Publication Cover
Numerical Heat Transfer, Part A: Applications
An International Journal of Computation and Methodology
Volume 49, 2006 - Issue 7
122
Views
10
CrossRef citations to date
0
Altmetric
Original Articles

Numerical Investigation of Thermal Contact Resistance between the Mold and Substrate on Laser-Assisted Imprinting Fabrication

, &
Pages 669-682 | Received 13 Jun 2005, Accepted 16 Sep 2005, Published online: 01 Sep 2006

REFERENCES

  • R. F. Wood and G. E. Giles , Macroscopic Theory of Pulsed-laser Annealing—I. Thermal Transport and Melting , Phys. Rev. B , vol. 23 , no. 6 , pp. 2923 – 2942 , 1981 . [CSA]
  • R. K. Singh and J. Narayan , A Novel Method for Simulating Laser-Solid Interactions in Semiconductors and Layered Structures , Mater. Sci. Eng. B , vol. 3 , pp. 217 – 230 , 1989 . [CSA] [CROSSREF]
  • R. Černý , R. Sasik , I. Lukes , and V. Chab , Excimer-laser-induced Melting and Solidification of Moncrystalline Si: Equilibrium and Nonequilibbrium Models , Phys. Rev. B , vol. 4 , no. 9 , pp. 4097 – 4102 , 1991 . [CSA]
  • V. N. Tokarev and A. F. H. Kaplan , An Analytical Modeling of Time Dependent Pulsed Laser Melting , J. Appl. Phys. , vol. 86 , no. 5 , pp. 2836 – 2846 , 1999 . [CSA] [CROSSREF]
  • F. B. Hsiao , C. P. Jen , D. B. Wang , C. H. Chuang , Y. C. Lee , C. P. Liu , and H. J. Hsu , An Analytical Modeling of Heat Transfer for Laser-Assisted Nanoimprinting Processes , Comput. Mech. , DOI 10.1007/s00466-005-0688-z , 2005 . [CSA]
  • M. O. Thompson , J. W. Mayer , A. G. Cullis , H. C., Webber, N. G. Chew , J. M. Poate , and D. C. Jacobson , Silicon Melt, Regrowth, and Amorphorzation Velocities during Pulsed Laser Irradiation , Phys. Rev. Lett. , vol. 50 , no. 12 , pp. 896 – 899 , 1983 . [CSA] [CROSSREF]
  • J. Narayan , C. W. White , M. J. Aziz , B. Strizker , and A. Waithuis , Pulsed Excimer (KrF) Laser Melting of Amorphous and Crystalline Silicon Layers , J. Appl. Phys. , vol. 57 , pp. 564 – 567 , 1985 . [CSA] [CROSSREF]
  • G. E. Jellison , Jr. , D. H. Lowndes , D. N. Mashburn , and R. F. Wood , Time-Resolved Reflectivity Measurements on Silicon and Germanium Using a Pulsed Excimer KrF Laser Heating Beam , Phys. Rev. B , vol. 34 , no. 4 , pp. 2407 – 2415 , 1986 . [CSA] [CROSSREF]
  • C. P. Grigoropoulos , S. Moon , M. Lee , M. Hatano , and K. Suzuki , Thermal Transport in Melting and Recrystallization of Amorphous and Polycrystalline Si Thin Films , Appl. Phys. A , vol. 69 , pp. 295 – 298 , 1999 . [CSA] [CROSSREF]
  • S. Y. Chou , C. Keimei , and J. Gu , Ultrafast and Direct Imprint of Nanostructures in Silicon , Nature , vol. 417 , pp. 835 – 837 , 2002 . [CSA] [CROSSREF]
  • W. B. Lor and H. S. Chu , Propagation of Thermal Waves in a Composite Medium with Interface Thermal Boundary Resistance , Numer. Heat Transfer A , vol. 36 , pp. 681 – 697 , 1999 . [CSA] [CROSSREF]
  • M. Chung and R. H. Rangel , Simulation of Metal Droplet Deposition with Solidification including Undercooling and Contact Resistance Effects , Numer. Heat Transfer A , vol. 37 , pp. 201 – 226 , 2000 . [CSA] [CROSSREF]
  • R. P. A. Rocha and M. E. Cruz , Computation of the Effective Conductivity of Unidirectional Fibrous Composites with an Interfacial Thermal Resistance , Numer. Heat Transfer A , vol. 39 , pp. 179 – 203 , 2001 . [CSA]
  • T. S. Chen , Adaptive Weighting Input Estimation Method to Contact Conductance during Metal Casting Problem , Numer. Heat Transfer B , vol. 39 , pp. 405 – 419 , 2001 . [CSA] [CROSSREF]
  • Y. S. Touloukian , Thermophysical Properties of Matter, The TPRC Data Series , vols. 2–3 , IFI/Plenum , New York , 1979 .
  • F. P. Incropera and D. P. DeWitt , Fundamentals of Heat and Mass Transfer , pp. 80 – 81 , Wiley , New York , 1996 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.