowl. Inform. Syst. , 1 ( 2 ) : 129 – 156 .
   Google Scholar
• Smith , RG . 1980 . The contract net protocol: high-level communication and control in a distributed solver . IEEE Trans. Comp. , C-29 ( 12 ) : 1104 – 1113 .
   Web of Science ®Google Scholar
• Tecnomatix Co . 2006 . Available online at: http://www.tecnomatix.com/(accessed 31 October 2006)
   Google Scholar
• Tompkins , JA and White , JA . 1984 . Facility Planning , New York : John Wiley .
   Google Scholar
• Veeramani , D and Wang , K-J . 2006 . Design of bid construction mechanism for job flow time reduction in auction-based shop-floor control systems . Int. J. Adv. Manuf. Tech. , 28 ( 5–6 ) : 541 – 550 .
   Google Scholar
• Veeramani , D , Wang , K-J and Rojas , J . 1998 . Modeling and simulation of auction based shop floor control using parallel computing . IIE Trans. Oper. Eng. , 30 ( 9 ) : 773 – 783 .
   Web of Science ®Google Scholar
• Veeramani , D and Wang , K-J . 1997 . Performance analysis of auction based distributed shop floor control schemes from the perspective of the communication system . Int. J. Flex. Manuf. Syst. , 9 : 121 – 143 .
   Google Scholar
• Wang , M-J , Chung , H-C and Wu , H-C . 2003 . The evaluation of manual FOUP handling in 300-mm wafer fab . IEEE Trans. Semicon. Manuf. , 16 ( 3 ) : 551 – 554 .
   Web of Science ®Google Scholar
• Zhou , MC and Jeng , MD . 1998 . Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing system: a Petri net approach . IEEE Trans. Semicon. Manuf. , 11 : 333 – 357 .
   Web of Science ®Google Scholar