Fabrication of 1K-Bit 1T2C-Type Ferroelectric Memory Cell Array

Shuu'ichirou Yamamoto Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan

Toru Ishikawa R&D Association for Future Electron Devices, 2-9-14 Toranomon, Minato-ku, Tokyo, Japan

Takaaki Fuchikami R&D Association for Future Electron Devices, 2-9-14 Toranomon, Minato-ku, Tokyo, Japan

Hyun-Soo Kim Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan

Kouji Aizawa Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan

Byung-Eun Park R&D Association for Future Electron Devices, 2-9-14 Toranomon, Minato-ku, Tokyo, Japan

Taisuke Furukawa R&D Association for Future Electron Devices, 2-9-14 Toranomon, Minato-ku, Tokyo, Japan

Hiroshi Ohki R&D Association for Future Electron Devices, 2-9-14 Toranomon, Minato-ku, Tokyo, Japan

Shin Kikuchi R&D Association for Future Electron Devices, 2-9-14 Toranomon, Minato-ku, Tokyo, Japan

Hiromasa Hoko R&D Association for Future Electron Devices, 2-9-14 Toranomon, Minato-ku, Tokyo, Japan

Hiroshi Ishiwara Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan

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Yoon , S. M. and Ishiwara , H. 2001 . Memory operations of 1T2C-type ferroelectric memory cell with excellent data retention characteristics . IEEE Tran. Electron Devices , 48 : 2002 – 2008 . http://www.csa.com/htbin/linkabst.cgi?issn=0018-9383&vol=48&iss=&firstpage=2002 http://dx.doi.org/10.1109%2F16.944189
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Kim , H. S. , Yamamoto , S. and Ishiwara , H. 2003 . Operation simulation of an 8F² 1T2C-type ferroelectric memory array with a revised data writing method. To be published in Integr. Ferroelectr
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Fabrication of 1K-Bit 1T2C-Type Ferroelectric Memory Cell Array

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