TWO STEP REACTIVE MAGNETRON SPUTTERING OF BLT THIN FILMS

REFERENCES

• Greer , J. A. and Tabat , M. D. 1995 . J. Vac. Sci. Technol. , A 13 ( 3 ) : 1175
   Web of Science ®Google Scholar
• Pryds , N. , Schou , J. and Linderoth , S. 2007 . App. Surf. Sci. , 253 : 8231
   Web of Science ®Google Scholar
• Schwan , C. , Haibach , P. , Jakob , G. , Martinez , J. C. and Adrian , H. 1999 . J. Appl. Phys. , 86 : 960
   Web of Science ®Google Scholar
• Huang , C.-L. and Hsu , C.-H. 2004 . J. Appl. Phys. , 96 : 1186
   Web of Science ®Google Scholar
• Huang , A. P. and Chu , P. K. 2005 . J. Appl. Phys. , 97 : 114106
   Google Scholar
• Reymond , V. , Michau , D. , Payan , S. and Maglione , M. 2004 . Ceram. Inter. , 30 : 1085
   Web of Science ®Google Scholar
• Delage , T. , Champeaux , C. , Catherinot , A. , Seaux , J. F. , Madrangeas , V. and Cros , D. 2004 . Thin Solid Films , 453–454 : 279
   Web of Science ®Google Scholar
• Chii-Ming , Wu and Wu , Tai-Bor . 1997 . Materials Letters , 33 : 97
   Web of Science ®Google Scholar
• Cukauskas , E. J. , Kirchoefer , S. W. and Chang , W. 2002 . Jour. of Crystal Growth , 236 : 239
   Web of Science ®Google Scholar
• Cherng , J. S. , Lin , C. M. and Chen , T. Y. Proc. E-MRS 2007-Symposium Q.
   Google Scholar
• Horiuchi , S. , Matsumoto , K. , Sakahi , M. , Ooki , T. , Nakamura , H. , Adachi , K. and Shinohara , M. 2006 . CS Mantech Conf. April 24–27 2006 , Vancouver, British Columbia , Canada.
   Google Scholar
• Duamming , Z. , Yunyi , W. , Bin , Y. , Chaodan , Z. and Jia , L. 2007 . Proc. Intern. Symp. Integrated Ferroelctrics (ISIF 2007) . May 8–11 2007 , Bordeaux , France.
   Google Scholar
• Li , X.-A. , Liu , Z.-L. , Yuan , Z.-B. , Zuo , A.-Y. , Yang , J.-P. and Yao , K.-L. 2007 . Proc. Intern. Symp. Integrated Ferroelctrics (ISIF 2007) . May 8–11 2007 , Bordeaux , France.
   Google Scholar
• Besland , M. P. , Djani-Ait Aissa , H. , Barroy , P. R. J. , Lafane , S. , Tessier , P. Y. , Angleraud , B. , Richard-Plouet , M. , Brohan , L. and Djouadi , M. A. 2006 . Thin Solid Films , 495 : 86
   Web of Science ®Google Scholar
• Richard-Plouet , M. , Besland , M.-P. , Barroy , P. , Djouadi , M. A. , Tessier , P.-Y. , Brohan , L. , Borderon , C. , Averty , D. and Estournes , C. 2006 . Proc. Intern. Symp. Materials . November 13–17 2006 , Dijon , France.
   Google Scholar
• Elissalde , C. , Maglione , M. and Estournes , C. 2007 . J. Am. Ceram. Soc. , 90 ( 3 ) : 973
   Web of Science ®Google Scholar
• Ni , M. , Leung , M. K. H. , Leungand , D. Y. C. and Sumathy , K. 2007 . Renew. Sustain. Energy , 11 : 401
   Web of Science ®Google Scholar