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Integrated Ferroelectrics
An International Journal
Volume 94, 2007 - Issue 1
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Original Articles

GROWTH TEMPERATURE DEPENDENCE OF Ga2O3 THIN FILMS DEPOSITED BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION

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Pages 11-20 | Received 15 Jun 2007, Accepted 30 Sep 2007, Published online: 20 Sep 2010

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