STM studies of nucleation and the initial stages of film growth

References

• Binnig , G. , Rohrer , H. , Gerber , Ch. and Weibel , H. 1982 . Surface studies by scanning tunneling microscopy . Phys. Rev. Lett. , 49 : 57
   Web of Science ®Google Scholar
• Feenstra , R. M. , Thompson , W. A. and Fein , A. P. 1986 . Real-space observation of π-bonded chains and surface disorder on Si(111)2×1 . Phys. Rev. Lett. , 56 : 608
   PubMed Web of Science ®Google Scholar
• Hamers , R. J. and Demuth , J. E. 1988 . Electronic structure of localized Si dangling-bond defects by tunneling spectroscopy . Phys. Rev. Len. , 60 : 2527
   PubMed Web of Science ®Google Scholar
• Berghaus , Th. , Brodde , A. , Neddermeyer , H. and Toseh , St. 1988 . Scanning tunneling microscopy and spectroscopy on 7×7 reconstructed Si(111) surfaces containing defects . Sutface Sci. , 193 : 235
   Web of Science ®Google Scholar
• Becker , R. S. , Golovchenko , J. A. and Swartzentruber , B. S. 1985 . Tunneling images of germanium surface reconstructions and phase boundaries . Phys. Rev. Lett. , 54 : 2678
   PubMed Web of Science ®Google Scholar
• Zheng , N. J. , Wilson , I. H. , Knipping , U. , Burt , D. M. , Krinsley , D. H. and Tsong , J. S. T. 1988 . Atomically resolved scanning tunneling microscopy images of dislocations . Phys. Rev. B. , 38 ( 12 ) : 780
   Google Scholar
• Becker , R. S. , Golovchenko , J. A. , Higashi , G. S. and Swartzentruber , B. S. 1986 . New reconstructions on silicon (111) surfaces . Phys. Rev. Lett. , 57 : 1020
   PubMed Web of Science ®Google Scholar
• Becker , R. S. , Swartzentruber , B. S. , Vickers , J. S. and Klitsner , T. 1989 . Dimer-adatom-stacking-fault (DAS) and non-DAS (111) semiconductor surfaces: a comparison of Ge(111)-c(2×8) to Si-(2×2), -(5×5), -(7×7), and -(9×9) with scanning tunneling microscopy . Phys. Rev. B. , 39 : 1633
   Web of Science ®Google Scholar
• Becker , R. S. , Golovchenko , J. A. , McRae , E. G. and Swartzentruber , B. S. 1985 . Tunneling images of atomic steps on the Si(001) . Phys. surface, Phys. Rev. Lett. , 55 : 2028
   PubMed Web of Science ®Google Scholar
• Wierenga , P. E. , Kubby , J. A. and Grifiith , J. E. 1987 . Tunneling images of biatomic steps on Si(001) . Phys. Rev. Lett. , 59 : 2169
   PubMed Web of Science ®Google Scholar
• Feenstra , R. M. and Stroscio , J. A. 1987 . Reconstruction of steps on the Si(111)2×1 surface . Phys. Rev. Lett. , 59 : 2173
   PubMed Web of Science ®Google Scholar
• Berghaus , Th. , Brodde , A. , Neddermeyer , H. and Tosch , St. 1988 . Reconstruction of rows and steps of Si(112) and Si(223) . J. Vac. Sci. Technol. A , 6 : 478
   Web of Science ®Google Scholar
• Baratoff , A. , Binnig , G. , Fuchs , H. , Salvan , F. and Stoll , E. 1986 . Tunneling microscopy and spectroscopy of semiconductor surfaces and interfaces . Surface Sci. , 168 : 734
   Web of Science ®Google Scholar
• Stobbs , W. M. , ed. 1988 . An overview on recent STM work is found . Proc. Int. Conf. Scanning Tunnelling Electron Microscopy . July 1988 , Oxford. J. Microscopy, 152, 1988
   Google Scholar
• Binnig , G. , Rohrer , H. , Gerber , Ch. and Weibel , E. 1983 . 7×7 Reconstruction on Si(111) resolved in real space . Phys. Rev. Lett. , 50 : 120
   Web of Science ®Google Scholar
• Köhler , U. K. , Demuth , J. E. and Hamers , R. J. 1988 . Surface reconstruction and the nucleation of palladium silicide on Si(111) . Phys. Rev. Lett. , 60 : 2499
   PubMed Web of Science ®Google Scholar
• Tosch , St. and Neddermeyer , H. 1988 . Initial stage of Ag condensation on Si(111)7×7 . Phys. Rev. Lett. , 61 : 349
   PubMed Web of Science ®Google Scholar
• Wilson , R. J. and Chiang , S. 1987 . Structure of the Ag/Si(111) surface by scanning tunneling microscopy . Phys. Rev. Lett. , 58 : 369
   PubMed Web of Science ®Google Scholar
• van Loenen , E. J. , Demuth , J. E. , Tromp , R. M. and Hamers , R. J. 1987 . Local electron states and surface geometry of Si(111)-(□3 × □3)Ag . Phys. Rev. Len. , 58 : 373
   PubMed Web of Science ®Google Scholar
• Becker , R. S. , Golovchenko , G. A. and Swartzentruber , B. S. 1985 . Tunneling images of the 5×5 surface reconstruction on Ge-Si(111) . Phys. Rev. B. , 32 : 8455
   Web of Science ®Google Scholar
• Hamers , R. J. , Köhler , U. K. and Demuth , J. E. 1989 . Nucleation and growth of epitaxial silicon on Si(001) and Si(111) surfaces . Ultramicroscopy , 31 : 10
   Web of Science ®Google Scholar
• Wolkow , R. and Avouris , Ph. 1988 . Scanning tunnelling microscopy studies of heteroepitaxy: CaF2 on Si(111) . J. Microscopy , 152 : 167
   Web of Science ®Google Scholar
• Leibsle , F. M. , Samsavar , A. and Chiang , T.-C. 1988 . Oxidation of Si(111)-(7×7) as studied by scanning tunneling microscopy . Phys. Rev. B. , 38 : 5780
   Web of Science ®Google Scholar
• Wolkow , R. and Avouris , Ph. 1988 . Atom-resolved surface chemistry using scanning tunneling microscopy . Phys. Rev. Lett. , 60 : 1049
   PubMed Web of Science ®Google Scholar
• Kern , R. , Le Lay , G. and Metois , J. J. 1979 . “ Basic mechanisms in the early stages of epitaxy ” . In Current Topics in Materials Science , Edited by: Kaldis , E. Vol. 3 , 139 Amsterdam : North-Holland .
   Google Scholar
• Frank , F. C. and van der Merwe , J. H. 1949 . One-dimensional dislocations. I. Static theory . Proc. R. Soc. A , 198 : 205
   Web of Science ®Google Scholar
• Volmer , M. and Weber , A. 1926 . Keimbiedung in iibersattigten Gebilden . Z. Phys. Chem. , 119 : 277
   Google Scholar
• Stranski , J. N. and Krastanov , L. 1938 . Zur Theone der onentienen Ausscheidung von Ionen Kristaller aufeinander . Ber. Akad. Wiss. Wien. , 146 : 797
   Google Scholar
• Venables , J. A. , Spiller , G. D. T. and Hanbücken , M. 1984 . Nucleation and growth of thin films . Rep. Prog. Phys. , 47 : 399
   Web of Science ®Google Scholar
• van Loenen , E. J. , Iwami , M. , Tromp , R. M. and van der Veen , J. F. 1984 . The adsorption of Ag on the Si(111)7×7 surface at room temperature studied by medium energy ion scattering, LEED and AES . Surface Sci. , 137 : 1
   Web of Science ®Google Scholar
• Demuth , J. E. , van Loenen , E. J. , Tromp , R. M. and Hamers , R. J. 1988 . Local electronic structure and surface geometry of Ag on Si(111) . J. Vac. Sci. Technol. B , 6 : 18
   Web of Science ®Google Scholar
• Tosch , St. and Neddermeyer , H. 1988 . Nucleation and growth of Cu and Ag on Si(111)7×7 . J. Microscopy , 152 : 415
   Web of Science ®Google Scholar
• Stroscio , J. A. , Feenstra , R. M. and Fein , A. P. 1987 . Local state density and long-range screening of adsorbed oxygen atoms on the GaAs(110) surface . Phys. Rev. Lett. , 58 : 1668
   PubMed Web of Science ®Google Scholar
• Bell , L. D. and Kaiser , W. J. 1988 . Observation of interface band structure by ballistic-electron emission microscopy . Phys. Rev. Lett. , 61 : 2368
   PubMed Web of Science ®Google Scholar
• Garcia , N. 1986 . Theory of scanning tunneling microscopy and spectros-copy: resolution, image and field states, and thin oxide layers . IBM J. Res. Develop. , 30 : 533
   Web of Science ®Google Scholar
• Tersoff , J. and Hamann , D. R. 1985 . Theory of the scanning tunneling microscope . Phys. Rev. B , 31 : 805
   PubMed Web of Science ®Google Scholar
• Bardeen , J. 1961 . Tunneling from a many-particle point of view . Phys. Rev. Lett. , 6 : 57
   Web of Science ®Google Scholar
• Feuchtwang , T. E. , Cutler , P. H. and Miskovsky , N. M. 1983 . A theory of vacuum tunneling microscopy . Phys. Lett. , 99A : 167
   Google Scholar
• Chung , M. S. , Feuchtwang , T. E. and Cutler , P. H. 1987 . Spherical tip model in the theory of the scanning runneling microscope . Surf. Sci. , 187 : 559
   Web of Science ®Google Scholar
• Noguera , C. 1988 . Voltage dependence of the tunneling current: an exact expression . J. Microscopy , 152 : 3
   Web of Science ®Google Scholar
• Bono , J. and Good , R. H. 1986 . Theoretical discussion of the scanning tunneling microscope applied to a semiconductor surface . Surf. Sci. , 175 : 415
   Web of Science ®Google Scholar
• Hamers , R. J. , Tromp , R. M. and Demuth , J. E. 1986 . Surface electronic structure of Si(111)-(7×7) resolved in real space . Phys. Rev. Lett. , 56 : 1972
   PubMed Web of Science ®Google Scholar
• Stroscio , J. A. , Feenstra , R. M. and Fein , A. P. 1986 . Electronic shuclure of the Si(111)2×1 surface by scanning-tunneling microscopy . Phys. Rev. Len. , 57 : 2579
   PubMed Web of Science ®Google Scholar
• Lang , N. D. 1986 . Spectroscopy of single atoms in the scanning tunneling microscope . Phys. Rev. B , 34 : 5947
   Web of Science ®Google Scholar
• Feenstra , R. M. , Stroscio , J. A. and Fein , A. P. 1987 . Tunneling spectroscopy of the Si(111)2×1 surface . Surf. Sci. , 181 : 295
   Web of Science ®Google Scholar
• Gerber , Ch. , Binnig , G. , Fuchs , H. , Marti , O. and Rohrer , H. 1986 . Scanning tunneling microscope combined with scanning electron microscopy . Rev. Sci. Instrum. , 57 : 221
   Web of Science ®Google Scholar
• Drake , B. , Sonnenfeld , R. , Schneir , J. , Hansma , P. K. , Slough , G. and Coleman , R. V. 1986 . Tunneling microscope for operation in air or fluids . Rev. Sci. Instrum. , 57 : 441
   Web of Science ®Google Scholar
• van de Walle , G. F. A. , Gerritsen , J. W. , van Kempen , H. and Wyder , P. 1985 . High-stability scanning tunneling microcope . Rev. Sci. Instrum. , 56 : 1573
   Web of Science ®Google Scholar
• Demuth , J. E. , Hamers , R. J. , Tromp , R. M. and Wetland , M. E. 1986 . A scanning tunneling microscope for surface science studies . IBM J. Res. Develop. , 30 : 396
   Web of Science ®Google Scholar
• Pohl , D. W. 1986 . Some design criteria in scanning tunneling microscopy . IBM J. Res. Develop. , 30 : 417
   Web of Science ®Google Scholar
• Michely , Th. , Besocke , K. H. and Take , M. 1988 . A combined scanning tunnelling and field ion microscope . J. Microscopy , 152 : 77
   Web of Science ®Google Scholar
• Lyding , J. W. , Skala , S. , Hubacek , J. S. , Brockenbrough , R. and Gammie , G. 1988 . Design and operation of a variable tejnperature scanning tunnelling microscopy . J. Microscopy , 152 : 371
   Web of Science ®Google Scholar
• Frenken , J. W. M. , Hamers , R. J. and Demuth , J. E. 1990 . Thermal roughening studied by scanning tunneling microscopy . Vac. Sci. Technol. , 8 : 293
   Google Scholar
• Takayanagi , K. , Tanishiro , Y. , Takahashi , M. and Takahashi , S. 1985 . Structural analysis of Si(111)-7×7 by UHV-transmission electron diffraction and microscopy . J. Vac. Sci. Technol. A , 3 : 1502
   Web of Science ®Google Scholar
• Tromp , R. M. , Hamers , R. J. and Demuth , J. E. 1986 . Atomic and electronic contributions to Si(111)-(7×7) scanning-tunneling-microscopy images . Phys. Rev. B , 34 : 1388
   Web of Science ®Google Scholar
• Yamaguchi , T. 1985 . Restricted role of experiments in real space in determination of the Si(111)7×7 reconstructed structure . Phys. Rev. B , 32 : 2356
   Web of Science ®Google Scholar
• Berghaus , Th. , Brodde , A. , Neddermeyer , H. and Tosch , St. 1988 . On the interpretation of current images in scanning tunneling spectroscopy . J. Vac. Sci. Technol. A , 6 : 483
   Google Scholar
• Hamers , R. J. , Tromp , R. M. and Demuth , J. E. 1987 . Electronic structure of Si(111)-(7×7) and Si(100) surfaces . Sutf Sci. , 181 : 346 Hamers, R. J., Avouris, Ph., and Boszo. F., Imaging of chemical-bond formation with the scanning tunneling microscopy: NH, dissociation on Si(001). Phys. Rev. Lett., 59, 2071, 1987
   Web of Science ®Google Scholar
• Badt , D. , Brodde , A. , Tosch , St. and Neddermeyer , H. unpublished results
   Google Scholar
• Brodde , A. , Badt , D. , Tosch , St. and Neddermeyer , H. 1990 . The growth of Ag films on Si(100) . J. Vac. Sci. Technol. A , 8 : 251
   Google Scholar
• Niehus , H. , Kiihler , U. K. , Copel , M. and Demuth , J. E. 1988 . A real space investigation of the dimer defect structure of Si(001)-(2×8) . J. Microscopy. , 152 : 735
   Web of Science ®Google Scholar
• Hanbücken , M. , Neddermeyer , H. and Rupieper , P. 1982 . Low energy electron diffraction, Auger electron spectroscopy and angle-resolved photoemission from silver films on Si(100) and Si(111) . Thin Solid Films , 90 : 37
   Web of Science ®Google Scholar
• Tosch , St. 1989 . Rasteitunnelmikroskopische Untersuchung der Kondensation und Grenzschichtbildung von Ag und Cu auf Si(111) , Thesis Ruhr-ät Bochum .
   Google Scholar
• Kittel , C. 1976 . Infroducrion to Solid Sfare Physics , 5th ed. , New York : John Wiley .
   Google Scholar
• van Loenen , E. J. , Iwami , M. , Tromp , R. M. , van der Veen , J. F. and Saris , F. 1983 . Evidence for island growth on deposition of silver onto Si(111)7×7 at room temperature . Thin Solid Films. , 104 : 9
   Web of Science ®Google Scholar
• Brodde , A. , Tosch , St. and Neddermeyer , H. 1988 . Scanning tunneling microscopy and spectroscopy on Cu(111) and Au(111) . J. Microscopy , 152 : 441
   Web of Science ®Google Scholar
• Hallmark , V. , Chiang , S. , Rabolt , J. F. , Swalen , J. D. and Wilson , R. J. 1987 . observation of an atomic corrugation on Au(111) by scanning tunneling microscopy . Phys. Rev. B , 59 : 2879
   Web of Science ®Google Scholar
• Wintterlin , J. , Weichers , J. , Brune , H. , Gritsch , T. , Hofer , H. and Behm , R. J. 1989 . Atomic resolution imaging of closed-packed metal surfaces by scanning tunneling microscopy . Phys. Rev. Leff. , 62 : 59
   PubMed Web of Science ®Google Scholar
• Rider , K.-H. private communication
   Google Scholar
• Relevant literature on Si(111)-□3 × □3 - R30° is cited in References 18, 19, and 71
   Google Scholar
• Wilson , R. J. and Chaing , S. 1987 . Registration and nucleation of the Agl Si(111)(□3 × □3)R 30° smcture by scanning tunneling microscopy . Phys. Rev. Lett. , 59 : 2329
   PubMed Web of Science ®Google Scholar
• Fan , W. C. , Ignatiev , A. , Huang , H. and Tong , S. Y. 1989 . Observation and structural determination of (□3 × □3)R 30° reconstruction of the Si(111) surface . Phys. Rev. Lett. , 62 : 1516
   PubMed Web of Science ®Google Scholar
• Vlieg , E. , Denier van der Gon , A. W. and van der Veen , J. F. 1989 . The structure of Si(111) - (□3 × □3) R 30° - Ag determined by surface X-ray diffraction . Surf. Sci. , 209 : 100
   Web of Science ®Google Scholar
• Tosch , St. and Neddermeyer , H. 1989 . Nucleation of Cu on Si(111)7×7 and atomic structure of the Cu/Si(111) interface . Surf. Sci. , 211/212 : 133
   Web of Science ®Google Scholar
• Hansen , M. and Anderko , K. 1958 . Constitution of Binary Alloys , New York : McGraw-Hill .
   Google Scholar
• Kemmann , H. , Miiller , F. and Neddermeyer , H. 1987 . AES. LEED and TDS studies of Cu on Si(111)7×7 and Si(100)2×1 . Surf. Sci. , 192 : 11
   Web of Science ®Google Scholar
• Wilson , R. J. , Chiang , S. and Salvan , F. 1988 . Examination of the Cu(111)5×5 structure by scanning tunneling microscopy . Phys. Rev. B , 38 ( 12 ) : 696
   Web of Science ®Google Scholar
• Demuth , J. E. , Köhler , U. K. , Hamers , R. J. and Kaplan , P. 1989 . Phase separation on an atomic scale: the formation of a novel quasiparticle 2D structure . Phys. Rev. Lett. , 62 : 641
   PubMed Web of Science ®Google Scholar
• Tosch , St. and Neddermeyer , H. unpublished results; see also Reference 63
   Google Scholar
• Hanbiicken , M. and Neddermeyer , H. 1982 . A LEED-AES study of the growth of Ag films on Si(100) . Surf. Sci. , 114 : 563
   Web of Science ®Google Scholar
• Hanbiicken , M. , Futamoto , M. and Venables , J. A. 1984 . Nucleation, growth and the intermediate layer in Ag/Si(100) and Ag/Si(111) . Surf. Sci. , 147 : 433
   Web of Science ®Google Scholar
• Comer , R. 1986 . Possible mechanisms of atom transfer in scanning tunneling microscopy . IEM J. Res. Develop. , 30 : 428
   Google Scholar
• Hashizume , T. , Hamers , R. J. , Demuth , J. E. , Markert , K. and Sakurai , T. 1990 . J. Vac. Sci. Technol. A , 8 : 249
   Web of Science ®Google Scholar
• An overview on relevant work is found in Reference 16
   Google Scholar
• Laubschat , C. , Prietsch , M. , Domke , M. , Weschke , E. , Remmers , G. , Mandel , T. , Ortega , J. E. and Kaindl , G. 1989 . Switching of band bending at the nonreactive CsOx/GaAs(110) interface . Phys. Rev. Lerf. , 62 : 1306
   PubMed Web of Science ®Google Scholar
• Feenstra , R. M. and Måtensson . 1988 . Fermi-level pinning at the Sb/GAS(110) surface studied by scanning tunneling spectroscopy . Phys. Rev. Lett. , 61 : 447
   PubMed Web of Science ®Google Scholar
• Feenstra , R. M. , Mlrtensson and Stroscio , J. A. 1989 . “ Fermi-level pinning by oxygen and antimony adsorbates on the GaAs(110) surface by scanning tunneling spectroscopy ” . In Merallizarion and Metal-Serniconducror Inretfaces , Edited by: Batra , I. P. 307 Plenum Publishing .
   Google Scholar
• Köhler , U. , Demuth , J. E. and Hamers , R. J. 1989 . STM study of low temperature epitaxial growth of silicon on Si(111)-(7×7) . J. Vac. Sci. Technol. A , 7 : 2860
   Web of Science ®Google Scholar
• Mo , Y.-W. , Kariotis , R. , Savage , D. E. and Lagally , M. G. 1989 . Anisotropic growth and “layer-by-layer” epitaxy . Surf. Sci. , 219 : L551
   Web of Science ®Google Scholar
• Gimzewski , J. K. , Humbert , A. , Bednon , J. G. and Reihl , B. 1985 . Silver films condensed at 300 and 90 K: scanning tunneling microscopy of their surface topography . Phys. Rev. Lett. , 55 : 951
   PubMed Web of Science ®Google Scholar
• Emch , R. , Nogami , J. , Dorek , M. M. , L a g , C. A. and Quate , C. F. 1988 . Characterization and local modification of atomically flat gold surfaces by STM. . J. Microscopy. , 152 : 129
   Web of Science ®Google Scholar
• Abraham , D. W. , Sattler , K. , Ganz , E. , Mamin , H. J. , Thomson , R. E. and Clarke , J. 1986 . Direct imaging of Au and Ag clusters by scanning tunneling microscopy . Appl. Phys. Lett. , 49 : 853
   Web of Science ®Google Scholar
• Ganz , E. , Sattler , K. and Clarke , J. 1988 . Scanning tunneling microscopy of the local atomic structure of two-dimensional gold and silver islands on graphite . Phys. Rev. Lett. , 60 : 1856
   PubMed Web of Science ®Google Scholar
• Uozumi , K. 1988 . Observation of very thin gold island films vacuum-deposited onto MoS, surface by STM . J. Microscopy. , 152 : 193
   Web of Science ®Google Scholar
• Becker , R. S. , Klitsner , T. and Vickers , J. S. 1988 . Arsenic-terminated silicon and germanium surfaces studied by scanning tunnelling microscopy . J. Microscopy. , 152 : 157
   Web of Science ®Google Scholar
• Chen , D. M. , Golovchenko , J. A. , Bedrossian , P. and Mortensen , K. 1988 . Tunneling images of gallium on a silicon surface: reconstructions, superlattices, and incommensuration . Phys. Rev. Lett. , 61 : 2867
   PubMed Web of Science ®Google Scholar
• Park , Sang-il , Nogami , J. and Quate , C. F. 1988 . Metal-induced reconstructions of the silicon (111) surface . J. Microscopy. , 152 : 727
   Web of Science ®Google Scholar
• Wolkow , R. and Avouris , Ph. 1988 . Scanning tunnelling microscopy studies of heteroepitaxy: CaF, on Si(111) . J. Microscopy. , 152 : 167
   Web of Science ®Google Scholar
• Niedermann , Ph. and Fwher , O. 1988 . Imaging of granular high T, thin films using a scanning tunnelling microscope with large scan range . J. Microscopy , 152 : 93
   Web of Science ®Google Scholar
• Green , M. P. , Richter , M. , Xing , X. , Scherson , D. , Hanson , J. K. , Ross , P. N. Jr. , Carr , R. and Lindau , I. 1988 . In-situ STM studies of electrochemical underpotential deposition of Pb on Au(111) . J. Microscopy. , 152 : 823
   Web of Science ®Google Scholar