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Integrated Ferroelectrics
An International Journal
Volume 95, 2007 - Issue 1
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SESSION F: MEMS, NEMS, PURPELECTRIC/IR, OPTOELECTRONIC MATERIALS

PYROELECTRIC LiTaO3 THIN FILMS ELABORATED BY RF MAGNETRON SPUTTERING WITH LI ENRICHED TARGET

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Pages 44-53 | Received 15 Jun 2007, Accepted 30 Sep 2007, Published online: 20 Sep 2010

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