Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 97, 2008 - Issue 1
80
Views
2
CrossRef citations to date
0
Altmetric
SESSION D2: HIGH-K DIELECTRICS AND ELECTRODES

EFFECT OF THE OXYGEN ADDITION IN THE SPUTTERING GAS ON THE DIELECTRIC PROPERTIES OF a-BaTiO3 FILMS

, , &
Pages 121-128 | Received 15 Jun 2007, Accepted 15 Dec 2007, Published online: 20 Sep 2010

REFERENCES

  • Lines , M. E. and Glass , M. 1977 . Principles and Applications of Ferroelectrics and related materials , Oxford : Clarendon Press .
  • Klee , M. , Mckens , U. , Kiewitt , R. , Greuel , G. and Metzmacher , C. 1998 . Ferroelectric thin films for integrated passive components . Philips J. Res. , 51 : 363 – 387 .
  • Pratt , I. H. and Firestone , S. 1970 . Fabrication of rf-sputtered barium titanate thin films . J. Vac. Sci. Technol. , 8 : 256 – 260 .
  • Jia , Q. X. , Chang , L. H. , Ho , K. K. and Anderson , W. A. 1995 . Nanolayer BaTiO3 thin film capacitors using magnetron sputtering . Ferroelectrics , 166 : 111 – 117 .
  • El Kamel , F. , Gonon , P. , Yangui , B. and Jomni , F. 2007 . lonic and electronic defects in a-BaTiO3 thin films studied by transient and steady state conductivity measurements . Phys. Stat. Sol. (c) , 4 ( 3 ) : 1242 – 1245 .
  • Huang , S.-C. , Chen , H.-M. , Wu , S.-C. and Lee , J. Y.-M. 1998 . Time dependent dielectric breakdown of paraelectric barium-strontium-titanate thin film capacitors for memory device applications . J. Appl. Phys , 84 : 5155 – 5157 .
  • Craven , M. R. , Cranton , W. M. , toal , S. and Reedhal , H. S. 1998 . Characterization of BaTiO3 thin films deposited by RF magnetron sputtering for use in a.c. TFEL devices . Semicon. Sc. Technol , 13 ( 4 ) : 404 – 409 .
  • Kamel , El F. , Gonon , P. , Jomni , F. and Yangui , B. 2007 . Dielectric properties of amorphous BaTiO3 films deposited by RF magnetron sputtering . Journal of the European Ceramic Society , 27 : 3807 – 3809 .
  • Yamada , H. and Miller , G. R. 1973 . Point defects in reduced strontium titanate . J. Solid State Chem , 6 ( 1 ) : 169 – 177 .
  • Kamel , El F. , Gonon , P. , Jomni , F. and Yangui , B. 2006 . Thermally Stimulated Currents in amorphous barium titanate thin films deposited by RF magnetron sputtering . J. Appl. Phys , 100 : 054107
  • Shye , D. C. , Chiou , B. S. , Lai , M. J. , Hwang , C. C. , Jiang , C. C. , Chen , J. S. , Cheng , M. H. and Cheng , H. C. 2003 . Low temperature radio-frequency sputtered (Ba,Sr)TiO3 films on Pt/TiN/Ti/Si substrates with various oxygen/argon mixing ratios . J. Electrochem. Soc , 150 : F20 – F27 .
  • Kamel , El F. , Gonon , P. and Jomni , F. 2006 . Electrical properties of low temperature deposited amorphous barium titanate thin films as dielectrics for integrated capacitors . Thin Solid Films , 504 : 201 – 204 .
  • Saha , S. and Krupanidhi , S. B. 2000 . Dielectric response in pulsed laser ablated (Ba,Sr)TiO3 thin films . J. Appl. Phys , 87 : 849 – 854 .
  • Waser , R. 1991 . Bulk conductivity and defect chemistry of acceptor-doped strontium titanate in the quenched state . J. Am. Ceram. Soc , 74 : 1934 – 1940 .
  • Waser , R. and Smyth , D. M. 1996 . Ferroelectric thin films: Synthesis and Basic Properties , Edited by: Taylor , G. W. New York : Gordon and Breach .
  • Fukuda , Y. , Numata , K. , Aoki , K. and Nishimura , A. 1996 . Origin of dielectric relaxation observed for Ba0.5Sr0.5TiO3 thin film capacitor . Jpn. J. Appl. Phys, Part I , 35 : 5178 – 5180 .
  • Lakshminarayanan , B. , Akbar , S. , Wang , C. and Alim , M. 2000 . An In-house-Built Thermally Stimulated Current Measurement Setup. Strontium Titanate as a Test System . Jpn. J. Appl , 39 ( 8 ) : 4830 – 4834 .
  • Hafid , M. , Takeoka , S. , Nishida , S. , Fukami , T. and Sheng , J. 1998 . Dielectric and conduction properties in nickel doped barium strontium titanate ceramics . Jpn. J. Appl.Phys , 37 ( 1 ) : 3370 – 3373 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.