REFERENCES
- Radhakrishnan , K. , Tan , C.-L. , Zheng , H.-Q. and Ng , G.-I. 2000 . “Preparation and characterization of rf-sputtered SrTiO/3/ thin films,” . Journal of Vacuum Science and Technology A Vacuum, Surfaces, and-Films , 18 ( 4 ) : 1638 – 1641 .
- Kim , TaeSong , Kim , DongJoo , Lee , JeonKook and Jung , HyungJin . 1995 . “ Low temperature growth of PZT(52/48) thin films using RF magnetron sputtering method, Ferroelectric Thin Films V Symposium ” . In Mater. Res. Soc 243 – 247 . Pittsburgh, PA, , USA
- Lee , K.-M. , Park , K.-S. Nam , S.-D. 2002 . “Novel PZT capacitor technology for 32Mb and beyond FRAM device using PbTiO/3/ seeding layer,” . Integrated Ferroelectrics , 48 : 171 – 180 . http://dx.doi.org/10.1080%2F10584580215435
- Furumura , Y. , Yamazaki , T. Nakamura , M. 1998 . “FRAM technologies compatible with 0.5-um CMOS logics,” . Proceedings of the SPIE The International Society for Optical-Engineering , 3506 : 56 – 64 .
- Defaÿ , E. , André , B. , Baume , F. , Tartavel , G. , Muyard , D. and Ulmer , L. 2003 . “Deposition and characterisation of SrTiO3 thin films deposited by Ion Beam Sputtering on platinized silicon substrates,” . Ferroelectrics , 288 : 121 – 132 . http://dx.doi.org/10.1080%2F00150190390211945
- Zinck , C. , Pinceau , D. , Defaÿ , E. , Delevoye , E. and Barbier , D. 2003 . Fabrication and characterization of membranes actuated by a PZT thin film . Eurosensors ,
- http://www.atceramics.com/products/index.asp
- Baniecki , J.-D. , Shioga , T. and Kurihara , K. 2003 . “ Barium strontium titanate thin film capacitors for low inductance decoupling applications ” . In Ferroelectric Thin Films XI. Symposium Mater. Res. Soc. Symposium Proceedings Mater. Res. Soc. 441 – 450 . Warrendale, PA, , USA