FABRICATION AND CHARACTERISTICS OF Pb DOPED BST FERROELECTRIC THIN FILMS FOR UNCOOLED INFRARED FOCAL PLANE ARRAYS

REFERENCES

• Kotecki , D. E. 1997 . A review of high dielectric materials for DRAM capacitors . Integr. Ferroelectr. , 16 : 1 – 20 . [CSA]
   Web of Science ®Google Scholar
• Peng , C. J. and Krupanidhi , S. B. 1995 . Structures and electrical properties of barium strontium titanate thin films grown by multi-ion-beam reactive sputtering technique . J. Mater. Res. , 10 : 708 – 726 . [CSA]
   Web of Science ®Google Scholar
• Hwang , C. S. , Park , S. O. , Cho , H. J. , Kang , C. S. , Kang , H. K. , Lee , S. I. and Lee , M. Y. 1995 . “Deposition of extremely thin (Ba,Sr)TiO3 thin films for ultra-large-scale integrated dynamic random access memory application” . Appl. Phys. Lett. , 67 : 2819 – 2821 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Chen , C. L. , Feng , H. H. , Zhang , Z. , Brazdeikis , A. , Huang , Z. J. , Chu , W. K. , Chu , C. W. , Miranda , F. A. , Van Keuls , F. W. , Romanofsky , R. R. and Liou , Y. 1999 . “Epitaxial ferroelectric Ba0.5Sr0.5TiO3 thin films for room-temperature tunable element applications” . Appl. Phys. Lett. , 75 : 412 – 414 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Chang , W. , Horwitz , J. S. , Carter , A. C. , Pond , J. M. , Kirchoefer , S. W. , Gilmore , C. M. and Chriser , D. B. 1999 . “The effect of annealing on the microwave properties of Ba0.5Sr0.5TiO3 thin films” . Appl. Phys. Lett. , 74 : 1033 – 1035 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Dimos , D. and Mueller , H. C. 1998 . Perovskite thin films for high-frequency capacitor applications . Annu. Rev. Mater. Sci. , 28 : 397 – 419 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Lee , S. J. , Moon , S. E. , Ryu , H. C. , Kwak , M. H. , Kim , Y. T. and Han , S. K. 2003 . “Microwave properties of compositionally graded (Ba, Sr)TiO3 thin films according to the direction of the composition gradient for tunable microwave applications” . Appl. Phys. Lett. , 82 : 2133 – 2135 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Hanson , C. M. , Beratan , H. R. , Owen , R. A. , Corbin , M. and McKenney , S. 1992 . “Uncooled thermal imaging at Texas Instruments” . Proceedings of the SPIE 1735 . July 23–24 1992 , San Diego, CA, USA. Opt. Eng. Infrared Detectors: State of the Art , pp. 17 – 26 .
   Google Scholar
• Liddiard , K. C. , Ringh , U. and Jansson , C. 1996 . “Status of uncooled focal plane detector arrays for smart IR sensors” . Proceedings of the SPIE 2746 . April 10–11 1996 , Orlando, FL, USA. Infrared Detectors and Focal Plane Arrays IV , pp. 72 – 79 .
   Google Scholar
• Kikkawa , T. , Fujiwara , N. , Yamada , H. , Miyazaki , S. , Nishiyama , F. and Hirose , M. 2002 . “Energy band structure of Ru/(Ba,Sr)TiO3/Si capacitor deposited by inductively-coupled plasma-assisted radio-frequency-magnetron plasma sputtering” . Appl. Phys. Lett. , 81 : 2821 – 2823 . [CROSSREF] [CSA]
   Google Scholar
• Saha , S. , Kaufman , D. Y. , Streiffer , S. K. and Auciello , O. 2003 . “Anomalous leakage current characteristics of Pt/(Ba0.75,Sr0.25)Ti1+y O3+z /Pt thin films grown by metalorganic chemical vapor deposition” . Appl. Phys. Lett. , 83 : 1414 – 1416 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Srivastava , A. , Craciun , V. , Howard , J. M. and Singh , R. K. 1999 . “Enhanced electrical properties of Ba0.5Sr0.5TiO3 thin films grown by ultraviolet-assisted pulsed-laser deposition” . Appl. Phys. Lett. , 75 : 3002 – 3004 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Fornasiero , P. , Monte , R. D. , Rao , G. R. , Kaspar , J. , Meriani , S. , Trovarelli , A. and Graziani , M. 1995 . “Rh-Loaded CeO2-ZrO2 Solid-Solutions as Highly Efficient Oxygen Exchangers: Dependence of the Reduction Behavior and the Oxygen Storage Capacity on the Structural-Properties” . J. Catal. , 151 : 168 – 177 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Yi , G. and Sayer , M. 1991 . Sol-gel processing of complex oxide films . Ceramic Bulletin , 70 : 1173 – 1179 . [CSA]
   Web of Science ®Google Scholar
• Tillotson , T. M. and Hrubesh , L. W. 1992 . Transparent ultralow-density silica aerogels prepared by a two-step sol-gel process . J. Non-Cryst. Solids , 145 : 44 – 50 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Matsuura , K. , Masaaki , N. , Tetsuro , T. , Koichiro , H. and Seigen , O. 1996 . “PZT capacitor with Ir/IrO2/Ir electrode fabricated by RTA” . Integr. Ferroelectr. , 12 : 139 – 149 . [CSA]
   Web of Science ®Google Scholar
• Liu , M. D. , Wang , P. Y. and Zeng , Y. K. 1994 . “Structure and properties of sol-gel processed (Pb,La)TiO3 ferroelectric thin films” . Integr. Ferroeletr. , 5 : 303 – 310 . [CSA]
   Google Scholar
• Jiang , S. L. , Zhang , H. B. , Lin , R. Z. and Liu , M. D. 2005 . Electrical properties of BST thin films fabricated by a modified Sol-Gel processingIntegr . Ferroelectr. , 70 : 1 – 9 . [CSA]
   Google Scholar
• Weston , U. N. , Webster , A. H. and McNamara , V. M. 1969 . Lead zirconate-lead titanate piezoelectric ceramics with iron oxide additions . J. Am. Ceram. Soc. , 52 : 253 – 257 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Itoh , T. , Tashiro , S. and Igarashi , H. 1993 . “Fabrication of multilayer barrier layer capacitors with semiconducting (Ba, Sr)TiO3ceramics” . Jpn. J. Appl. Phys. , 32 : 4261 – 4264 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Cole , M. W. , Joshi , P. C. , Ervin , M. H. , Wood , M. C. and Pfeffer , R. L. 2000 . “Influence of Mg doping on the materials properties of Ba1-xSrxTiO3 thin films for tunable device applications” . Thin Slid Films , 374 : 34 – 41 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Shen , M. R. , Ge , S. B. and Cao , W. W. 2001 . Dielectric enhancement and Maxwell-Wagner effects in polycrystalline ferroelectric multilayered thin films . J. Phys. D: Appl. Phys. , 34 : 2935 – 2938 . [CROSSREF] [CSA]
   Web of Science ®Google Scholar
• Hoffer , C. , Ellerkamnn , U. , Halder , S. , Meyer , R. and Waser , R. 2004 . “Scaling effect on the dielectric constant in Ba(TixZr1-x)O3 thin films” . J. Electroceram. , 13 : 101 – 104 . [CROSSREF] [CSA]
   Google Scholar
• Gao , Y. , Perkins , C. L. , He , S. , Alluri , P. , Tran , T. , Thevuthasan , S. and Henderson , M. A. 2000 . “Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films” . J. Appl. Phys. , 87 : 7430 – 7437 . [CROSSREF] [CSA]
   Google Scholar
• Tahan , D. M. , Safari , A. and Klein , L. C. 1996 . “Preparation and characterization of BaxSr1-xTiO3 thin films by a sol-gel technique” . J. Am. Ceram. Soc. , 7 : 1593 – 1598 . [CROSSREF] [CSA]
   Google Scholar