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Materials and Manufacturing Processes Volume 37, 2022 - Issue 12
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Research Article

SACE scanning process assisted with ultrasonic vibration on quartz glass

Yuge Luoa State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, ChinaView further author information
,
Hao Tonga State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China;b Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, ChinaCorrespondence[email protected]
ORCID Iconhttps://orcid.org/0000-0002-9616-9243View further author information
ORCID Icon,
Guodong Liub Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, ChinaORCID Iconhttps://orcid.org/0000-0001-8784-828XView further author information
ORCID Icon,
Tianyi Wuc School of Electrical Engineering, Beijing Jiaotong University, Beijing, ChinaView further author information
&
Yong Lia State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China;b Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, ChinaView further author information
Pages 1474-1482 | Received 29 Aug 2021, Accepted 04 Nov 2021, Published online: 18 Nov 2021

References

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