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Original Articles

Physics with catalytic metal gate chemical sensors

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Pages 201-278 | Published online: 27 Sep 2006

References

  • Lundström , I. , Shivaraman , M. S. , Svensson , C. S. and Lundkvist , L. 1975 . Hydrogen sensitive MOS field-effect transistor . Appl. Phys. Lett. , 26 : 55
  • Lundström , I. , Shivaraman , M. S. and Svensson , C. S. 1975 . A hydrogen sensitive Pd-gate MOS transistor . J. Appl. Phys. , 46 : 3876
  • Lundström , I. and Svensson , C. 1985 . “ Gas-sensitive metal gate semiconductor devices ” . In Solid State Chemical Sensors , Edited by: Janata , J. and Huber , R. J. New York : Academic Press . chap. 1.
  • Sibbald , A. 1986 . Recent advances in field effect chemical microsensors . J. Mol. Electron. , 2 : 51
  • Lundström , L. , Armgarth , M. , Spetz , A. and Winquist , F. 1986 . Gas sensors based on catalytic metal-gate field effect devices . Sensors Actuators , 10 : 399
  • Lewis , F. A. 1967 . The Palladium-Hydrogen System , New York : Academic Press .
  • Shivaraman , M. S. 1976 . Detection of H2S with Pd-gate MOS field-effect transistors . J. Appl. Phys. , 47 : 3592
  • Couput , J. P. , Cornut , B. , Chambu , C. and Chauvet , F. 1983 . “ A reversible hydrogen sulfide sensitive Pd-gate MOS transistor ” . In Proc. Int. Meet. Chemical Sensors 468 Fukuoka, , Japan
  • Yamamottv , N. , Tonomura , S. , Matsuoka , T. and Tsubomura , If. 1980 . A study on a palladium-titanium oxide Schottky diode as a detector for gaseous components . Surf. Sci. , 92 : 400
  • Poteat , T. L. and Lalevic , B. 1981 . Pd-MOS hydrogen and hydrocarbon sensor device . IEEE Electron Device Lett. , EDL-2 : 82
  • Söderberg , D. , Lundström , I. and Svensson , C. 1980 . Catalytic reactions on metals studied by work function measurement . Mater. Sci. Eng. , 42 : 141
  • Poteat , T. L. and Lalevic , B. 1982 . Transition metal-gate MOS gaseous detectors . IEEE Trans. Electron Devices , ED-29 : 123
  • Poteat , T. L. , Lalevic , B. , Kuliyev , B. , Yousuf , M. and Chen , M. 1983 . MOS and Schottky diode gas sensors using transition metal electrodes . J. Electron. Mater. , 12 : 181
  • Ackelid , U. , Winquist , F. and Lundström , L. 1986 . “ Metal-oxide-semiconductor structures with thermally activated sensitivity to ethanol vapour and unsaturated hydrocarbons ” . In Proc. 2nd Int. Meet. Chemical Sensors 395 Bordeaux, , France
  • Ackelid , U. , Armgarth , M. , Spetz , A. and Lundström , L. 1986 . Ethanol sensitivity of palladium-gate metal-oxide-semiconductor structures . IEEE Electron Device Lett. , EDL-7 : 353
  • Winquist , F. , Spetz , A. , Armgarth , M. , Nylander , C. and Lundström , L. 1983 . Modified palladium metal-oxide-semiconductor structures with increased ammonia gas sensitivity . Appl. Phys. Lett. , 43 : 839
  • Spetz , A. , Winquist , F. , Nylander , C. and Lundström , I. 1983 . Modified palladium gate MOS devices for ammonia gas detection . Proc. Int. Meet. Chemical Sensors . 1983 , Fukuoka, Japan. pp. 479
  • Dobos , K. , Krey , D. and Zimmer , G. 1983 . CO-sensitive MOSFET with SnO2- Pd-, and Pt-gate . Proc. Int. Meet. Chemical Sensors . 1983 , Fukuoka, Japan. pp. 464
  • Dobos , K. , Strotman , R. and Zimmer , G. 1983 . Performance of gas-sensitive Pd-gate MOSFETS with SiO2 and Si3N4 gate insulators. . Sensors Actuators , 4 : 593
  • Dobos , K. and Zimmer , G. 1985 . “ A new split-gate-MOS-transistor structure for detection of gases ” . In Tech. Dig Transducers '85 242 Philadelphia, PA
  • Lundström , L. , Armgarth , M. , Spetz , A. and Winquist , F. 1986 . Physics of ammonia sensitive metal oxide semiconductor structures . Proc. 2nd Int. Meet. Chemical Sensors . 1986 , Bordeaux, France. pp. 387
  • Ross , J. F. , Robins , L. and Webb , B. C. 1987 . The ammonia sensitivity of platinum gate MOSFET devices: dependence on gate electrode morphology. . Sensors Actuators , 11 : 73
  • Spetz , A. , Armgarth , M. and Lundström , L. 1987 . Optimization of ammonia sensitive metal-oxide semiconductor structures with platinum gates . Sensors Actuators , 11 : 349
  • Winquist , F. and Lundström , I. 1987 . Thin metal film-oxide-semiconductor structures with temperature dependent sensitivity for unsaturated hydrocarbons . Sensors Actuators , 12 : 255
  • Bastasz , R. and Hughes , R. C. 1986 . A hydrogen plasma diagnostic based on Pd metal-oxide-semiconductor diodes . J. Vac. Sci. Technol. A , 4 : 629
  • Armgarth , M. , Nylander , C. , Sundgren , H. and Lundström , I. 1982 . A hydrogen monitor and leak detector based on a semi-conductor device . Proc. 4th World Hydrogen Energy Conf. 1982 , Pasadena, CA. pp. 1717
  • Ross , J. F. , Terry , C. L. and Webb , B. C. 1986 . A new method for protection against electrical overheating using a sacrificial coating and a CHEMFET gas sensor . J. Phys. E , 19 : 536
  • Cleland , N. , Hörnsten , E. G. , Elwing , H. , Enfors , S.-O. and Lundström , I. 1984 . Measurement of hydrogen evolution by oxygen limited E. Coli by means of a hydrogen sensitive Pd-MOS sensor . Appl. Microbiol. Biotechnol. , 20 : 268
  • Berg , A. , Eriksson , M. , Barany , F. , Einarsson , K. , Sundgren , H. , Nylander , C. , Lundström , I. and Blomstrand , R. 1985 . Hydrogen concentration in expired air analyzed with a new hydrogen sensor, plasma glucose rise and symptoms of lactose intolerance after oral administration of 100 gram lactose, Scand. . J. Gastroenterol. , 20 : 814
  • Hörnsten , E. G. , Elwing , H. , Kihlström , E. and Lundström , I. 1985 . Determination of molecular hydrogen in investigations of the susceptibility of enterobacteriaceae to ampicillin . J. Antimicrob. Chemother. , 15 : 695
  • Danielsson , B. , Winquist , F. , Mosbach , K. and Lundström , I. 1983 . “ Bioanalytical applications of hydrogen and ammonia sensitive palladium gate MOS devices ” . In Proc. Int. Meet. Chemical Sensors 507 Fukuoka, , Japan
  • Winquist , F. , Spetz , A. , Lundström , I. and Danielsson , B. 1984 . Determination of ammonia in air and aqueous samples with a gas sensitive semiconductor capacitor . Anal. Chim. Acta , 164 : 127
  • Winquist , F. , Spetz , A. , Lundström , I. and Danielsson , B. 1984 . Determination of urea with an ammonia gas-sensitive semiconductor device in combination with urease . Anal. Chim. Acta , 163 : 143
  • Winquist , F. , Spetz , A. , Armgarth , M. and Lundström , I. 1985 . and Danielsson, B., Biosensors based on metal-oxide-semiconductor structures . Sensors Actuators , 8 : 91
  • Winquist , F. , Lundström , I. and Danielsson , B. 1986 . Determination of creatinine by an ammonia sensitive semiconductor structure and immobilized enzymes . Anal. Chem. , 58 : 145
  • Lundström , I. , Spetz , A. and Winquist , F. 1987 . Semiconductor biosensors . Philos. Trans. R. Soc. London, Ser. B , 316 : 47
  • Lundström , I. , Shivaraman , M. S. and Svensson , C. 1977 . Chemical reactions on palladium surfaces studied with Pd-MOS structures . Surf. Sci. , 64 : 497
  • Armgarth , M. , Hua , T. H. and Lundström , I. 1985 . “ Stable PdMAOS hydrogen sensors with MOCVD aluminum oxide ” . In Techn. Digest. Transducers '85 235 Philadelphia, PA
  • Plihal , M. 1977 . Ein Feldeffekt Sensor für Wasserstoff . Siemens Forsch. Enrwicklungsber. , 6 : 53
  • Lundström , I. and Söderberg , D. 1981/1982 . Hydrogen sensitive MOS-structures. II. Characterization . Sensors Actuators , 2 : 105
  • Lundström , I. 1981 . Hydrogen sensitive MOS-structures. I. Principles and applications . Sensors Actuators , I : 403
  • Lundström , I. and Söderberg , D. 1982 . Isothermal hydrogen, desorption from palladium films . Appl. Surf. Sci. , 10 : 506
  • Petersson , L.-G. , Dannetun , H. M. , Fogelberg , J. and Lundström , L. 1985 . Hydrogen adsorption states at the external and internal palladium surfaces of a palladium-silicon dioxide-silicon structure . J. Appl. Phys. , 58 : 404
  • Dannetun , H. M. , Söderberg , D. , Lundström , I. and Petersson , L.-G. 1985 . The H2-O2 reaction on palladium studied over a large pressure range: independence of the microscopic sticking coefficients on surface condition . Surf. Sci. , 152 : 559
  • Nylander , C. , Armgarth , M. and Svensson , C. 1984 . Hydrogen induced drift in palladium gate metal-oxide-semiconductor structures . J. Appl. Phys. , 56 : 1177
  • Hua , T. H. and Armgarth , M. 1987 . Al2O3 deposited by the oxidation of trimethylaluminum as gate insulators in hydrogen sensors . J. Electron. Mater. , 16 : 27
  • Hughes , R. C. , Schubert , W. K. , Zipperian , T. E. , Rodriguez , J. L. and Plut , T. A. 1987 . Thin film palladium and silver alloys and layers for metal-insulator-semiconductor sensors . J. Appl. Phys. , 62 : 1074
  • Petersson , L.-G. , Dannetun , H. M. and Lundström , L. 1985 . The waterforming reaction on palladium. . Surf. Sci. , 161 : 77
  • Dannetun , H. M. , Petersson , L.-G. , Söderberg , D. and Lundström , I. 1984 . A hydrogen sensitive Pd-MOS structure working over a wide pressure range . Appl. Surf. Sci. , 17 : 259
  • Choi , S.-Y. , Takahashi , K. , Esashi , M. and Matsuo , T. 1987 . Hydrogen adsorption energy of Pd/Pt double metal gate MISFET sensors . Proc. 6th Sensor Symp. 1987 , Tsukuba, Japan.
  • Choi , S.-Y. January 1986 . “ Fabrication of palladium MISFET hydrogen gas sensors' ” . In Thesis , January , Sendai, , Japan : Department of Electronic Engineering, Tohoku University .
  • Söderberg , D. and Lundström , I. 1980 . Surface and interface dipoles on catalytic metal films. . Solid State Commun. , 35 : 169
  • Dus , R. 1973 . Hydrogen adsorption and absorption on evaporated palladium films . Surf. Sci. , 42 : 324
  • Robins , L. , Ross , J. F. and Shaw , J. E. A. 1986 . The logarithmic response of palladium-gate metal-insulator-silicon field-effect transistors to hydrogen . J. Appl. Phys. , 60 : 843
  • Steele , M. C. and Maclver , B. 1976 . Palladium/cadmium-sulfide Schottky diodes for hydrogen detection . Appl. Phys. Lett. , 28 : 687
  • Shivaraman , M. S. , Lundström , L. , Svensson , C. and Hammarsten , H. 1976 . Hydrogen sensitivity of palladium thin oxide-silicon Schottky barriers. . Electron. Lett. , 12 : 483
  • Ruths , P. F. , Ashok , S. , Fonash , S. J. and Ruths , J. M. 1981 . A study of Pd/Si MIS Schottky barrier diode hydrogen detector . IEEE Trans. Electron Device , ED-28 : 1003
  • Dobos , K. , Armgarth , M. , Zimmer , G. and Lundström , I. 1984 . The influence of different insulators on palladium gate metal-insulator-semiconductor hydrogen sensors . IEEE Trans. Electron Device , ED-31 : 508
  • Maclay , G. J. 1985 . MOS hydrogen sensors with ultrathin layers of palladium. . IEEE Trans. Electron Devices , ED-32 : 1158
  • Butler , M. A. 1985 . Mechanism of hydrogen sensing in Pd-Si metal-insulator semiconductor diodes . J. Appl. Phys. , 58 : 2044
  • Steele , M. C. , Hile , J. W. and Maclver , B. A. 1976 . Hydrogen sensitive palladium gate MOS capacitors . J. Appl. Phys. , 47 : 2537
  • Keramati , B. and Zemel , J. N. 1982 . Pd-thm-SiO2-Si diode. I. Isothermal variation of H2-induced interfacial trapping states . J. Appl. Phys. , 53 : 1091
  • Keramati , B. and Zemel , J. N. 1982 . Pd-thin-SiO2-Si diode. II. Theoretical modeling and the H2 response . J. Appl. Phys. , 53 : 1100
  • Fare , T. J. and Zemel , J. N. 1987 . Admittance studies of hydrogen induced states at the silicon-silicon dioxide interface . Sensors Actuators , 11 : 101
  • Spetz , A. , Armgarth , M. and Lundström , I. 1988 . Hydrogen and ammonia response of metal-silicon dioxide-silicon structures with thin platinum gates . J. Appl. Phys. , 64 : 1274
  • Fogelberg , J. , Lundström , I. and Petersson , L.-G. 1987 . Ammonia dissociation on oxygen covered palladium studied with a hydrogen sensitive Pd-MOS device . Phys. Scr. , 35 : 702
  • Enquist , F. , Armgarth , M. and Lundström , I. 1986 . Behavior of hydrogen in palladium-aluminum metal-oxide-semiconductor structures . J. Appl. Phys. , 60 : 4297
  • Armgarth , M. and Nylander , C. 1981 . A stable hydrogen sensitive Pd gate metal-oxide-semiconductor capacitor . Appl. Phys. Lett. , 39 : 91
  • Armgarth , M. , Ackelid , U. and Lundström , L. 1987 . “ Enhanced selectivity of catalytic gate metal-oxide-semiconductor field effect transistors by temperature scan ” . In in Tech. Dig. Transducers '87 640 Tokyo, , Japan
  • Enquist , F. , Esashi , M. , Armgarth , M. , Lundström , L. and Matsuo , T. 1987 . “ Design of a high temperature extended palladium-gate field effect transistor for the detection of organic molecules ” . In Tech. Dig. Transducers '87 644 Tokyo, , Japan
  • Ito , K. 1979 . Hydrogen sensitive Schottky barrier diodes . Surf. Sci. , 86 : 345
  • Svensson , C. M. 1980 . “ Some metal-silicon dioxide interface phenomena ” . In The Physics of MOS Insulators , Edited by: Lucovsky , G. , Pantelides , S. T. and Galeener , F. L. New York : Pergamon Press .
  • Fare , T. , Spetz , A. , Armgarth , M. and Lundström , L. 1986 . “ Comparison of the quasistatic and high frequency capacitance-voltage response to ammonia of thin Pt-films MOSCAPS ” . In Proc. of 12th Nordic Semiconductor Meet. 298 Jevnaker, , Norway
  • Fare , T. , Spetz , A. , Armgarth , M. and Lundström , I. 1988 . Quasistatic and high frequency CV response of thin platinum metal-oxide-silicon structures to ammonia . Sensors Actuators , 14 : 369
  • Armgarth , M. 1983 . Physics of Palladium Metal-Oxide-Semiconductor Devices , Linköping Studies in Science and Technology, Dissertation No. 107 .
  • Armgarth , M. and Nylander , C. 1982 . Blister formation in Pd gate MIS hydrogen sensors . IEEE Electron Devices Lett. , EDL-3 : 384
  • Choi , S.-Y. , Takahashi , K. and Matsuo , T. 1984 . No blister formation Pd/Pt double metal gate MISFET hydrogen sensors . IEEE Electron Devices Lett. , EDL-5 : 14
  • Müller , R. and Lange , E. 1986 . Multidimensional sensor for gas analysis. . Sensors Actuators , 9 : 39
  • D'Amico , A. , Fortunato , G. , Reihua , W. , Ricco , B. and Olivo , P. 1985 . Transient current response in Pd-SiO2-Si structures during hydrogen adsorption and desorption . J. Appl. Phys. , 58 : 3931
  • Lundström , I. and DiStefano , T. 1976 . Influence of hydrogen on Pt-SiO2-Si structures . Solid State Commun. , 19 : 871
  • Reihua , W. , Fortunato , G. and D'Amico , A. 1985 . The correlation of the transient current response of H2 absorption and desorption with the H2 sensitivity in Pd-gated MOS capacitors . Sensors Actuators , 7 : 253
  • Zemel , J. N. 1985 . “ An introduction to piezoelectric and pyroelectric chemical sensors ” . In Solid State Chemical Sensors , Edited by: Janata , J. N. and Huber , R. J. New York : Academic Press . chap. 4
  • Söderberg , D. 1982 . “ Computer Assisted Evaluation of Gas Sensors ” . In Theory and Applications , Linköping Studies in Science and Technology, Dissertation No. 89 .
  • Armgarth , M. , Nylander , C. , Svensson , C. and Lundström , I. 1984 . Hydrogen-induced oxide surface charging in palladium-gate metal-oxide-semiconductor devices . J. Appl. Phys. , 56 : 2956
  • Bond , C. G. 1983 . Spillover of Adsorbed Species , Edited by: Pajonk , G. M. , Teichner , S. J. and Germain , J. E. Amsterdam : Elsevier .
  • Evans , N. J. , Petty , M. C. and Roberts , G. G. 1986 . Interface state effects in Pd-gate MOS hydrogen sensors . Sensors Actuators , 9 : 165
  • Fare , T. J. , Lundström , I. , Zemel , J. N. and Feygenson , A. 1986 . Reversible neutralization of boron acceptors by hydrogen in Pd-SiO2-Si capacitors . Appl. Phys. Lett. , 48 : 632
  • Armgarth , M. , Söderberg , D. and Lundström , I. 1982 . Palladium and platinum gate metal-oxide semiconductor capacitors in hydrogen and oxygen . Appl. Phys. Lett. , 41 : 654
  • Sinfelt , J. H. 1986 . Some recent developments in catalysis by metals . J. Phys. Chem. , 90 : 4711
  • Burwell , R. L. Jr. 1986 . Supported platinum, palladium, and rhodium catalysts . Langmuir , 2 : 2
  • Mason , M. G. , Gerenser , L. J. and Lee , S.-T. 1977 . Electronic structure of catalytic metal clusters studied by XPS . Phys. Rev. Lett. , 39 : 288
  • Takasu , Y. , Unwin , R. , Tesche , B. , Bradshaw , A. M. and Grunze , M. 1978 . Photoemission from Pd-particle arrays on an amorphous silica substrate. . Surf. Sci. , 77 : 219
  • Ei-Batanouny , M. , Strongin , M. , Williams , G. P. and Colbert , J. 1981 . Relationship between electronic structure and hydrogen-uptake kinetics . Phys. Rev. Lett. , 46 : 269
  • Ertl , G. 1982 . Reaction mechanisms in catalysis by metals . CRC Crit. Rev. Solid Slate Mater. Sci. , May : 349
  • Stoltze , P. and N⊘rskov , J. K. 1985 . Bridging the “pressure gap” between ultrahigh-vacuum surface physics and high-pressure catalysis . Phys. Rev. Lett. , 55 : 2502
  • Oh , S. H. , Fisher , G. B. , Carpenter , J. E. and Goodman , D. W. 1986 . Comparative kinetic studies of CO-O2 and CO-NO reactions over single crystal and supported rhodium catalysts . J. Catal. , 100 : 360
  • Kasemo , B. June 15 to 17 1987 . “ Combined high pressure and UHV studies of surface reactions ” . In presented at 2nd Nordic Conf. on Surface Science , June 15 to 17 , 15 Linköping, , Sweden : ISBN 91–7870-199–6 .
  • Petersson , L.-G. , Dannetun , H. M. and Lundström , I. 1984 . Hydrogen detection during catalytic surface reactions: evidence for activated lateral hydrogen mobility in the water forming reaction on Pd . Phys. Rev. Lett. , 52 : 1806
  • Graham , T. 1866 . On the absorption and dialytic separation of gases by colloid septa. . Philos. Trans. R. Soc. London , 156 : 415
  • Wagner , C. 1932 . Über die Kinetik der Reaktion H2(gas) = 2H (gelöst in Pd) . Z. Phys. Chem. Abt. A , 159 : 459
  • Wicke , E. and Brodowsky , H. 1978 . “ Hydrogen in palladium and palladium-alloys ” . In Hydrogen in Metals II. , Edited by: Alefeld , G. and Völkl , J. Berlin : Springer-Verlag . chap. 3.
  • Thomas , J. M. and Thomas , W. J. 1967 . Introduction to the Principles of Heterogeneous Catalysis , New York : Academic Press . chap. 2.
  • Madix , R. J. , Ertl , G. and Christmann , K. 1979 . Preexponential factors for hydrogen desorption from single crystal metal surfaces . Chem. Phys. Lett. , 62 : 38 and references therein.
  • Davenport , J. W. , Dienes , G. J. and Johnson , R. A. 1982 . Surface effects on the kinetics of hydrogen absorption by metals . Phys. Rev. B , 25 : 2165
  • Kay , B. D. , Peden , C. H. F. and Goodman , D. W. 1986 . Kinetics of hydrogen absorption by Pd(l 10) . Phys. Rev. B , 34 : 817
  • Petersson , L.-G. , Dannetun , H. M. , Karlsson , S.-E. and Lundström , I. 1982 . Surface reactions on Pd studied with a hydrogen sensitive MOS-structure and photoelectron spectroscopy . Phys. Scr. , 25 : 818
  • Engel , T. and Kuipers , H. 1979 . A molecular beam investigation of the scattering, adsorption and absorption of H2 and D2 from/on/in Pd(l11) . Surf. Sci. , 90 : 162
  • Lasser , R. and Powell , G. L. 1986 . Solubility of H, D, and T in Pd at low concentrations . Phys. Rev. B , 34 : 578
  • Dannetun , H. , Lundström , L. and Petersson , L.-G. 1988 . Hydrocarbon dissociation on palladium studied with a hydrogen sensitive MOS-structure . J. Appl. Phys. , 63 : 207
  • Conrad , H. , Ertl , G. and Latta , E. E. 1974 . Adsorption of hydrogen on Pd single crystal surfaces . Surf. Sci. , 41 : 435
  • Behm , R. J. , Christmann , K. and Ertl , G. 1980 . Adsorption of hydrogen on Pd(100) . Surf. Sci. , 99 : 320
  • Kiskinova , M. , Bliznakov , G. and Surnev , L. 1980 . Hydrogen adsorption on a clean Pd ribbon: thermal desorption and work function measurements . Surf. Sci. , 94 : 169
  • Poppa , H. and Soria , F. 1983 . Drastic reduction of adsorption of CO and H2 on (11 l)-type Pd layers . Phys. Rev. B , 27 : 5166
  • Rye , R. R. and Ricco , A. J. 1987 . Ultrahigh vacuum studies of Pd metal/insulator/semiconductor diode H, sensors . J. Appl. Phys. , 62 : 1084
  • Somorjai , G. 1972 . Principles of Surface Chemistry , Englewood Cliffs, NJ : Prentice-Hall .
  • Tomanek , D. , Louie , S. G. and Chang , C.-T. 1986 . Ab initio calculation of coverage-dependent adsorption properties of H on Pd(001) . Phys. Rev. Lett. , 57 : 2594
  • Greenlief , C. M. , Akhter , S. and White , J. M. 1986 . Temperature-programmed desorption study of H2-D2 exchange on Pt(l11) and the role of subsurface sites . J. Phys. Chem. , 90 : 4080
  • Behm , R. J. , Penka , V. , Cattania , M.-G. , Christmann , K. and Ertl , G. 1983 . Evidence for “subsurface” hydrogen on Pd(110): an intermediate between chemisorbed and dissolved species . J. Chem. Phys. , 78 : 7486
  • Baumberger , M. , Stocker , W. and Rieder , K. H. 1986 . Investigations of the selective population of hydrogen subsurface sites on Pd(l 10) using He diffraction and thermal-desorption spectroscopy . Appl. Phys. , A41 : 151
  • Rieder , K. H. , Baumberger , M. and Stocker , W. 1983 . Selective transition of chemisorbed hydrogen to subsurface sites on Pd(110) . Phys. Rev. Lett. , 51 : 1799
  • Cattania , M. G. , Penka , V. , Behm , R. J. , Christmann , K. and Ertl , G. 1983 . Interaction of hydrogen with a Pd(l 10) surface . Surf. Sci. , 126 : 382
  • Bucur , R. 1980 . Inhibition of hydrogen desorption from a thin palladium layer by surface poisoning . J. Caial. , 70 : 92
  • Moehlecke , S. , Majkrzak , C. F. and Strongin , M. 1985 . Enhanced hydrogen solubility in niobium films. . Phys. Rev. B , 31 : 6804
  • Frazier , G. A. and Glosser , R. 1980 . Characterization of thin films of the palladium-hydrogen system . J. Less Common Met. , 74 : 89
  • Feenstra , R. , De Bruin-Hordijk , G. J. , Bakker , H. L. M. , Griessen , R. and deGroot , D. G. 1983 . Critical point lowering in thin PdHx films . J. Phys. F , 13 : L13
  • Vållberg , K. 1983 . “ Pd-MOS sensors. II. Hydrogen response of Pd-MOS sensors versus the microstructure of their Pd-films, Report LiTH-IFM-EX-229 ” . Linköping, , Sweden : Linköping University .
  • Christmann , K. 1979 . Kinetics, energetics and structure of hydrogen adsorbed on transition metal single crystal surfaces . Bull. Soc. Chim. Belg. , 88 : 519
  • Auer , W. and Grabke , H. J. 1974 . The kinetics of hydrogen absorption in palladium (a- and β-phase) and palladium-silver alloys. . Ber. Bunsenges. Phys. Chem. , 78 : 58
  • Lang , N. D. , Holloway , S. and N⊘rskov , J. K. 1984 . Electrostatic adsorbate-adsorbate interactions: the poisoning and promotion of the molecular adsorption reaction. . Surf. Sci. , 150 : 24
  • Lagos , M. , Martinez , G. and Schuller , I. K. 1984 . Kinetics of hydrogen absorption in transition metals and subsurface bonding . Phys. Rev. B , 29 : 5979
  • Dienes , G. J. , Strongin , M. and Welch , D. O. 1985 . Comments on the kinetics of hydrogen uptake on niobium surfaces . Phys. Rev. B , 32 : 5475
  • Gdowski , G. E. , Stulen , R. H. and Felter , T. E. 1987 . Isotopic differences in low temperature sorption and desorption of hydrogen by Pd(l 11) . J. Vac. Sci. Technol. , A5 : 1103
  • Bucur , R. V. , Mecca , V. and Flanagan , T. B. 1976 . The kinetics of hydrogen (deuterium) sorption by thin Pd-layers studied with a piezoelectric quartz crystal microbalance. . Surf. Sci. , 54 : 477
  • Lynch , J. F. and Flanagan , T. B. 1973 . An investigation of the dynamic equilibrium between chemisorbed and adsorbed hydrogen in the Pd/H system . J. Phys. Chem. , 77 : 2628
  • Ibach , H. and Mills , D. L. 1982 . Electron Energy Loss Spectroscopy and Surface Vibrations , New York : Academic Press .
  • Petersson , L.-G. , Fogelberg , J. , Dannetun , H. and Lundström , I. 1987 . Oxygen coverage dependence in the water forming reaction from ammonia and hydrogen on a palladium surface . J. Vac. Sci. Technol. , A5 : 819
  • Grunze , M. 1982 . The Chemical Physics of Solid Surfaces and Heterogeneous Catalysis , Edited by: King , D. A. and Woodruff , D. P. Vol. 4 , Amsterdam : Elsevier . chap. 5.
  • Kunimori , K. , Kawai , T. , Kondow , T. , Onishi , T. and Tamaru , K. 1976 . High resolution Auger electron spectroscopic study of nitrogen species adsorbed on a Pd surface. . Surf. Sci. , 59 : 302
  • Ackelid , U. , Petersson , L.-G. and Lundström , L. 1987 . “ Ethanol sensitivity of palladium-gate metal-oxide-semiconductor structures at high and low pressures ” . In Europhysics Conference Abstracts , 060 Luzern : European Physical Society .
  • Conrad , H. , Ertl , G. , Koch , J. and Latta , E. E. 1974 . Adsorption of CO on Pd single crystal surfaces. . Surf. Sci. , 43 : 462
  • Dannetun , H. M. 1987 . “ Catalytic Reactions Studied with Metal-Oxide-Semiconductor Structures: Hydrogen and Hydrocarbons on Palladium in Ultra-High Vacuum ” . In Linköping Studies in Science and Technology , 43 Dissertation No. 160 .
  • Ratajczvkowa , I. 1986 . The influence of CO on hydrogen sorption by Pd(l11) single crystals . Surf. Sci. , 172 : 691
  • Dobos , K. and Zimmer , G. 1985 . Performance of carbon monoxide-sensitive MOSFET's with metal-oxide semiconductor gates . IEEE Trans. Electron Devices , ED-32 : 1165
  • Nordlander , P. , Holloway , S. and N⊘rskov , J. K. 1984 . Hydrogen adsorption on metal surfaces . Surf. Sci. , 136 : 59 and references therein.
  • Collins , D. M. , Lee , J. B. and Spicer , W. E. 1976 . Study of the hydrogénation of O adsorbed on Pt . J. Vac. Sci. Technoi. , 13 : 266
  • Gland , J. L. , Fisher , G. B. and Kollin , E. B. 1982 . The hydrogen-oxygen reaction over the Pt(l11) surface: transient tttration of adsorbed oxygen with hydrogen . J. Catal. , 77 : 263
  • Kasemo , B. and Törnqvist , E. 1980 . Weighing fractions of monolayers: application to the adsorption and catalytic reactions of H2 CO, and O2 on Pt . Phys. Rev. Lett. , 44 : 1555
  • Harris , J. , Kasemo , B. and Törnqvisl , E. 1981 . The waler reaction on Pt: an example of a precursor mechanism? . Surf. Sci. , 105 : L288
  • Akhter , S. and White , J. M. 1986 . The effect of oxygen islanding on CO and H, oxidation on Pt(l 11) . Surf. Sci. , 171 : 527
  • Dannetun , H. , Lundström , I. and Petersson , L.-G. 1988 . Reactions between hydrocarbons and an oxygen covered palladium surface . Surf. Sci. , 193 : 109
  • Petersson , L.-G. , Dannetun , H. M. and Lundström , L. 1985 . Water production in hydrogen-oxygen atmospheres . Surf. Sei. , 163 : 559
  • Söderberg , D. and Lundström , I. 1983 . Competition between hydrogen and oxygen dissociation on palladium surfaces at atmospheric pressures . Solid Stale Commun. , 45 : 431
  • Ljungström , S. , Hall , J. , Kasemo , B. , Rosén , A. and Wahnström , T. 1987 . A comparative study of OH radical desorption in the H<2 + O2 reaction on Pt, Pd, Rh, Ir, and Ni. . J. Catal. , 107 : 548
  • Hellsing , B. , Kasemo , B. , Ljungström , S. , Rosen , A. and Wahnström , T. 1987 . Kinetic model and experimental results for H2O and OH production rates on Pt . Surf. Sci. , 189/190 : 851
  • Steininger , H. , Ibach , H. and Lewaldh , S. 1982 . Surface reactions of ethylene and oxygen on Pt(l11) . Surf. Sci. , 117 : 685
  • Dannetun , H. , Lundström , I. and Petersson , L.-G. 1986 . Dehydrogenation of acetylene and ethylene studied on clean and oxygen covered palladium surfaces. . Surf. Sci. , 173 : 148
  • Petersson , L.-G. , Dannetun , H. , Fogelberg , J. and Lundström , I. 1987 . Oxygen as a promoter in the catalytic dissociation of H2 C2H4 C2H2 and NH3 on palladium . Appl. Surf. Sci. , 27 : 275
  • Fare , T. , Spetz , A. , Armgarth , M. and Lundström , I. 1988 . Reversible interaction of hydrogen with thin layers of thermally grown silicondioxide . J. Appl. Phys. , 63 : 5507
  • Evans , N. J. , Roberts , G. G. and Petty , M. C. September 22 to 24 1987 . “ Effects of hydrogen gas on palladium/LB film/silicon MIS devices ” . In Proc. 3rd Conf. on Sensors and Their Applications September 22 to 24 , 131 Cambridge
  • July 7 to 10 1986 . Proc. 2nd Int. Meet. , July 7 to 10 , 387 Bordeaux, , France : Chemical Sensors .
  • June 2 to 7 1987 . Tech. Dig. Transducers '87 June 2 to 7 , 635 Tokyo, , Japan

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