VEHICLE ANAGEMENT OF AMHS IN 300MM WAFER FAB

James T. Lin Department. of Industrial Engineering and Engineering Management, National Tsing-Hua University, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan, 300, R.O.C.

Chun-Kuan Wu Department. of Industrial Engineering and Engineering Management, National Tsing-Hua University, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan, 300, R.O.C.

Ching-Ju Yang Department. of Industrial Engineering and Engineering Management, National Tsing-Hua University, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan, 300, R.O.C.

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