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Integrated Ferroelectrics
An International Journal
Volume 63, 2004 - Issue 1
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Original Articles

Evaluation of Residual Stress in Thin Ferroelectric Films Using Grazing Incident X-Ray Diffraction

Peter KR. PETROV Centre for Physical Electronics and Materials, Faculty of Engineering, Science and Technology, South Bank University, 103 Borough Road, London, UK, SE1 0AA
,
KUMARAVINOTHAN SARMA Centre for Physical Electronics and Materials, Faculty of Engineering, Science and Technology, South Bank University, 103 Borough Road, London, UK, SE1 0AA
&
NEIL MCN. ALFORD Centre for Physical Electronics and Materials, Faculty of Engineering, Science and Technology, South Bank University, 103 Borough Road, London, UK, SE1 0AA
Pages 183-189 | Received 01 Aug 2003, Accepted 01 Jan 2004, Published online: 11 Aug 2010

REFERENCES

  • Schimizu , T. 1997 . Solid State Comm. , 102 : 7
  • Jiang , A. Q. 2003 . J. Appl. Phys. , 93 : 2
  • Petrov , P. K. 1998 . J. Appl. Phys. , 84 : 6
  • Swanson , H. and Fuyat . 1954 . Natl. Bur. Stand. (U.S.) , 3 : 44 Circ. 539
  • Wong-Ng , W. 1988 . NBC (USA) . ICDD Grant-in-Aid ,
  • Astafiev , K. F. private correspondence
  • Petrov , P. K. Paper presented on ISIF-15, 2003, will be published in Integrated Ferroelectrics
  • The φ-scan patterns are not presented in this paper. They can be found in [7]

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