RF MAGNETRON SPUTTERING CONDITION DEPENDENCES OF DIELECTRIC NON-LINEARITY OF Ba_0.6Sr_0.4TiO₃ THIN FILMS

REFERENCES

• Cho , H. J. , Kang , C. S. Hwang , C. S. 1997 . “Structural and electrical properties of Ba0.5Sr0.5TiO3thin films on Ir and IrO2 electrodes,” . Jpn. J. Appl. Phys. , 36 ( 7A ) : 874 – 876 .
   Web of Science ®Google Scholar
• Kawakubo , T. , Komatsu , S. Abe , K. 1998 . “Ferroelectric properties of SrRuO3 /(Ba, Sr)TiO3/SrRuO3 epitaxial capacitor,” . Jpn. J. Appl. Phys. , 37 ( 9B ) : 5108 – 5111 .
   Web of Science ®Google Scholar
• Zhu , H. , Noda , M. Mukaigawa , T. 2000 . “Application of ferroelectric BST thin film prepared by MOD for uncooled infrared sensor of dielectric bolometer mode,” . T. IEE Japan , 120-E ( 12 ) : 554 – 558 .
   Google Scholar
• Chen , C. L. , Shen , J. Chen , S. Y. 2001 . “Epitaxial growth of dielectric Ba0.6Sr0.4TiO3 thin film on MgO for room temperature microwave phase shifters,” . Appl. Phys. Lett. , 78 ( 5 ) : 652 – 654 .
   Web of Science ®Google Scholar
• Romanofsky , R. R. , Vankeuls , F. W. Warner , J. D. 2000 . “Analysis and optimization of thin film ferroelectric phase shifters,” . Mat. Res. Soc. Symp. Proc. , 603 : 3 – 14 .
   Google Scholar
• Carlson , C. M. , Rivkin , T. V. Parilla , P. A. 2000 . “Large dielectric constant Ba0.4Sr0. 6TiO3 thin films for high-performance microwave phase shifters,” . Appl. Phys. Lett. , 76 ( 14 ) : 1920 – 1922 .
   Web of Science ®Google Scholar
• Zhu , W. , Tan , O. K. Ding , J. 2000 . “Preparation, property, and mechanism studies of amorphous ferroelectric (Ba, Sr)TiO3 thin films for novel metal-ferroelectric-metal type hydrogen gas sensors,” . J. Mater. Res. , 15 ( 6 ) : 1291 – 1302 .
   Web of Science ®Google Scholar
• Tan , O. K. , Chen , X. F. and Zhu , W. G. 1999 . “Ferroelectric (Ba, Sr)TiO3 thin films for H2 gas detection by sol-gel and RF sputtering,” . Ferroelectrics , 225 : 295 – 302 .
   Web of Science ®Google Scholar
• Fu , C. L. , Chen , H. W. Huang , C. G. 2002 . “Ba(Mg1/3Ta2/3)O3 substrate for BaxSr1 − x TiO3 thin film used for phase shifter,” . Proceedings of SPIE , 4936 : 260 – 269 .
   Google Scholar
• Chen , X. F. , Zhu , W. G. and Tan , O. K. 2000 . “Microstructure, dielectric properties and hydrogen gas sensitivity of sputtered amorphous Ba0.67Sr0.33TiO3 thin films,” . Mat. Sci. Eng. , 77 : 177 – 184 .
   Google Scholar
• Chen , H. W. , Yang , C. R. Fu , C. L. 2006 . “Effects of substrate temperature and target-substrate distance on the dielectric non-linearity of Ba0.6Sr0.4TiO3 Thin Film,” . Integrated Ferroelectrics , 82 : 101 – 108 .
   Web of Science ®Google Scholar
• Ding , Y. P. , Jin , C. Y. Cheng , J. R. “The electrical properties of Ba1 − x SrxTiO3 film prepared by a sol-gel method,” . Proceedings of the first China international conference on high-performance ceramics October . pp. 489 – 493 .
   Google Scholar
• Takeshima , Y. , Tanaka , K. and Sakable , Y. 2000 . “Thickness dependence of characteristics for (Ba, Sr)TiO3 thin films prepared by metalorganic chemical vapor deposition,” . Jpn. J. Appl. Phys. , 39 ( 9B ) : 5389 – 5392 .
   Web of Science ®Google Scholar
• Saha , S. , Kanfman , D. Y. Streiffer , S. K. 2003 . “Anomalous leakage current characteristics of Pt/(Ba0.75Sr0.25)Ti1 + y O3 + z /Pt thin films grown by metalorganic chemical vapor deposition,” . Appl. Phys. Lett. , 83 ( 7 ) : 1414 – 1416 .
   Web of Science ®Google Scholar
• Jain , M. , Majumder , S. B. Katiyar , R. S. 2003 . “Improvement in electrical characteristics of graded manganese doped barium strontium titanate thin films,” . Appl. Phys. Lett. , 82 ( 12 ) : 1911 – 1913 .
   Web of Science ®Google Scholar
• Chen , H. W. , Yang , C. R. Fu , C. L. 2006 . “The size effect of Ba0.6Sr0.4TiO3 thin films on the ferroelectric properties,” . Appl. Surf. Sci. , 252 ( 12 ) : 4171 – 4177 .
   Web of Science ®Google Scholar
• Briggs , D. and Seah , M. P. 1983 . Practical Surface Analysis , 511 – 514 . New York : John Wiley & Son . 182
   Google Scholar
• Joon , L ee , Choi , Young-Chul and Lee , Byung-Soo . 1997 . “Effects of O2/Ar ratio and annealing on the properties of (Ba, Sr)TiO3 films prepared by RF magnetron sputtering,” . Jpn. J. Appl. Phys. , 36 ( 6A ) : 3644 – 3648 .
   Web of Science ®Google Scholar