640
Views
23
CrossRef citations to date
0
Altmetric
Articles

On machining of hard and brittle materials using rotary tool micro-ultrasonic drilling process

& ORCID Icon
Pages 736-748 | Received 08 Sep 2018, Accepted 12 Feb 2019, Published online: 22 Mar 2019

References

  • Ji, R. J.; Liu, Y. H.; Diao, R. Q.; Zhang, Y. Z.; Wang, F.; Cai, B. P.; Xu, C. C. Experimental Research on Electrical Discharge Machining Characteristics of Engineering Ceramics with Different Electrical Resistivities. Int. J. Adv. Manuf. Technol. 2014, 75(9–12), 1743–1750. DOI: 10.1007/s00170-014-6258-9.
  • Arif, M.; Rahman, M.; Wong, Y. S.; Neha, D. An Experimental Approach to Study the Capability of End-Milling for Microcutting of Glass. Int. J. Adv. Manuf. Technol. 2011, 53(9–12), 1063–1073. DOI: 10.1007/s00170-010-2893-y.
  • Xiao, X.; Zheng, K.; Liao, W. Theoretical Model for Cutting Force in Rotary Ultrasonic Milling of Dental Zirconia Ceramics. Int. J. Adv. Manuf. Technol. 2014, 75(9–12), 1263–1277. DOI: 10.1007/s00170-014-6216-6.
  • Rattan, N.; Mulik, R. S. Experimental Investigations and Multi-Response Optimization of Silicon Dioxide (Quartz) Machining in Magnetic Field Assisted TW-ECSM Process. Silicon. 2017, 9(5), 663–673. DOI: 10.1007/s12633-016-9521-x.
  • Lian, H. S.; Guo, Z. N.; Liu, J. W.; Huang, Z. G.; He, J. F. Experimental Study of Electrophoretically Assisted Micro-Ultrasonic Machining. Int. J. Adv. Manuf. Technol. 2016, 85(9–12), 2115–2124. DOI: 10.1007/s00170-014-6666-x.
  • Subramonian, S.; Kasim, M. S.; Ali, M. A. M.; Abdullah, R. I. R.; Anand, T. J. S. Micro-Drilling of Silicon Wafer by Industrial CO2 Laser. Int. J. Mech. Mater. Eng. 2015, 10(1), 2–6. DOI: 10.1186/s40712-015-0029-8.
  • Lee, Y. H.; Choi, K. J. Analysis of Silicon via Hole Drilling for Wafer Level Chip Stacking by UV Laser. Int. J. Precis. Eng. Manuf. 2010, 11(4), 501–507. DOI: 10.1007/s12541-010-0055-7.
  • Bellouard, Y.; Said, A.; Dugan, M.; Bado, P. Fabrication of High Aspect Ratio Micro-Fluidic Channels and Tunnels Using Femtosecond Laser Pulses and Chemical Etching. Opt. Express. 2004, 12(10), 2120–2129.
  • Ahmed, N.; Darwish, S.; Alahmari, A. M. Laser Ablation and Laser-Hybrid Ablation Processes: A Review. Mater. Manuf. Process. 2016, 31(9), 1121–1142. DOI: 10.1080/10426914.2015.1048359.
  • Gupta, P. K.; Dvivedi, A.; Kumar, P. Effect of Pulse Duration on Quality Characteristics of Blind Hole Drilled in Glass by ECDM. Mater. Manuf. Process. 2016, 31(13), 1740–1748. DOI: 10.1080/10426914.2015.1103857.
  • Singh, T.; Dvivedi, A. On Pressurized Feeding Approach for Effective Control on Working Gap in ECDM. Mater. Manuf. Process. 2018, 33(4), 462–473. DOI: 10.1080/10426914.2017.1339319.
  • Pandey, P. C.; Shan, H. S. Modern Machining Processes; TMH: New Delhi, 1980.
  • Bradford, J. D.; Richardson, D. B. Production Engineering Technology; Macmillan: London, 1980.
  • Kennedy, D. C.; Grieve, R. J. Ultrasonic Machining: A Review. Prod. Eng. 1975, 54(9), 481–486. DOI: 10.1049/tpe.1975.0245.
  • Singh, M. S.; Gill, S. S.; Singh, R.; Sharma, L. Fabrication and Machining of Ceramic Composites: A Review on Current Scenario. Mater. Manuf. Process. 2017, 32(13), 1451–1474. DOI: 10.1080/10426914.2017.1279301.
  • Jain, V. K.;. Advanced Machining Processes; Allied Publishers Pvt. Limited: New Delhi, 2007.
  • Thoe, T. B.; Aspinwall, D. K.; Wise, M. L. H. Review on Ultrasonic Machining. Int. J. Mach. Tools Manuf. 1998, 38(4), 239–255. DOI: 10.1016/S0890-6955(97)00036-9.
  • Hu, X.; Mechanism, Characteristics and Modeling of Micro Ultrasonic Machining, Ph.D. Thesis, University of Nebraska, Lincoln, USA, 2007.
  • Jain, V.; Investigations on Development of Microchannels Using Micro Ultrasonic Machining, Ph.D. Thesis, Indian Institute of Technlogy, Roorkee, India, 2012.
  • Sun, X. Q.; Masuzawa, T.; Micro Ultrasonic, F. M. Machining and Self-Aligned Multilayer Machining/Assembly Technologies for 3D Micromachines. In MEMS’1996, Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems, San Diago, USA, 1996.
  • Egashira, K.; Masuzawa, T. Micro-Ultrasonic Machining by the Application of Workpiece Vibration. CIRP Manuf. Technol. 1999, 48(1), 131–134. DOI: 10.1016/S0007-8506(07)63148-5.
  • Egashira, K.; Taniguchi, T.; Tsuchiya, H.; Miyazaki, M. Micro-Ultrasonic Machining Using Multitools. In ICPMT’04, Proceedings of the 7th International Conference on Progress Machining Technology, Kyoto, Japan, 2004.
  • Jain, V.; Sharma, A. K.; Kumar, P. Microdrilling of Difficult to Cut Materials for MEMS Applications Using Ultrasonic Micromachining. J. Mech. Eng. 2011, 1(2), 24.
  • Nath, C.; Lim, G. C.; Zheng, H. Y. Influence of the Material Removal Mechanisms on Hole Integrity in Ultrasonic Machining of Structural Ceramics. Ultrasonics. 2012, 52(5), 605–613. DOI: 10.1016/j.ultras.2011.12.007.
  • Yu, Z.; Hu, X.; Rajurkar, K. P. Study of Micro Ultrasonic Machining of Silicon. Am. Soc. Mech. Eng. Manuf. Eng. Div. 2005, 1063–1070.
  • Yu, Z.; Hu, X.; Rajurkar, K. P. Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon. CIRP Manuf. Technol.. 2006, 55(1), 201–204. DOI: 10.1016/S0007-8506(07)60398-9.
  • Benedict, G. F.;. Non-Traditional Manufacturing Processes; Marshel Dekker Inc: New York, 1987.
  • Kumar, S.; Dvivedi, A. Experimental Investigation on Drilling of Borosilicate Glass Using Micro-USM with and without Tool Rotation: A Comparative Study. Int. J. Add. Sub. Mater. Manuf. 2017, 1(3–4), 213–222.
  • Kumar, S.; Dvivedi, A. Fabrication of Microchannels Using Rotary Tool Micro-USM: An Experimental Investigation on Tool Wear Reduction and Form Accuracy Improvement. J. Manuf. Process. 2018, 32, 802–815. DOI: 10.1016/j.jmapro.2018.04.008.
  • Kumar, S.; Dvivedi, A. On Effect of Tool Rotation on Performance of Rotary Tool Micro-Ultrasonic Machining. Mater. Manuf. Process. [Online early access]. DOI: 10.1080/10426914.2018.1512130. Published Online: Nov, 13. DOI: . 2018.
  • Ghosh, A.; Mallik, A. K. Manufacturing Science; Affiliated East-West Press Pvt. Limited: New Delhi, 1985.
  • Guzzo, P. L.; Shinohara, A. H.; Raslan, A. A. A Comparative Study on Ultrasonic Machining of Hard and Brittle Materials. J. Braz. Soc. Mech. Sci. Eng. 2004, 26(1), 56–61. DOI: 10.1590/S1678-58782004000100010.
  • Komaraiah, M.; Reddy, P. N. A Study on the Influence of Workpiece Properties in Ultrasonic Machining. Int. J. Mach. Tools Manuf. 1993, 33(3), 495–505. DOI: 10.1016/0890-6955(93)90055-Y.
  • Jadoun, R. S.; Kumar, P.; Mishra, B. K.; Mehta, R. C. S. Optimization of Process Parameters for Ultrasonic Drilling of Advanced Engineering Ceramics Using the Taguchi Approach. Eng. Optim. 2006, 38(1), 771–787. DOI: 10.1080/03052150600733962.
  • Cheema, M. S.; An Ultrasonic Micromachining Approach to Fabricate Microchannels on Glass. PhD Thesis, Indian Institute of Technology, Roorkee, 2015.
  • Zum Gahr, K. H.;. Microstructure and Wear of Materials; 10 Elsevier Science Publishing Company Inc: New York, 1987.
  • Derringer, G.; Suich, R. Simultaneous Optimization of Several Response Variables. J. Qual. Technol. 1980, 12, 214–219. DOI: 10.1080/00224065.1980.11980968.
  • Popli, D.; Gupta, M. Experimental Investigation of Tool Wear and Machining Rate in Rotary Ultrasonic Machining of Nickel Alloy. Mach. Sci. Technol. 2018, 22(3), 427–453. DOI: 10.1080/10910344.2017.1365896.
  • Tamilarasan, A.; Rajamani, D. Multi-Response Optimization of Nd: YAG Laser Cutting Parameters of Ti-6Al-4V Superalloy Sheet. Mach. Sci. Technol. 2017, 31(2), 813–821. DOI: 10.1007/s12206-017-0133-1.
  • Natarajan, U.; Periyanan, P. R.; Yang, S. H. Multiple-Response Optimization for Micro-Endmilling Process Using Response Surface Methodology. Int. J. Adv. Manuf. Technol. 2011, 56(1–4), 177–185. DOI: 10.1007/s00170-011-3156-2.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.