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Technical Paper

Emission Characteristics of Volatile Organic Compounds from Semiconductor Manufacturing

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Pages 1029-1036 | Published online: 22 Feb 2012

References

  • Air Pollution Regulation and Emission Standard for Semiconductor Manufacturing Industry; Taiwan Environmental Protection Administration: Taipei, Taiwan, April 2000.
  • U.S. Environmental Protection Agency. Compilation of Air Pollutant Emission Factor, Volume I: Stationary Point and Area Sources, 5th ed.; U.S. Environmental Protection Agency: Research Triangle Park, NC; January 1995.
  • The Emission Inventory: Regional Strategies for the Future, Proceedings of a Specialty Conference; Air & Waste Management Association and U.S. Environmental Protection Agency: Raleigh, NC, October 1999.
  • Handbook for Estimation of Taiwan Air Pollutant Emission; Taiwan Environmental Protection Administration: Taipei, Taiwan, September 2000.
  • Tsai, C-J. Introduction to Air Pollution in High-Tech Industry. Presented at the Workshop on Air Pollution Control and Monitoring in High-Tech Industry, Chinese Association for Aerosol Research in Taiwan, Hsin-chu, Taiwan, September 2000.
  • Air Quality Improvement Project in Hsin-chu Industry Parks Project Report; Bureau of Environmental Protection in Hsin-chu County: Hsin-chu, Taiwan, March 2001.

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