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Integrated Ferroelectrics
An International Journal
Volume 73, 2005 - Issue 1
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SECTION B: TESTING AND CHARACTERIZATION

IMPRINT RELATED FATIGUE BEHAVIOR OF Pt/SrBi2Ta2O9/Pt CAPACITORS

DAN XIE Institute of Microelectronics, Tsinghua University, Beijing, 100084, Peoples Republic of China
,
ZHIGANG ZHANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, Peoples Republic of China
,
TIANLING REN Institute of Microelectronics, Tsinghua University, Beijing, 100084, Peoples Republic of China
,
CHAOGANG WEI Institute of Microelectronics, Tsinghua University, Beijing, 100084, Peoples Republic of China
&
LITIAN LIU Institute of Microelectronics, Tsinghua University, Beijing, 100084, Peoples Republic of China
Pages 99-106 | Received 17 Apr 2005, Published online: 11 Oct 2011

REFERENCES

  • Paz de Araujo , C. A. , Cuchiaro , J. D. , McMillan , L. D. , Scott , M. C. and Scott , J. F. 1995 . Fatigue-free ferroelectric capacitors with platinum electrodes . Nature , 374 : 627 – 629 . [CSA]
  • Kang , B. S. , Park , B. H. , Bu , S. D. , Kang , S. H. and Noh , T. W. 1999 . Different fatigue behaviors of SrBi2Ta2O9 and Bi3TiTaO9 films: Role of perovskite layers . Appl. Phys. Lett. , 75 : 2644 [CROSSREF] [CSA]
  • Shimada , Y. , Nakao , K. , Inoue , A. , Azuma , M. , Uemoto , Y. , Fujii , E. and Otssuki , T. 1997 . Temperature effects on charge retention characteristics of integrated SrBi2(Ta, Nb)2O9 capacitors . Appl. Phys. Lett. , 71 : 2538 [CROSSREF] [CSA]
  • Dat , R. , Lee , J. K. , Auciello , O. and Kingon , A. I. 1995 . Pulsed laser ablation synthesis and characterization of layered Pt/SrBi2Ta2O9/Pt ferroelectric capacitors with practically no polarization fatigue . Appl. Phys. Lett. , 67 : 572 [CROSSREF] [CSA]
  • Amanuma , K. , Hase , T. and Miyasaka , Y. 1995 . Preparation and ferroelectric properties of SrBi2Ta2O9 thin films . Appl. Phys. Lett. , 66 : 221 [CROSSREF] [CSA]
  • Li , T. , Zhu , Y. , Desu , S. B. , Peng , C. H. and Nagata , M. 1996 . Metalorganic chemical vapor deposition of ferroelectric SrBi2Ta2O9 thin films . Appl. Phys. Lett. , 68 : 616 [CROSSREF] [CSA]
  • Song , T. K. , Lee , J. -K. and Jung , H. J. 1996 . Structural and ferroelectric properties of the c-axis oriented SrBi2Ta2O9 thin films deposited by the radio-frequency magnetron sputtering . Appl. Phys. Lett. , 69 : 3839 [CROSSREF] [CSA]
  • Al-Shareef , H. N. , Dimos , D. , Boyle , T. J. , Warren , W. L. and Tuttle , B. A. 1996 . Qualitative model for the fatigue-free behavior of SrBi2Ta2O9 . Appl. Phys. Lett. , 68 : 690 [CROSSREF] [CSA]
  • Zhang , Z. G. , Liu , J. S. , Wang , Y. N. , Zhu , J. S. , Yan , F. , Chen , X. B. and Shen , H. M. 1998 . Fatigue characteristics of SrBi2Ta2O9 thin films prepared by metalorganic decomposition . Appl. Phys. Lett. , 73 : 788 [CROSSREF] [CSA]
  • Wu , D. , Li , A. , Ling , H. Q. , Yu , T. , Liu , Z. Q. and Ming , N. B. 2000 . Fatigue study of metalorganic-decomposition-derived SrBi2Ta2O9 thin films: The effect of partial switching . Appl. Phys. Lett. , 76 : 2208 [CROSSREF] [CSA]

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