Some of the current trends in the studies of sputtering

References

• Kaminsky , M. 1965 . Atomic and Ionic Impact Phenomena on Metal Surfaces , Springer-Verlag .
   Google Scholar
• Pleshivtsev , N. V. 1968 . Cathode Sputtering , Moscow : Atomizdat . (in Russian)
   Google Scholar
• Behrisch , R. , ed. 1981 . Sputtering by Particle Bombardment I. Physical Sputtering of Single-Elemental Solids , Springer-Verlag .
   Google Scholar
• Behrisch , R. , ed. 1983 . “ Electron and Neutron Sputtering. Surface Topography ” . In Sputtering by Particle Bombardment II. Sputtering of Alloys, Compounds , Springer-Verlag .
   Google Scholar
• Behrisch , R. 1964 . Festkörperzertäubung durch Ionenbeschuss . Ergebn. Exakt. Naturwiss. , 35 : 295
   Google Scholar
• Kaminsky , M. , ed. 1976 . “ Advances in Chemistry series, No. 158 ” . In Radiation Effects on Solid Surfaces , Washington D.C. : American Chemistry Society .
   Google Scholar
• Einspruch , N. G. and Brown , D. M. , eds. 1984 . “ Plasma Processing for VLSI ” . In VLSI Electronics. Microstructure Science , Vol. v. 8 , Academic Press .
   Google Scholar
• Gabovich , M. L. , Pleshivtsev , N. V. and Semashko , N. N. 1986 . Ion and Atom Beams for Controllable Nuclear Fusion and Technological Purposes , Moscow : Energoatomizdat . (in Russian)
   Google Scholar
• Kurnosov , A. I. and Yudin , V. V. 1986 . Technology of Production of Semiconductor Devices and Integrated Microcircuits , Moscow : Vysshaya Shkola . (in Russian)
   Google Scholar
• Ivanovsky , G. F. and Petrov , V. I. 1986 . Ion-Plasma Treatment of Materials , Moscow : Radio i Svyaz . (in Russian)
   Google Scholar
• Danilin , B. S. and Kireev , Yu. V. 1987 . Application of Low-Temperature Plasma for Cleaning and Etching of Materials , Moscow : Energoatomizdat . (in Russian)
   Google Scholar
• Wilson , W. , Haggmark , V. and Biersack , J. 1977 . Phys. Rev. , B15 : 2458
   Web of Science ®Google Scholar
• Sigmund , P. 1987 . Nucl. Instrum. and Methods in Phys. Research , B27 : 1
   Web of Science ®Google Scholar
• Roth , J. Proc. Symp. on Sputtering . Edited by: Varga , P. , Betz , G. and Viehböck , F. P. pp. p. 773 Austria
   Google Scholar
• Waldeer , K. T. and Urbassek , H. M. 1987 . Nucl. Instrum. and Methods in Phys. Research , B18 : 518
   Google Scholar
• Pletnev , V. V. 1978 . FTT , 20 : 3379
   Google Scholar
• Pletnev , V. V. and Semenov , D. S. 1982 . Poverkhnost , : 54
   Google Scholar
• Pletnev , V. V. , Semenov , D. S. and Tel'kovsky , V. G. 1983 . Poverkhnost , : 5
   Google Scholar
• Pletnev , V. V. , Semenov , D. S. and Tel'kovsky , V. G. 1984 . Rad. Effects , 83 : 113
   Web of Science ®Google Scholar
• Pletnev , V. V. , Semenov , D. S. and Tel'kovsky , V. G. 1985 . Fizika Plazmy , 11 : 578
   Google Scholar
• Pletnev , V. V. and Semenov , D. S. 1986 . Interaction of Ions and Plasma with a Solid Surface , Edited by: Tel'kovsky , V. G. p. 47 Moscow : Energoatomizdat . (in Russian)
   Google Scholar
• Pletnev , V. V. 1987 . Poverkhnost , : 67
   Google Scholar
• Roth , J. , Bohdansky , J. and Ottenberger , W. 1979 . Data on Low-Energy Light Ion Sputtering. IPP report 9/26 .
   Google Scholar
• Roosendaal , H. E. and Sanders , J. 1980 . Rad. Effects , 52 : 137
   Web of Science ®Google Scholar
• Guseva , M. I. and Martynenko , Yu. V. 1976 . Fizika Plazmy , 2 : 593
   Google Scholar
• Bohdansky , J. , Roth , J. and Bay , H. L. 1980 . J. Appl. Phys. , 51 : 2861
   Web of Science ®Google Scholar
• Matsunami , N. , Yamamura , Y. , Itoh , N. , Tawara , N. and Kawamura , T. 1987 . “ Energy Dependence of Ion-Induced Sputtering Yields of Monoatomic Solids in the Low Energy Region, IPPJ-AM-52 ” . Nagoya , , Japan
   Google Scholar
• Yamamura , Y. , Matsunami , N. and Itoh , N. 1983 . Rad. Effects , 71 : 65
   Web of Science ®Google Scholar
• Lindhard , J. and Scharff , M. 1961 . Phys. Rev. , 124 : 128
   Web of Science ®Google Scholar
• Lindhard , J. , Scharff , M. and Schiott , H. E. 1963 . Mat.-Fys. Medd. Danske Vid. Selsk. , 33 ( No. 14 )
   Google Scholar
• Lindhard , J. , Nielsen , V. and Scharff , M. 1969 . Mat.-Fys. Medd. Danske Vid. Selsk. , 36 ( No. 1 )
   Google Scholar
• Matsunami , N. , Yamamura , Y. , Itikawa , Y. , Itoh , N. , Kazumata , Y. , Miyagawa , S. , Morita , K. , Shimizu , R. and Tawara , H. 1984 . Atomic Data and Nuclear Data Tables , 31 : 1
   Web of Science ®Google Scholar
• Yudin , V. V. 1972 . DAN SSSR , 207 : 325
   Google Scholar
• Yudin , V. V. 1973 . DAN SSSR , 213 : 74
   Google Scholar
• Yudin , V. V. 1974 . Elektronnaya Tekhnika, Ser. 2, Poluprovodnikovyi Pribory, Vyp. , 2 ( 84 ) : 3
   Google Scholar
• Yudin , V. V. 1978 . Appl. Phys. , 15 : 223
   Google Scholar
• Yudin , V. V. 1984 . Elektronnaya Tekhnika, Ser. 2, Poluprovodnikovyi Pribory, Vyp. , 6 ( 172 ) : 3
   Google Scholar
• Yudin , V. V. 1985 . Elektronnaya Tekhnika, Ser. 2, Poluprovodnikovyi Pribory, Vyp. , 4 ( 177 ) : 15
   Google Scholar
• Yudin , V. V. 1988 . Elektronnaya Tekhnika, Ser. 2, Poluprovodnikovyi Pribory, Vyp. , 4 ( 195 ) : 10
   Google Scholar
• Yudin , V. V. 1989 . Elektronnaya Tekhnika, Ser. 2, Poluprovodnikovyi Pribory , : 3
   Google Scholar
• Goldman , D. T. and Simon , A. 1958 . Phys. Rev. , 111 : 383
   Web of Science ®Google Scholar
• Rol , P. K. , Fluit , J. M. and Kistemaker , J. 1960 . Physica , 26 : 1000
   Google Scholar
• Kanaya , K. , Hojou , K. , Koga , K. and Toki , K. 1973 . Japanese Journal of Applied Physics , 12 : 1297
   Web of Science ®Google Scholar
• Auciello , O. , Ibbotson , D. E. and Flamm , D. L. 1987 . Nucl. Instrum. and Methods in Phys. Research , B23 : 419
   Google Scholar
• Robinson , M. T. and Torrens , I. M. 1974 . Phys. Rev. , B9 : 5008
   Web of Science ®Google Scholar
• Biersack , J. P. and Haggmark , L. G. 1980 . Nucl. Instrum. and Methods , 174 : 257
   Web of Science ®Google Scholar
• Biersack , J. P. and Eckstein , W. 1984 . Appl. Phys. , A34 : 73
   Web of Science ®Google Scholar
• Biersack , J. P. 1987 . Nucl. Instrum. and Methods in Phys. Research , B27 : 21
   Web of Science ®Google Scholar
• Ziegler , J. P. , Biersack , J. P. and Littmark , U. 1985 . Stopping Powers and Ranges of Ions in Matter , Edited by: Ziegler , J. F. vol. 1 , New York : Pergamon .
   Google Scholar
• Eckstein , W. and Möller , W. 1985 . Nucl. Instrum. and Methods in Phys. Research , B7/8 : 727
   Web of Science ®Google Scholar
• Takeuchi , W. and Yamamura , Y. 1983 . Rad Effects , 71 : 53
   Web of Science ®Google Scholar
• Yamamura , Y. and Mitzuno , Y. 1985 . “ Low-Energy Sputtering with the Monte-Carlo Program ACAT, IPPJ-AM-40 ” . Nagoya , , Japan
   Google Scholar
• Nikiforov , V. I. , Pavlenko , V. I. , Slabospitsky , R. P. and Khirnov , I. V. 1987 . “ Preprint KhFTI 87–58 ” . In Simulation of Sputtering of Multi-Component Solids by Ion Bombardment: Certification of the Program System PERST , Moskva–TsNII Atominform . (in Russian)
   Google Scholar
• Afanas'ev , V. P. , Manukhin , V. V. and Nueks , D. 1989 . Engineering Problems in Thermonuclear Energetics, No. 154 , p. 32 Moscow : MEI . (in Russian)
   Google Scholar
• Shulga , V. I. 1982 . Poverkhnost , : 38
   Google Scholar
• Shulga , V. I. 1983 . Rad. Effects , 70 : 65
   Web of Science ®Google Scholar
• Robinson , M. T. 1970 . Tables of Classical Scattering Integrals , Oak Ridge . ORNL-4556
   Google Scholar
• Shulga , V. I. and Teplov , S. V. 1988 . Poverkhnost , : 32
   Google Scholar
• Andersen , H. H. 1987 . Nucl. Instrum. and Methods in Phys. Research , B18 : 321
   Google Scholar
• Mashkova , E. S. , Molchanov , V. A. and Flerov , V. B. 1984 . Pis'ma v ZhTF , 10 : 1006
   Google Scholar
• Mashkova , E. S. and Molchanov , V. A. 1987 . Rad. Effects , 102 : 125
   Web of Science ®Google Scholar
• Dodonov , A. I. , Mashkova , E. S. , Molchanov , V. A. and Flerov , V. B. 1986 . Poverkhnost , : 33
   Google Scholar
• Borisov , A. M. , Mashkova , E. S. and Molchanov , V. A. 1986 . Poverkhnost , : 144
   Google Scholar
• Behrisch , R. , Maderlechner , G. , Scherzer , B. M. U. and Robinson , M. T. 1979 . Appl. Phys. , 18 : 391
   Web of Science ®Google Scholar
• Littmark , U. and Fedder , S. 1982 . Nucl. Instrum. and Methods , 194 : 607
   Web of Science ®Google Scholar
• Harrison , D. E. 1983 . Rad. Effects , 70 : 1
   Web of Science ®Google Scholar
• Shulga , V. I. 1984 . Rad. Effects , 82 : 169
   Web of Science ®Google Scholar
• 1985 . ibid. , 85 : 1
   Google Scholar
• Eckstein , W. and Biersack , J. P. 1985 . Appl. Phys. , A37 : 95
   Web of Science ®Google Scholar
• Hou , M. and Eckstein , W. 1986 . Nucl. Instrum. and Methods in Phys. Research , B13 : 324
   Web of Science ®Google Scholar
• Yamamura , Y. , Mizuno , Y. and Kimura , H. 1986 . Nucl. Instrum. and Methods in Phys. Research , B13 : 393
   Google Scholar
• Yamamura , Y. , Mossner , C. and Oechsner , H. 1987 . Rad. Effects , 103 : 25
   Web of Science ®Google Scholar
• Yurasova , V. E. , Chernysh , V. S. , Kuvakin , Yu. M. and Shelyakin , L. B. 1975 . Pis'ma v ZhETF , 21 : 197
   Web of Science ®Google Scholar
• Evdokimov , I. N. 1985 . Rad. Effects , 90 : 259
   Google Scholar
• Georgieva , N. E. and Martynenko , T. P. 1986 . Poverkhnost , : 112
   Google Scholar
• Evdokimov , I. N. and Molchanov , V. A. 1969 . Izv. AN SSSR, Ser. Fiz. , 33 : 763
   Google Scholar
• Thompson , M. W. 1987 . Nucl. Instrum. and Methods in Phys. Research , B18 : 411
   Google Scholar
• Bay , H. L. 1987 . Nucl. Instrum. and Methods in Phys. Research , B18 : 430
   Google Scholar
• Hautala , M. and Whitlow , H. 1985 . Nucl. Instrum. and Methods in Phys. Research , B6 : 466
   Google Scholar
• Kiriakidis , G. , Carter , G. and Whitton , J. L. , eds. 1986 . Erosion and Growth of Solids Stimulated by Atom and Ion Beams , Dordrecht : Martinus Nijhoff Publ. .
   Google Scholar
• Dodonov , A. I. , Krylova , E. A. , Mashkova , E. S. , Smagin , M. N. , Fayazov , I. M. and Fedorovich , S. D. 1987 . “ The Role of the Direct Ejection Mechanism in Sputtering of a Polycrystal at Grazing Angles ” . In Twentieth All-Union Conference on Emission Electronics , Vol. v. 2 , p. 154 Kiev . Abstracts, (in Russian)
   Google Scholar
• Dodonov , A. I. , Krylova , E. A. , Mashkova , E. S. , Molchanov , V. A. and Fedorovich , S. D. Experimental Study of Spacial Distributions of Sputtered Substance with Bombardment of Polycrystals by an Ion Beam . Twentieth All-Union Conference on Emission Electronics . pp. p. 155 Kiev . Abstracts. v. 2, (in Russian)
   Google Scholar
• Ekstein , W. 1987 . Private Communication
   Google Scholar
• Dodonov , A. I. , Krylova , E. A. , Mashkova , E. S. , Molchanov , V. A. , Fayazov , I. M. and Fedorovich , S. D. 1988 . Poverkhnost , : 133
   Google Scholar