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Integrated Ferroelectrics
An International Journal
Volume 75, 2005 - Issue 1
69
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SECTION E: FeRAM MATERIALS AND DEVICES

PRECURSOR-MONOMER METHOD OF SOL-GEL FOR FABRICATION PT/PZT/PT FERROELECTRIC FILMS

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Pages 199-208 | Received 17 Apr 2005, Published online: 15 Aug 2006

REFERENCES

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  • Fukui , T. and Suzuki , M. 2000 . Crystallization behavior of sol-gel derived films by self-seeding process . Journal of Sol-Gel Science and Technology , 19 : 343 – 347 . [CSA] [CROSSREF]
  • Hu , S. H. , Hu , G. J. , Meng , X. J. , Wang , G. S. , Sun , J. L. and Guo , S. L. 2004 . The grain size effect of the Pb(Zr0.45Ti0.55)O3 thin films deposited on LaNiO3-coated silicon by modified sol-gel process . Journal of Crystal Growth , 260 : 109 – 114 . [CSA] [CROSSREF]
  • Cheng , J. R. and Meng , Z. Y. 2001 . Thickness-dependent microstructures and electrical properties of PZT films derived from sol-gel process . Thin Solid Films , 385 : 5 – 10 . [CSA] [CROSSREF]
  • Meng , X. J. , Cheng , J. G. , Li , B. and Tang , J. 2000 . PZT thin films derived from a modified sol-gel technique based on acetic acid/water system using a new zirconium source . Journal of Materials Science Letters , 19 : 1967 – 1969 . [CSA]
  • Feth , M. P. , Weber , A. and Merkle , R. 2003 . Investigation of the crystallisation behaviour of Lead Titanate (PT), Lead Zirconate (PZ) and Lead Zirconate Titanate (PZT) by EXAFS-Spectroscopy and X-Ray Diffraction . Journal of Sol-Gel Science and Technology , 27 : 193 – 204 . [CSA] [CROSSREF]

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