Influence of Stress on the Performance of PZT Thin Films for Microphone Application

REFERENCES

• Polla, D. L. , and Francis, L. F. , 1998. Processing and characterization of piezoelectric materials and integration into microelectromechanical systems , Annual Review of Materials Science 28 (1998), pp. 563–597.
   Google Scholar
• Whatmore, R. W. , Zhang, Q. , Huang, Z. , and Dorey, R. A. , 2002. Ferroelectric thin and thick films for microsystems , Materials Science in Semiconductor Processing 5 (2002), pp. 65–76.
   Web of Science ®Google Scholar
• Muralt, P. , 2000. Ferroelectric thin films for micro-sensors and actuators: A review , Journal of Micromechanics and Microengineering 10 (2000), pp. 136–146, [CSA].
   Web of Science ®Google Scholar
• Xu, B. M. , Cross, L. E. , and Bernstein, J. J. , 2000. Ferroelectric and antiferroelectric films for micro-electro-mechanical systems applications , Thin Solid Films 377 (2000), pp. 712–718, [CSA].
   Web of Science ®Google Scholar
• Piekarski, B. , Dubey, M. , Zakar, E. , Polcawich, R. , DeVoe, D. , and Wickenden, D. , 2002. Sol-gel PZT for MEMS applications , Integrated Ferroelectrics 42 (2002), pp. 25–37.
   Web of Science ®Google Scholar
• Nagarajan, V. , Roytburd, A. , Stanishevsky, A. , Prasertchoung, S. , Zhao, T. , Chen, L. , Melngailis, J. , Auciello, O. , and Ramesh, R. , 2003. Dynamics of ferroelastic domains in ferroelectric thin films , Nature Materials 2 (2003), pp. 43–47, [PUBMED] [INFOTRIEVE] [CSA].
   PubMed Web of Science ®Google Scholar
• Spierings, G. A. C. M , Dormans, G. J. M. , Moors, W. G. J , Ulenaers, M. J. E. , and Larsen, P. K. , 1995. Stresses in Pt/Pb(Zr,Ti)O3/Pt thin-film stacks for integrated ferroelectric capacitors , Journal of Applied Physics 78 (1995), pp. 1926–1933.
   Web of Science ®Google Scholar
• Schafer, J. D. , Nafe, H. , and Aldinger, F. , 1999. Macro- and microstress analysis in sol-gel derived Pb(ZrxTi1-x)O-3 thin films , Journal of Applied Physics 85 (1999), pp. 8023–8031.
   Web of Science ®Google Scholar
• Zhang, L. L. , Tsaur, J. , and Maeda, R. , 2003. Residual stress study of SiO2/Pt/Pb(Zr,Ti)O-3/Pt multilayer structure for micro electro mechanical system applications , Japanese Journal of Applied Physics 42 (2003), pp. 1386–1390, Part 1[CSA].
   Web of Science ®Google Scholar
• Milton, Ohring , 1992. The Materials Science of Thin Films . Boston: Academic Press; 1992. p. p. 418.
   Google Scholar
• Freund, L. B. , Floro, J. A. , and Chason, E. , 1999. Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations , Applied Physics Letters 74 (1999), pp. 1987–1989.
   Web of Science ®Google Scholar
• Kelman, M. B. , McIntyre, P. C. , Hendrix, C. B. , Bilodeau, M. Steven , and Jeffrey, F. , 2003. Roeder, “Effect of applied mechanical strain on the ferroelectric and dielectric properties of Pb(Zr0.35Ti0.65)O3 thin films , Journal of Applied Physics 93 (2003), pp. 9231–9236.
   Web of Science ®Google Scholar
• Kumazawa, T. , Kumagai, Y. , Miura, H. , Kitano, M. , and Kushida, K. , 1998. Effect of external stress on polarization in ferroelectric thin films , Applied Physics Letters 72 (1998), pp. 608–610.
   Web of Science ®Google Scholar