Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 69, 2005 - Issue 1
172
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Original Articles

Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

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Pages 323-332 | Published online: 03 Sep 2006

REFERENCES

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  • Larson, J. D. , and Oshimyansky, Y. , 2002. Measurement of effective kt 2, Q, Rp, Rs vs. temperature for Mo/AlN FBAR resonators , IEEE Ultrason. Symp. (2002), pp. 939–943, [CSA].
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  • Bradley, P. , Ruby, R. , Larson, J. D. , Oshmyansky, Y. , and Figueredo, D. , 2001. A film bulk acoustic resonator duplexer for USPCS handset applications , IEEE MTT-s Digest (2001), pp. 367–370.
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