REFERENCES
- Akedo , K. , Fujisaka , H. , Suzuki , M. and Taga , Y. 1998 . “ Highly insulated STO thin films ” . In International Conference on Ion Implantation, IEEE Vol. 2 , 970 – 973 . Piscataway, NJ, , USA
- Radhakrishnan , K. , Tan , C. L. , Zheng , H. Q. and Ng , G. I. 2000 . Preparation and characterisation of R F-sputtered S TO thin films . J. Vac. Sci. Technol. A , 18 ( 4 ) : 1638 – 1641 . http://www.csa.com/htbin/linkabst.cgi?issn=0734-211X&vol=18&iss=4&firstpage=1638 http://dx.doi.org/10.1116%2F1.582398
- Yeh , M. H. , Liu , K.-S. and Lin , I.-N. 1995 . Structure and dielectric properties of STO films prepared by pulsed laser deposition technique . Jpn. J. Appl. Phys. , 34 : 2447 – 2452 . http://dx.doi.org/10.1143%2FJJAP.34.2447
- Kim , N.-K. and Yoon , S.-G. 1997 . Electrical and structural properties of STO thin films deposited by plasma-enhanced metalorganic chemical vapour deposition . J. Mater. Res. , 12 ( 4 ) : 1160 – 1164 . http://www.csa.com/htbin/linkabst.cgi?issn=0884-2914&vol=12&iss=4&firstpage=1160
- Peng , C.-J. , Hu , H. and Krupanidhi , S. B. 1993 . Electrical properties of STO thin films by multi-ion beam reactive sputtering technique . Appl. Phys. Lett. , 63 ( 8 ) : 1039 – 1040 .
- Saito , T. , Cai , X. , Usami , K. , Kobayashi , T. and Goto , T. 1997 . Fabrication of a high-Tc superconducting field effect transistor by ion beam sputtering . IEEE Transactions on Applied Superconductivity , 7 ( 2 ) : 3528 – 3531 . http://dx.doi.org/10.1109%2F77.622155
- Li , H.-C. , Si , W. , West , A. D. and Xi , X. X. 1998 . Thickness dependence of dielectric loss in SrTiO3 thin films . Appl. Phys. Lett. , 73 ( 4 ) : 464 – 466 . http://dx.doi.org/10.1063%2F1.121901
- Natori , K. 1998 . Otani Daijiro, and Sano Nobuyuki, Thickness dependence of the effective dielectric constant in a thin film capacitor . Appl. Phys. Lett. , 73 ( 5 ) : 632 – 634 . http://dx.doi.org/10.1063%2F1.121930