Harmonic Analysis of Microbeams with PZT On-Chip Actuating and Sensing

JIA ZHOU Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126

MARIO BAUM Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126

RALF SCHMIEDEL Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126

THOMAS GESSNER Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126

YIPING HUANG Fudan University, 220 Handan Rd., Shanghai, China, 200433

GANG RUAN Fudan University, 220 Handan Rd., Shanghai, China, 200433

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Harmonic Analysis of Microbeams with PZT On-Chip Actuating and Sensing

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