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Materials and Manufacturing Processes Volume 8, 1993 - Issue 4-5
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Original Articles

PREPARATION, PROPERTIES AND STRUCTURE OF METAL CONTAINING AMORPHOUS HYDROGENATED CARBON FILMS

M. Grischke Fraunhofer-Institut flir Schicht-und Oberflä;chentechnik, Vogt-Kdlln-Str. 30 D-2000, Hamburg, 54, Germany
,
K. Bewilogua Fraunhofer-Institut flir Schicht-und Oberflä;chentechnik, Vogt-Kdlln-Str. 30 D-2000, Hamburg, 54, Germany
&
H. Dimigen Fraunhofer-Institut flir Schicht-und Oberflä;chentechnik, Vogt-Kdlln-Str. 30 D-2000, Hamburg, 54, Germany
Pages 407-417 | Published online: 19 Oct 2007

References

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