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Integrated Ferroelectrics
An International Journal
Volume 88, 2007 - Issue 1
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SECTION I: MEMS, PYROELECTRIC/IR, OPTOELECTRONIC MATERIALS: THIN-FILM PROCESSING

SOL-GEL FABRICATION OF PZT THICK FILMS FOR MEMS

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Pages 93-102 | Received 31 May 2006, Published online: 12 Oct 2011

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