References
- Compilation of Air Pollutant Emission Factors Volume 1; Stationary Point and Area Sources, Ed. 5, AP-42; U.S. Environmental Protection Agency, Office of Air Quality Planning and Standards: Research Triangle Park, NC, 2003.
- Compilation of Air Pollutant Emission Factors in Stationary Sources; National Institute of Environmental Research, Ministry of Environment: Incheon, Korea, 2003.
- Gartner Dataquest: Gartner Dataquest Market Databook; Gartner Dataquest: Stamford, CT, 2002.
- EIIP. Volume II: Chapter 6 Preferred and Alternative Methods for Estimating Air Emissions from Semiconductor Manufacturing; Point Sources Committee: Morrisville, NC, 1999.
- Standard Testing Method for Air Pollution, Chapter 3; National Institute of Environmental Research, Ministry of Environment: Incheon, Korea, 1999.
- U.S. Environmental Protection Agency. Code of Federal Regulations 40 Part 60 Appendix A; Office of the Federal Register National Archives and Records Administration, U.S. Government Printing Office: Washington, DC, 1995.
- U.S. Environmental Protection Agency. Method 18, Measurement of Gaseous Organic Compound Emissions by Gas Chromatography; U.S. Government Printing Office: Washington, DC, 2000.
- Procedures for Preparing Emission Factor Documents; Office of Air Quality Planning and Standards, Office of Air and Radiation, U.S. Environmental Protection Agency: Research Triangle Park, NC, 1997.
- Study on Atmospheric Emission Inventory Development, and the Estimation of Air Pollutant Emission Factors and Quantity; National Institute of Environmental Research, Ministry of Environment: Incheon, Korea, 2002.
- National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing; 40 CFR Part 63; RIN 2060-AG 93. Fed. Regist. 2003, 68, 99.
- National Emission Standards for Hazardous Air Pollutants (NESHAP) for Source Category: Manufacture of Semiconductors-Background Information for Proposed Standards; U.S. Environmental Protection Agency, Office of Air Quality Planning and Standards: Research Triangle Park, NC, 2001.
- U.S. Environmental Protection Agency. Air Toxics web site; available at http://www.epa.gov/ttn/atw/ (accessed 2003).
- EEA, Atmospheric Emission Inventory Guidebook, 2nd ed.; Index to Methodology Chapters Ordered by Snap 97 Activity; Copenhagen, Denmark, 1999.
- ETC/AE. CORINAIR 1994 Inventory; available at http://www.aeat.co.uk/netcen/corinair/94 (accessed 1998).
- Chein, H.M.; Chen, T.M. Emission Characteristics of Volatile Organic Compounds from Semiconductor Manufacturing; J. Air & Waste Manage. Assoc. 2003, 53, 1029-1036.
- Tasi, C.J.; Chang, C.T.; Liu, T.W.; Huang, C.C.; Chien, C.L.; Chein, H.M. Emission Characteristics and Control Efficiency of Acidic and Basic Gases and Aerosols from Packed Towers; Atmos. Environ. 2003, 38, 643-646.