INFLUENCE OF DEPOSITION TEMPERATURE AND N₂ FLOW RATE ON HIGH QUALITY ZNO THIN FILM DEPOSITED ON SiO₂/SI SUBSTRATE BY ULTRASONIC SPRAY PYROLYSIS

REFERENCES

• Minamai , T. , Yamamoto , T. and Miyta , T. 2000 . Thin Solid Films , 366 : 63
   Web of Science ®Google Scholar
• Sun , X. W. and Kwok , H. S. 1999 . J. Appl. Phys. , 86 : 408
   Web of Science ®Google Scholar
• Joseph , M. , Tabata , H. and Kawai , T. 1999 . J. Appl. Phys. , 73 : 2534
   Google Scholar
• Natsume , Y. , Sakata , H. , Hirayama , T. and Yanigida , H. 1992 . J. Appl. Phys. , 72 : 4203 A. Yamada, B. Sang, and M. Konagai, Appl. Surf. Sci., 1997, 112, 216
   Web of Science ®Google Scholar
• Paraguay , F. D. , estrada , W. L. Acosta , D. R. 1999 . Thin Solid Films , 350 : 192
   Web of Science ®Google Scholar
• Guha , S. and Bojarczuk , N. A. 1998 . Appl. Phys. Lett. , 73 : 1487
   Web of Science ®Google Scholar
• yong ma , Tae . 2000 . “Soo chullee,” . Journal of Materials Science , 11 : 305
   Google Scholar
• Gyani , A. K. , Khan , O. F. Z. , O'Brien , P. and Urch , D. S. 1989 . Thin Solid Films , 182 : L1
   Web of Science ®Google Scholar
• Khan , O. F. Z. and O'Brien , P. 1989 . Thin Solid Films , 173 : 95
   Web of Science ®Google Scholar
• de la L. Olvera , M. , Maldonado , A. , Asomaza , R. Solorza , O. 2001 . Thin Solid Films , 394 : 242
   Web of Science ®Google Scholar
• Zhao , J. L. , Li , X. M. Bian , J. M. 2005 . Journal of Inorganic Materials , 20 : 959
   Web of Science ®Google Scholar
• van Heerden , J. L. and Swanepoel , R. 1997 . Thin Solid Films , 299 : 72
   Web of Science ®Google Scholar
• Joseph , B. , Gopchandran , K. G. Thomas , P. V. 1999 . Materials Chemistry and Physics , 58 : 71
   Web of Science ®Google Scholar