REFERENCES
- Muralt , P. 2000 . “Ferroelectric thin films for micro-sensors and actuators: a review,” . J. Micromech. Microeng. , 10 : 136 – 146 .
- 2002 . Piezoelectric Materials and Devices Lausanne
- Miyahara , Y. 1999 . “PZT cantilever for non-contact atomic force microscopy,” . Appl. Surf. Sci. , 140 : 428 – 431 . http://dx.doi.org/10.1016%2FS0169-4332%2898%2900567-4
- Muralt , P. 2000 . “PZT thin films for microsensors and actuators: Where do we stand?” . IEEE Transactions on Ultrasonics Ferroelectrics, and Frequency Control , 47 ( 4 ) : 903 – 915 . http://dx.doi.org/10.1109%2F58.852073
- Elwenspoek , M. and Jansen , H. 1998 . Silicon micromachining Cambridge
- Lang , W. 1996 . “Silicon micromachining technology,” . Materials Science and Engineering , R17 : 1 – 55 .
- Madou , M. 1997 . “Fundamentals of Microfabrication” , Boca Raton : CRC Press .
- Gross , S. J. 2001 . “Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication process,” . Proceedings of the SPIE , 4558 : 72 – 80 .
- Baborowski , J. , Ledermann , N. , Gentil , S. and Muralt , P. 2001 . Micromachining of Piezoelectric MEMS, TRANSDUCERS '01 EUROSENSORS XV . The 11th International Conference on Solid-State Sensors and Actuators . June 10–14 2001 , Munich, Germany. pp. 596 – 600 .
- Muralt , S. J. 2002 . “ Integration of Piezoelectric Pb(ZrxTi1−x)O3 (PZT) thin films into micromachined sensors and acuators ” . In Materials and Process Integration for MEMS , Edited by: Tay , P.F.E.H. pp. 3 – 27 . The Netherlands : Kluwer Academic Publishers .
- Lide , David R. , ed. 1995 . Handbook of Chemistry and Physics, CRC , CRC Press .
- DeVoe , D. L. and Pisano , A. P. 1997 . “ A Fully Surface-Micromachined Piezoelectric Accelerometer ” . In Transducers '97, International Conference on Solid-State Sensors and Actuators Chicago
- Kim , J. H. 1997 . “Fabrication Processof PZT Piezoelectric cantilever unimorphs using surface micromachining,” . Integrated Ferroelectrics , 15 : 325 – 332 .
- Flynn , A. M. 1992 . “Piezoelectric micromotors for microrobots,” . J. Microelectromechanical Sytems , 1 : 44 – 51 . http://dx.doi.org/10.1109%2F84.128055
- Dubois , M.-A. and Muralt , P. 1998 . “PZT Thin Film Actuated Elastic Fin Micromotor,” . IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , 45 ( 5 ) : 1169 – 1177 . http://dx.doi.org/10.1109%2F58.726440
- Racine , G.-A. , Muralt , P. and Dubois , M.-A. 1998 . “Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications,” . Smart Mater. Struct. , 7 : 404 – 416 . http://dx.doi.org/10.1088%2F0964-1726%2F7%2F3%2F015
- Baborowski , J. 1999 . “Fabrication and Characterization of Micromachined Accelerometers based on PZT thin films,” . Ferroelectrics , 224 : 283 – 290 .
- Kunz , K. , Enoksson , P. and Stemme , G. 2001 . “Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors,” . Sensors and Actuators A , 92 : 156 – 160 . http://dx.doi.org/10.1016%2FS0924-4247%2801%2900555-6
- Lee , S. S. and White , R. M. 1998 . “Piezoelectric cantilever acoustic transducer,” . J. Micromech. Microeng. , 8 : 230 – 238 . http://dx.doi.org/10.1088%2F0960-1317%2F8%2F3%2F009
- Schroth , A. 1999 . “Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners,” . Sensors and Actuators A , 73 : 144 – 152 . http://dx.doi.org/10.1016%2FS0924-4247%2898%2900265-9
- Lee , C. , Itoh , T. and Suga , T. 1999 . “Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities,” . Sensors and Actuators A , 72 : 179 – 188 . http://dx.doi.org/10.1016%2FS0924-4247%2898%2900212-X
- Bernstein , J. J. 1997 . “Micromachined high frequency ferroelectric sonar transducers,” . IEEE Tran. UFFC , 44 ( 5 ) : 960 – 969 .
- Baborowski , J. , Ledermann , N. and Muralt , P. 2002 . “ Piezoelectric Micromachined Transducers (pMUT's) based on PZT thin films ” . In Proceedings of IEEE Ultrasonic Symposium Münich, , Germany
- Maeder , T. , Sagalowicz , L. and Muralt , P. 1998 . “Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers,” . Jpn. J. Appl. Phys. , 37 : 2007 – 2012 . http://dx.doi.org/10.1143%2FJJAP.37.2007
- Muralt , P. 1998 . “Texture control of PbTiO3 and Pb(Zr, Ti)O3 thin films with TiO2 seeding,” . J. Appl. Phys. , 83 ( 7 ) : 3835 – 3841 . http://dx.doi.org/10.1063%2F1.366614
- Maeder , T. 1995 . “Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications,” . British Ceram. Proc. , 54 : 206 – 218 .
- Kloeck , B. 1989 . “Study of electrochemical etch-stop for high-precision thickness control of silicon membranes,” . IEEE Transactions on Electron Devices , 36 ( 4 ) : 663 – 669 . http://dx.doi.org/10.1109%2F16.22472
- Fluckiger , P. 2002 . Standard processes at the Center of Microtechnology—EPFL http://microtechnique.epfl.ch/cmi/
- Troiler-McKinstry , S. 1986 . “ Etched piezoelectric structures ” . In In International Symposium of Applied Ferroelectrics , Bethlehem : ISAF .
- Macé , H. , Achard , H. and Peccoud , L. 1995 . “Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma,” . Microelectronic Engineering , 29 : 45 – 48 . http://dx.doi.org/10.1016%2F0167-9317%2895%2900113-1
- Zeto , R. 1999 . “Dry etching of sol-gel PZT,” . Mat. Res. Soc. Symp. Proc. , 546 : 159 – 164 .
- Pan , W. 1994 . “Reactive ion etching of PZT and RuO2 films by environmentally safe gases,” . J. Mater. Res. , 9 ( 11 ) : 2976 – 2980 .
- Chung , C. W. 1998 . “Reactive ion etching of PZT thin films in an inductively coupled plasma,” . J. Vac. Sci. Technol. B , 16 ( 4 ) : 1894 – 1900 . http://dx.doi.org/10.1116%2F1.590104
- Jung , J.-K. and Lee , W.-J. 2001 . “Dry etching of PZT films in CF4 and Cl2/CF4 inductively coupled plasmas,” . Jpn. J. Appl. Phys. , 40 : 1408 – 1419 . http://dx.doi.org/10.1143%2FJJAP.40.1408
- Chung , CheeWon , Byun , YoHan and Kim , HyeIn . 2002 . “Inductively coupled plasma etching of Pb(ZrxTi1-x)O3 thin film in a HBr/Ar plasma,” . Microelectronic Engineering , 63 : 353 – 361 . http://dx.doi.org/10.1016%2FS0167-9317%2802%2900550-6
- Williams , K. 1996 . “ Reactive ion beam etching of ferroelectric materials using a RF inductively coupled ion beam source ” . In IEEE International Symposium on Application of Ferroelectrics (ISAF'96)
- Boukari , F. 1994 . “A very compact electron cyclotron resonance ion source,” . Rev. Sci. Instrum. , 65 ( 4 ) : 1097 – 1099 . http://dx.doi.org/10.1063%2F1.1145075
- Baborowski , J. 2000 . “Mechanisms of Pb(Zr0.53Ti0.47)O3 thin film etching with ECR/RF reactor,” . Integrated Ferroelectrics , 31 : 261 – 271 .
- Lärmer F. , and Schilp A. , Patent US6284148: Method for anisotropic etching of silicon. USA ( 2001 )
- Hynes , A. M. 1999 . “Recent advances in silicon etching for MEMS using the ASETM process,” . Sensors and Actuators A , 74 : 13 – 17 . http://dx.doi.org/10.1016%2FS0924-4247%2898%2900326-4
- Ledermann , N. , Muralt , P. , Baborowski , J. , Gentil , S. , Mukati , K. , Cantoni , M. , Seifert , A. and Setter , N. 2003 . {100} Textured, piezoelectric Pb(Zrx,Ti1-x)O3 thin films for MEMS: integration, deposition and properties . Sensors and Actuators A , 105 : 162 – 170 . http://dx.doi.org/10.1016%2FS0924-4247%2803%2900090-6