Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 64, 2004 - Issue 1
27
Views
1
CrossRef citations to date
0
Altmetric
Original Articles

Enhancement of Ferroelectric Properties of Pb(Zr,Ti)O3 Films Grown by Metal-Organic Chemical Vapor Deposition on Noble-Alloy Bottom Electrodes

, , , , , , , & show all
Pages 157-168 | Received 01 May 2004, Accepted 01 May 2004, Published online: 11 Aug 2010

REFERENCES

  • Sharma , A. K. 1997 . Semiconductor Memories. , p. 387 New York : IEEE .
  • Park , B. H. , Kang , B. S. , Bu , S. D. , Noh , T. W. , Lee , J. and Jo , W. 1999 . Lanthanum-substituted bismuth titanate for use in non-volatile memories . Nature , 401 : 682 – 684 .
  • Shimada , Y. , Nakao , K. , Inoue , A. , Azuma , M. , Uemoto , Y. , Fujii , E. and Otsuki , T. 1997 . Temperature effects on charge retention characteristics of integrated SrBi2(Ta,Nb)2O9 capacitors . Appl. Phys. Lett. , 71 : 2538 – 2540 .
  • Noh , K. H. , Yang , B. , Lee , S. W. , Lee , S. S. , Kang , H. B. and Park , Y. J. 2003 . Issues and Reliability of High-Density FeRAMs . Jpn J. Appl. Phys. , 42 : 2096 – 2099 .
  • Jang , N. W. , Song , Y. J. , Kim , H. H. , Joo , H. J. , Park , J. H. , Kang , H. Y. , Lee , S. Y. and Kim , K. 2003 . Novel common cell via and etch stopper technology for 0.25 μ m 1T1C 32 MBIT FRAM . Integrated Ferroelectrics , 53 : 299 – 305 .
  • Lee , J. K. , Lee , M. S. , Hong , S. , Lee , W. , Lee , Y. K. , Shin , S. and Park , Y. 2002 . Liquid delivery metal-organic chemical vapor deposition of Pb(ZrxTi1 - x)O3 thin films for high-density ferroelectric random access memory application . Jpn J. Appl. Phys. , 41 : 6690 – 6694 .
  • Gilbert , S. R. , Hunter , S. , Ritchey , D. , Chi , C. , Taylor , D. V. , Amano , J. , Aggarwal , S. , Moise , T. S. , Sakoda , T. , Summerfelt , S. R. , Singh , K. K. , Kazemi , C. , Carl , D. and Bierman , B. 2003 . Preparation of Pb(Zr,Ti)O3 thin films by metalorganic chemical vapor deposition for low voltage ferroelectric memory . J. Appl. Phys. , 93 : 1713 – 1717 .
  • Massalski , T. B. , ed. 1992 . Binary Alloy Phase Diagrams. , 2nd Ed. , 2343 – 2344 . Ohio : ASM International .
  • Scott , J. F. 2000 . Ferroelectric Memories. , 209 – 210 . Berlin : Springer-Verlag .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.