Low temperature process for strontium bismuth tantalate thin films

J. Celinska Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA

V. Joshi Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA

S. Narayan Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA

L. D. Mcmillan Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA

C. A. Paz De Araujo Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA

References

Shoyama , M. , Tsuzuki , A. , Kato , K. and Murayama , N. 1999 . Integrated Ferroelectrics . 25 : 535
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Narayan , S. , Joshi , V. , McMillan , L. D. and Araujo , C. A. 1999 . Integrated Ferroelectrics . 25 : 509
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Azuma , M. , McMillan , L. , Araujo , C. and Scott , M. United States Patent 5,871, 853 1999 .
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