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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 177, 2022 - Issue 9-10
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Articles

Simulation of the evolution of rough surfaces by sputtering using the binary collision approximation

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Pages 1019-1032 | Received 06 Apr 2022, Accepted 10 Jun 2022, Published online: 20 Jul 2022

References

  • Behrisch, R., Ed. Sputtering by Particle Bombardment I; Topics in Applied Physics 47; Springer: Berlin, Heidelberg, 1981.
  • Behrisch, R., Ed. Sputtering by Particle Bombardment II; Topics in Applied Physics 52; Springer: Berlin, Heidelberg, 1983.
  • Behrisch, R.; Wittmaack, K., Eds. Sputtering by Particle Bombardment III; Topics in Applied Physics 64; Springer: Berlin, Heidelberg, 1991.
  • Behrisch, R.; Eckstein, W., Eds. Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies; Topics in Applied Physics 110; Springer: Berlin, Heidelberg, 2007.
  • Hapke, B. J. Geophys. Res. Planets 2001, 106, 10039.
  • Kelly, P.; Arnell, R. Vacuum 2000, 56, 159.
  • Li, J.; Stein, D.; McMullan, C.; Branton, D.; Aziz, M.; Golovchenko, J. Nature 2001, 412, 166.
  • Federici, G.; Skinner, C.; Brooks, J.; Coad, J.; Grisolia, C.; Haasz, A.; Hassanein, A.; Philipps, V.; Pitcher, C.; Roth, J.; Wampler, W.R.; Whyte, D.G.; Nucl. Fusion 2001, 41, 1967.
  • Küstner, M.; Eckstein, W.; Dose, V.; Roth, J. Nucl. Instrum. Methods Phys. Res., Sect. B 1998, 145, 320.
  • Küstner, M.; Eckstein, W.; Hechtl, E.; Roth, J. J. Nucl. Mater. 1999, 265, 22.
  • von Toussaint, U.; Mutzke, A.; Manhard, A. Phys. Scripta 2017, T170, 014056.
  • Arredondo, R.; Oberkofler, M.; Schwarz-Selinger, T.; von Toussaint, U.; Burwitz, V.; Mutzke, A.; Vassallo, E.; Pedroni, M. Nucl. Mater. Energy 2019, 18, 72.
  • Sigmund, P. Phys. Rev. 1969, 184 (2), 383.
  • Sigmund, P. J. Mater. Sci. 1973, 8, 1545.
  • Mark Bradley, R.; Hofsäss, H. J. Appl. Phys. 2014, 116 (23), 234304.
  • Bradley, R.; Harper, J. J. Vac. Sci. Technol. A 1988, 6 (4), 2390.
  • Valbusa, U.; Boragno, C.; Buatier de Mongeot, F. J. Phys.: Condens. Matter 2002, 14 (35), 8153.
  • Chan, W.; Chason, E. J. Appl. Phys. 2007, 101, 121301.
  • Norris, S.A.; Aziz, M.J. Appl. Phys. Rev. 2019, 6 (1), 011311.
  • Hobler, G.; Bradley, R.; Urbassek, H. Phys. Rev. B 2016, 93, 205443.
  • Eckstein, W. Computer Simulation of Ion-Solid Interactions; Springer Series in Materials Science 10; Springer: Berlin, Heidelberg, 1991.
  • Eckstein, W.; Urbassek, H. In Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies; Behrisch, R.; Eckstein, W., Eds.; Topics in Applied Physics 110; Springer: Berlin, Heidelberg, 2007.
  • Biersack, J.; Eckstein, W. Appl. Phys. A 1984, 34, 73.
  • Mutzke, A.; Schneider, R.; Eckstein, W.; Dohmen, R. SDTrimSP Version 5.00; Technical Report IPP 12/8; Max-Planck-Institut für Plasmaphysik: Garching, Germany, 2011.
  • Mutzke, A.; Schneider, R.; Eckstein, W.; Dohmen, R.; Schmid, K.; von Toussaint, U.; Bandelow, G. SDTrimSP Version 6.00; Technical Report IPP 2019-02; Max-Planck-Institut für Plasmaphysik: Garching, Germany, 2019.
  • Hofsäss, H.; Zhang, K.; Mutzke, A. Appl. Surf. Sci. 2014, 310, 134.
  • Möller, W.; Eckstein, W.; Biersack, J. Comput. Phys. Comm. 1988, 51, 355.
  • Mutzke, A.; Schneider, R.; Bandelow, G. SDTrimSP-2D: Simulation of Particles Bombarding on a Two Dimensional Target Version 2.0; Technical Report IPP 12/11; Max-Planck-Institut für Plasmaphysik: Garching, Germany, 2013.
  • von Toussaint, U.; Mutzke, A. Nucl. Mater. Energy 2017, 12, 318.
  • Mutzke, A.; Bizyukov, I.; Schneider, R.; Davis, J. Nucl. Instrum. Methods Phys. Res. B 2011, 269, 582.
  • Schneider, R.; Mutzke, A.; Bizyukov, I.; Davis, J. J. Nucl. Mater. 2011, 415, S200.
  • Arredondo, R. SIESTA: A New Ion Source Setup and its Application to Erosion Studies on First-Wall Materials for Fusion Reactors; Technical Report IPP 2019-10; Max-Planck-Institut für Plasmaphysik: Garching, Germany, 2019.
  • Wilson, W.D.; Haggmark, L.G.; Biersack, J.P. Phys. Rev. B 1977, 15 (5), 2458.
  • Lindhard, J.; Scharff, M.; Schøtt, H. Mat. Fys. Medd. Dan. Vid. Selsk. 1963, 33 (14), 3.
  • Madelung, O., Ed. Landolt-Börnstein: New Series, vol. IV/5b; Springer: Berlin, Heidelberg, 1992.
  • Binder, H.H. Lexikon der chemischen Elemente, Hirzel: Stuttgart, 1999.
  • Lide, D.R. CRC Handbook of Chemistry and Physics, 78th ed.; CRC Press, 1997.
  • D'Ans, J.; Lax, E.; Blachnik R., Ed.; Taschenbuch für Chemiker und Physiker, vol. 3; Springer: Berlin, Heidelberg, 1998.
  • Santos, S.D. Time-frequency analysis for surface roughness characterization using backscatter ultrasound. In AIP Conference Proceedings; AIP, 29 July–3 Aug 2001; pp 752–758.
  • Brock, M. Techn. Rev. 1983 (3). https://www.bksv.com/media/doc/bv0011.pdf.
  • Dong, W.P.; Stout, K.J. Proc. Inst. Mech. Eng. B: J. Eng. Manuf. 1995, 209 (5), 381–391.
  • Pfeifer, P. Appl. Surf. Sci. 1984, 18 (1-2), 146–164.
  • von Toussaint, U.; Mutzke, A.; Sugiyama, K.; Schwarz-Selinger, T. Phys. Scripta 2016, T167, 014023.