Field Enhancements of Packed-Bed Performance for Low-Concentration Acidic and Basic-Waste Gases from Semiconductor Manufacturing Process

References

• Schifftner, K.C.; Hesketh, H.E. Wet Scrubbers, 2nd ed.; Technomic: Lancaster, PA, 1996.
   Google Scholar
• Cooper, C.D.; Alley, F.C. Air Pollution Control: A Design Approach, 2nd ed.; Waveland: Prospect Heights, IL, 1994, pp 411-439.
   Google Scholar
• Huang, C.C.; Tsai, C.J.; Chein, H.M.; Chen, T.M.; Agarwal, S. Study of Removal Efficiency of Wet Scrubber for Acidic and Basic Aerosols. In Proceedings of the 6th International Aerosol Conference, Taipei, Taiwan, September 8–13, 2002, pp 993-994.
   Google Scholar
• Tsai, C.J.; Chang, C.T.; Liu, T.W.; Huang, C.C.; Chein, C.L.; Chein, H.M;. Emission Characteristics and Control Efficiency of Acidic and Basic Gases and Aerosols From Packed Towers; Atmos. Environ. 2004, 38, 643-646.
   Google Scholar
• U. S. Environmental Protection Agency web site: http://www.epa.gov/ttn/atw/semicon/fr22my03.pdf (accessed on January 2004).
   Google Scholar
• Air Pollution Regulation and Emission Standard for Semiconductor Manufacturing Industry, Taiwan Environmental Protection Administration: Taipei, Taiwan, April 2000.
   Google Scholar
• Liu, Z-S.; Wey, M-Y.; Lin C-L. The Capture of Heavy Metals from Incineration Using a Spray Dryer Integrated with Fabric Filter Using Various Additives. J. Air & Waste Manage. Assoc. 2001, 51, 983-991.
   Google Scholar
• Agranovski, I.E.; Whitcombe, J.M. Case Study on the Practical use of Wettable Filters in the Removal of Submicron Particles; Chem. Eng. Technol. 2001, 24, 513-517.
   Google Scholar
• Chein, T-W.; Chu, H;. Removal of SO2 and No From Flue gas by wet Scrubbing Using an Aqueous NaClO2 Solution; J. Hazardous Materials. 2000, 80, 43-57.
   Google Scholar
• Yang, C-L.; Meier, D. Cleaning Flue gas From Sewage Sludge Incinerators Using an Electrostatic Precipitator and Polystage Chemical Scrubber; J. Air & Waste Manage. Assoc. 1999, 49, 169-176.
   Google Scholar
• Seinfeld, J.H.; Pandis, S.N. Atmospheric Chemistry and Physics, John Wiley & Sons: New York, 1998, pp 353-354.
   Google Scholar
• Pigford, R.L.; Pyle, C. Performance Characteristics of Spray-Type Absorption Equipment; Ind. Eng. Chem. 1951, 43, 1649-1662.
   Google Scholar
• Vaaraslahti, K.; Laitinen, A.; Keskinen, J. Spray Charging of Droplets in a wet Scrubber; J. Air & Waste Manage. Assoc. 2002, 52, 175-180.
   Google Scholar
• Vaaraslahti, K.; Laitinen, A. Natural Charging of Droplets During Spraying in wet Scrubber; J. Aerosol Sci. 1999, 30, S693–S694.
   Google Scholar
• Polat, M.; Polat, H.; Chander, S. Electrostatic Charge on Spray Droplets of Aqueous Surfactant Solutions; J. Aerosol Sci. 2000, 31, 551-562.
   Google Scholar
• Mir, L.; Zahka, J. United States Patent, 4353715, Oct. 12, 1982.
   Google Scholar
• Rose, J.T.; Stockman, J.M. United States Patent, 4741890, May 3, 1988.
   Google Scholar
• Murray, C.M.; Thompson, J.L.; Hentz, L.H. Jr. United States Patent, 5160707, Nov. 3, 1992.
   Google Scholar
• Best A/V Systems Product Manual, HL & CK Engineering: Taipei, Taiwan, 2003.
   Google Scholar
• Chein, H.M.; Aggarwal, S.G.; Wu, H.H. Efficient Control System for low-Concentration Inorganic Gases From Process Vent Stream: Application of Surfactants in Spray and Packed Column; Environ. Sci. Tech. 2004, 38, 5766-5772.
   Google Scholar
• Chein, H.M.; Chen, T.M.; Aggarwal, S.G.; Tsai, C.J.; Huang, C.C. Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes; J. Air & Waste Manage. Assoc. 2004, 54, 218-228.
   Google Scholar
• Tsai, C.J.; Huang, C.H.; Wang, S.H.; Shih, T.S. Design and Testing of a Personal Porous-Metal Denuder; Aerosol Sci. and Tech. 2001, 35, 611-616.
   Google Scholar
• Tsai, C.J.; Perng, S.B.; Chiou, S.F. use of two Different Acidic Aerosol Samplers to Measure Acidic Aerosols in Hsinchu, Taiwan; J. Air & Waste Manage. Assoc. 2000, 50, 2120-2128.
   Google Scholar
• Zarzycki, R.; Chacuk, A. Absorption: Fundamentals and Applications, 1st ed.; Pergamon: England, 1993.
   Google Scholar
• Shulman, H.L.; Degouff, J.J. Jr. Mass Transfer Coefficients and Inter-facial Areas for 1-Inch Raschig Rings; Ind. Eng. Chem. 1952, 44, 1915-1922.
   Google Scholar
• Nicholson, B.C.; Maguire, B.P.; Burslil, D.B. Henry’s Law Constants for the Trihalomethanes: Effects of Water Composition and Temperature; Environ. Sci. Tech. 1984, 18, 518-521.
   Google Scholar
• Perry, R.H.; Green, D.W.; Maloney, J.O. Perry’s Chemical Engineering Handbook, 6th ed.; McGraw-Hill: Japan, 1984.
   Google Scholar
• Llorens, J.; Mans, C.; Costa, J. Discrimination of the Effects of Surfactants in gas Absorption; Chem. Eng. Sci. 1988, 43, 443-450.
   Google Scholar