EFFECTS OF RAPID THERMAL ANNEALING ON MICROSTRUCTURES AND PROPERTIES OF PZT-PT/TI STACKS FOR MEMS APPLICATION

REFERENCES

• Lyshevski , S. D. 2001 . Nano- and Microelectromechanical Systems , Boca Raton : CRC Press .
   Google Scholar
• Devoe , D. L. and Pisano , A. P. 2001 . Surface micromachined piezoelectric accelerometers (PiXLs) . Journal of Microelectromechanical Systems , 10 : 180 – 186 .
   Web of Science ®Google Scholar
• Kobayashi , T. , Tsaur , J. and Maeda , R. 2005 . Fabrication of optical micro scanner driven by PZT actuators . Jpn J. App. L. Phys. , 44 : 7078 – 7082 .
   Web of Science ®Google Scholar
• Kim , S. T. , Kim , C. Y. , Park , K. H. , Kim , K. Y. , Lee , J. S. , Jeong , Y. W. and Kwon , H. J. 1995 . “Study on microstructures and interdiffusion behaviour in Pt/Ti/SiO2/Si and Pb(Zr,Ti)O3/Pt/Ti/SiO2/Si multilayer systems,” . Jpn. J. Appl. Phys. , 34 : 4945 – 4949 .
   Web of Science ®Google Scholar
• Millon , C. , Malhaire , C. , Dubois , C. and Barbier , D. 2003 . Control of the Ti diffusion in Pt/Ti bottom electrodes for the fabrication of PZT thin film transducers . Materials Science in Semiconductor Processing , 5 : 243 – 247 .
   Web of Science ®Google Scholar
• Lu , J. , Kobayashi , T. , Zhang , Y. , Maeda , R. and Mihara , T. 2006 . Wafer scale lead zirconate titanate film preparation by sol-gel method using stress balance layer . Thin Solid Films , 515 : 1506 – 1510 .
   Web of Science ®Google Scholar
• Morita , T. , Kurosawa , M. K. and Higuchi , T. 2000 . A cylindrical micro-ultrasonic motor (stator transducer size. 1.4 mm in diameter and 5.0 mm long) . Ultrasonics , 38 : 33 – 36 .
   PubMed Web of Science ®Google Scholar
• Lu , J. , Ikehara , T. , Zhang , Y. , Maeda , R. and Mihara , T. 2006 . Energy dissipation mechanisms in lead zirconate titanate thin film transduced micro cantilevers . Jpn. J. Appl. Phys. , 45 : 8795 – 8800 .
   Web of Science ®Google Scholar
• Lu , J. , Ikehara , T. , Kobayashi , T. , Maeda , R. and Mihara , T. 2007 . Quality Factor of Micro Cantilevers Transduced by Piezoelectric Lead Zirconate Titanate Film . Microsystem Technologies , 13 : 1517 – 1522 .
   Web of Science ®Google Scholar
• Kwok , C. K. and Desu , S. B. 1994 . Formation kinetics of PZT thin films . Journal of Material Research , 29 : 1728 – 1733 .
   Google Scholar
• Shim , D. , Park , J. , Nam , K. and Park , G. 2005 . “Effects of heat-treatment conditions on electrical properties of sol-gel-derived ferroelectric Pb(Zr,Ti)O3 thin films,” . Journal of the Korean Physical Society , 47 : S364 – S367 .
   Web of Science ®Google Scholar
• Kobayashi , T. , Ichiki , M. , Tsaur , J. and Maeda , R. 2005 . Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition . Thin Solid Films , 489 : 74 – 78 .
   Web of Science ®Google Scholar
• Kim , S. T. , Kim , H. H. , Lee , M. Y. and Lee , W. J. 1997 . “Investigation of Pt/Ti bottom electrodes for Pb(Zr,Ti)O3 films,” . Jpn J. Appl. Phys. , 36 : 294 – 300 .
   Web of Science ®Google Scholar
• Sreenivas , K. , Reaney , I. , Maeder , T. and Setter , N. 1994 . Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integration . J. Appl. Phys. , 75 : 232 – 239 .
   Web of Science ®Google Scholar
• Maeder , T. , Sagalowicz , L. and Muralt , R. 1998 . Stablized platinum electrodes for ferroelectric film deposition using Ti,Ta and Zr adhension layers . Jpn J. Appl. Phys. , 37 : 2007 – 2012 .
   Web of Science ®Google Scholar
• Klissurska , R. D. , Maeder , T. , Brooks , K. G. and Setter , N. 1995 . Microstructure of PZT sol-gel films on Pt substrates with different adhesion layers . Microelectronic Engineering , 29 : 297 – 300 .
   Web of Science ®Google Scholar
• Zheng , K. , Lu , J. and Chu , J. 2004 . “A novel wet-etching process of Pb(Zr,Ti)O3 thin films for applications in microelectromechanical system,” . Jpn J. Appl. Phys. , 43 : 3934 – 3937 .
   Web of Science ®Google Scholar
• Song , Z. , Chong , N. , Chan , L. H. W. , Choy , C. and Lin , C. 2002 . Thermal stability of electrode stacks for application in oxide film devices . Thin Solid Films , 406 : 268 – 274 .
   Web of Science ®Google Scholar
• Lee , H. S. , Um , W. S. , Hwang , K. T. , Shin , H. G. , Kim , Y. B. and Auh , K. H. 1999 . “Ferroelectric properties of Pb(Zr, Ti)O3 thin films deposited on annealed IrO2 and Ir bottom electrodes,” . J. Vac. Sci. Technol A, , 17 : 2939 – 2943 .
   Web of Science ®Google Scholar
• Mardare , A. I. , Mardare , C. C. , Pinheiro , E. and Joanni , E. 2004 . Bottom electrode crystallization of PZT thin films deposited by laser ablation . Jpn J. Appl. Phys. , 43 : 1527 – 1531 .
   Web of Science ®Google Scholar