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Integrated Ferroelectrics
An International Journal
Volume 75, 2005 - Issue 1
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SECTION E: FeRAM MATERIALS AND DEVICES

MOCVD GROWTH OF (Pb,Ba)(Zr,Ti)O3 THIN FILMS FOR MEMORY APPLICATIONS

JOCHEN PUCHALLA IFF/IEM—Institute for Solid State Research/Electronic Materials and CNI—Centre for Nanoelectronic Systems for Information Technology, Research Centre Juelich, D-52425, Juelich, Germany
,
SUSANNE HOFFMANN-EIFERT IFF/IEM—Institute for Solid State Research/Electronic Materials and CNI—Centre for Nanoelectronic Systems for Information Technology, Research Centre Juelich, D-52425, Juelich, Germany
,
LORENA CATTANEO IFF/IEM—Institute for Solid State Research/Electronic Materials and CNI—Centre for Nanoelectronic Systems for Information Technology, Research Centre Juelich, D-52425, Juelich, Germany
,
SERGIO CARELLA IFF/IEM—Institute for Solid State Research/Electronic Materials and CNI—Centre for Nanoelectronic Systems for Information Technology, Research Centre Juelich, D-52425, Juelich, Germany
&
RAINER WASER IFF/IEM—Institute for Solid State Research/Electronic Materials and CNI—Centre for Nanoelectronic Systems for Information Technology, Research Centre Juelich, D-52425, Juelich, Germany
Pages 225-233 | Received 17 Apr 2005, Published online: 15 Aug 2006

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